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Title: Device Quality Sb-Based Compound Semiconductor Surface: A Comparative Study of Chemical Cleaning

Authors:
; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1091535
Report Number(s):
SLAC-REPRINT-2013-579
DOE Contract Number:
AC02-76SF00515
Resource Type:
Journal Article
Resource Relation:
Journal Name: J. Appl. Phys. 109:114908,2011
Research Org:
SLAC National Accelerator Laboratory (SLAC)
Sponsoring Org:
US DOE Office of Science (DOE SC)
Country of Publication:
United States
Language:
English
Subject:
CHEM