Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection

Journal Article · Fri Jun 10 00:00:00 EDT 2011 · Nanotechnology (Print)

DOI:https://doi.org/10.1088/0957-4484/22/28/285310· OSTI ID:1065958

Yang, Jijin ^[1]; Ferranti, David C ^[1]; Stern, Lewis A ^[1]; Sanford, Colin A ^[1]; Huang, Jason ^[1]; Ren, Zheng ^[2]; Qin, Lu-Chang ^[2]; Hall, Adam R ^[3]

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1. Carl Zeiss NTS, LLC, Peabody, MA (United States)
2. Univ. of North Carolina, Chapel Hill, NC (United States). Dept. of Physics and Astronomy
3. Univ. of North Carolina, Greensboro, NC (United States). Joint School of Nanoscience and Nanoengineering

We report the formation of solid-state nanopores using a scanning helium ion microscope. The fabrication process offers the advantage of high sample throughput along with fine control over nanopore dimensions, producing single pores with diameters below 4 nm. Electronic noise associated with ion transport through the resultant pores is found to be comparable with levels measured on devices made with the established technique of transmission electron microscope milling. We demonstrate the utility of our nanopores for biomolecular analysis by measuring the passage of double-strand DNA.

• Research Organization: Energy Frontier Research Centers (EFRC) (United States). Center for Solar Fuels (UNC EFRC)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• DOE Contract Number: SC0001011
• OSTI ID: 1065958
• Journal Information: Nanotechnology (Print), Vol. 22 (28), Issue 28; Related Information: UNC partners with University of North Carolina (lead); Duke University; University of Florida; Georgia Institute of Technology; University; North Carolina Central University; Research Triangle Institute; ISSN 0957-4484
• Publisher: IOP Publishing
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
59 BASIC BIOLOGICAL SCIENCES
catalysis (homogeneous)
catalysis (heterogeneous)
solar (photovoltaic)
solar (fuels)
photosynthesis (natural and artificial)
hydrogen and fuel cells
electrodes - solar
charge transport
materials and chemistry by design
synthesis (novel materials)
synthesis (self-assembly)