skip to main content

Title: The Effects of Wet Surface Clean and in Situ Interlayer on in (0.52) Al (0.48) as Metal-Oxide-Semiconductor Characteristics

Authors:
; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1087403
Report Number(s):
SLAC-REPRINT-2013-136
DOE Contract Number:
AC02-76SF00515
Resource Type:
Journal Article
Resource Relation:
Journal Name: Appl Phys. Lett. 96:142906,2010
Research Org:
SLAC National Accelerator Laboratory (SLAC)
Sponsoring Org:
US DOE Office of Science (DOE SC)
Country of Publication:
United States
Language:
English
Subject:
PHYS