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Title: Plasma and ion beam processing at Los Alamos

Efforts are underway at Los Alamos National Laboratory to utilize plasma and intense ion beam science and technology of the processing of advanced materials. A major theme involves surface modification of materials, e.g., etching, deposition, alloying, and implantation. In this paper, we concentrate on two programs, plasma source ion implantation and high-intensity pulsed ion beam deposition.
Authors:
; ;  [1]
  1. and others
Publication Date:
OSTI Identifier:
10162991
Report Number(s):
LA-UR--94-2032; CONF-940634--7
ON: DE94014293; TRN: 94:013090
DOE Contract Number:
W-7405-ENG-36
Resource Type:
Conference
Resource Relation:
Conference: 10. international conference on high power particle beams,San Diego, CA (United States),20-24 Jun 1994; Other Information: PBD: [1994]
Research Org:
Los Alamos National Lab., NM (United States)
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; THIN FILMS; ENERGY BEAM DEPOSITION; ION IMPLANTATION; ION BEAMS; GRAPHITE 665300; 661220; INTERACTIONS BETWEEN BEAMS AND CONDENSED MATTER; PARTICLE BEAM PRODUCTION AND HANDLING; TARGETS