Device Quality Sb-Based Compound Semiconductor Surface: A Comparative Study of Chemical Cleaning
Journal Article
·
· J. Appl. Phys. 109:114908,2011
OSTI ID:1091535
- Research Organization:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- AC02-76SF00515
- OSTI ID:
- 1091535
- Report Number(s):
- SLAC-REPRINT-2013-579
- Journal Information:
- J. Appl. Phys. 109:114908,2011, Journal Name: J. Appl. Phys. 109:114908,2011
- Country of Publication:
- United States
- Language:
- English
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