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Title: Dependence of the Electron Beam Energy and Types of Surface to Determine EBSD Indexing Reliability in Yttria-Stabilized Zirconia

Abstract

Electron backscatter diffraction (EBSD) is a powerful technique for the surface microstructure analysis. EBSD analysis of cubic yttria-stabilized zirconia (YSZ) in two and three dimensions (2-D, 3-D) is demonstrated using sequential slicing from a focused ion beam (FIB) followed by EBSD mapping to represent 3-D reconstructed high density grain structure with random orientation. The statistics related to accuracy of EBSD band detection shows that probability of accurate grain orientation detection increased significantly when the electron beam energy is increased from 10 kV to 30 kV. As a result of better sampling with increased interaction volume, a disparity between local and average grain orientation angle also exhibited the dependence of the electron beam energy to determine the accuracy of grain orientation. To study the accuracy and quality of EBSD band detection as a function of surface roughness and over layer formation, rapid EBSD measurement tests are performed on (a) YSZ surfaces ion-polished at ion beam energies of 65 nA at 30 kV and 1 nA at 30 kV and (b) carbon coated versus uncoated YSZ surfaces. The EBSD results at both 10 kV and 30 kV electron beam energies indicate that EBSD band detection accuracy is negatively affected by surface roughnessmore » and amorphous over layer formation.« less

Authors:
Publication Date:
Research Org.:
Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1037953
Report Number(s):
PNNL-SA-75377
Journal ID: ISSN 1431-9276; MIMIF7; KP1704020; TRN: US201208%%103
DOE Contract Number:  
AC05-76RL01830
Resource Type:
Journal Article
Journal Name:
Microscopy and Microanalysis
Additional Journal Information:
Journal Volume: 18; Journal Issue: 2; Journal ID: ISSN 1431-9276
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ACCURACY; CARBON; DETECTION; DIFFRACTION; DIMENSIONS; ELECTRON BEAMS; ELECTRONS; GRAIN ORIENTATION; ION BEAMS; MICROSTRUCTURE; ORIENTATION; PROBABILITY; RELIABILITY; ROUGHNESS; SAMPLING; STATISTICS; Effect; e-beam; energy; EBSD; Confidence; Index; Misorientation; angle; Grain; Surface; Flatness; YSZ

Citation Formats

Saraf, Laxmikant V. Dependence of the Electron Beam Energy and Types of Surface to Determine EBSD Indexing Reliability in Yttria-Stabilized Zirconia. United States: N. p., 2012. Web. doi:10.1017/S1431927611012815.
Saraf, Laxmikant V. Dependence of the Electron Beam Energy and Types of Surface to Determine EBSD Indexing Reliability in Yttria-Stabilized Zirconia. United States. https://doi.org/10.1017/S1431927611012815
Saraf, Laxmikant V. 2012. "Dependence of the Electron Beam Energy and Types of Surface to Determine EBSD Indexing Reliability in Yttria-Stabilized Zirconia". United States. https://doi.org/10.1017/S1431927611012815.
@article{osti_1037953,
title = {Dependence of the Electron Beam Energy and Types of Surface to Determine EBSD Indexing Reliability in Yttria-Stabilized Zirconia},
author = {Saraf, Laxmikant V},
abstractNote = {Electron backscatter diffraction (EBSD) is a powerful technique for the surface microstructure analysis. EBSD analysis of cubic yttria-stabilized zirconia (YSZ) in two and three dimensions (2-D, 3-D) is demonstrated using sequential slicing from a focused ion beam (FIB) followed by EBSD mapping to represent 3-D reconstructed high density grain structure with random orientation. The statistics related to accuracy of EBSD band detection shows that probability of accurate grain orientation detection increased significantly when the electron beam energy is increased from 10 kV to 30 kV. As a result of better sampling with increased interaction volume, a disparity between local and average grain orientation angle also exhibited the dependence of the electron beam energy to determine the accuracy of grain orientation. To study the accuracy and quality of EBSD band detection as a function of surface roughness and over layer formation, rapid EBSD measurement tests are performed on (a) YSZ surfaces ion-polished at ion beam energies of 65 nA at 30 kV and 1 nA at 30 kV and (b) carbon coated versus uncoated YSZ surfaces. The EBSD results at both 10 kV and 30 kV electron beam energies indicate that EBSD band detection accuracy is negatively affected by surface roughness and amorphous over layer formation.},
doi = {10.1017/S1431927611012815},
url = {https://www.osti.gov/biblio/1037953}, journal = {Microscopy and Microanalysis},
issn = {1431-9276},
number = 2,
volume = 18,
place = {United States},
year = {Sun Apr 01 00:00:00 EDT 2012},
month = {Sun Apr 01 00:00:00 EDT 2012}
}