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Title: High quality transparent conducting oxide thin films

A transparent conducting oxide (TCO) film comprising: a TCO layer, and dopants selected from the elements consisting of Vanadium, Molybdenum, Tantalum, Niobium, Antimony, Titanium, Zirconium, and Hafnium, wherein the elements are n-type dopants; and wherein the transparent conducting oxide is characterized by an improved electron mobility of about 42 cm.sup.2/V-sec while simultaneously maintaining a high carrier density of .about.4.4e.times.10.sup.20 cm.sup.-3.
Authors:
 [1] ;  [2] ;  [3] ;  [2]
  1. (Conifer, CO)
  2. (Golden, CO)
  3. (Evergreen, CO)
Publication Date:
OSTI Identifier:
1058907
Report Number(s):
8,253,012
US patent application 12/441,707
DOE Contract Number:
AC36-99GO10337
Resource Type:
Patent
Research Org:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English