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Title: Microfabricated bulk wave acoustic bandgap device

A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).
Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1]
  1. (Albuquerque, NM)
Publication Date:
OSTI Identifier:
1014873
Report Number(s):
7,836,566
US Patent Application 12/764,700
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Research Org:
Sandia Corporation (Albuquerque, NM)
Sponsoring Org:
USODE
Country of Publication:
United States
Language:
English