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Title: Effects of Al Doping and Annealing on Chemical States and Band Diagram of Y (2) O (3) /Si Gate Stacks Studied Photoemission and X-Ray Absorption Spectroscopy

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1088730
Report Number(s):
SLAC-REPRINT-2013-278
DOE Contract Number:
AC02-76SF00515
Resource Type:
Journal Article
Resource Relation:
Journal Name: J. ac.Sci.Technol.A 28:16,2010
Research Org:
SLAC National Accelerator Laboratory (SLAC)
Sponsoring Org:
US DOE Office of Science (DOE SC)
Country of Publication:
United States
Language:
English
Subject:
CHEM