Electro-optic materials by solid source MOCVD

Conference · Wed Dec 01 00:00:00 EST 1993

OSTI ID:10113997

Hiskes, R; Dicarolis, S A; Fouquet, J ^[1]; Lu, Z; Feigelson, R S ^[2]; Route, R K ^[3]; Leplingard, F ^[4]; Foster, C M ^[5]

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1. Hewlett-Packard Co., Palo Alto, CA (United States)
2. Stanford Univ., CA (United States). Dept. of Materials Science and Engineering
3. Stanford Univ., CA (United States). Center for Materials Research
4. Xerox Palo Alto Research Center, CA (United States)
5. Argonne National Lab., IL (United States)

The solid source MOCVD technique, employing a single powder vaporization source composed of mixed beta-diketonate metalorganic compounds, has been used to grow thin films of a variety of electro-optic materials, including lithium niobate, strontium barium niobate, and potassium niobate. Preliminary results for potassium niobate films indicate that a volatile potassium organometallic source can be synthesized useful for growing potassium niobate by MOCVD. High single phase (001) oriented strontium barium niobate films have been deposited which exhibit waveguiding behavior. The most extensive work has been done on lithium niobate deposited epitaxially on a variety of substrates. Oriented z-axis (001) films have been grown on c-axis sapphire with and without a (111) oriented platinum base electrode and on a bulk grown lithium niobate substrate. Films grown directly on c-axis sapphire at 700 C exhibit x-ray rocking curve linewidths as low as .044 degrees, nearly perfect in-plane orientation as determined by x-ray phi scans, and peak-to-peak surface roughness less than 40 {Angstrom}. Optical waveguiding has been demonstrated by single prism coupling technique on similar films 1175--2000 {Angstrom} thick grown at 500 C, with optical losses of approximately 2 db/cm at 632.8 nm measured over 3.5 cm long films. Polarization vs. electric field measurements on 1100 {Angstrom} thick films grown on platinum show a hysteresis loop indicating ferroelectric behavior.

• Research Organization: Argonne National Lab., IL (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 10113997
• Report Number(s): ANL/MSD/CP-81580; CONF-931108-36; ON: DE94005120
• Resource Relation: Conference: Fall meeting of the Materials Research Society (MRS),Boston, MA (United States),29 Nov - 3 Dec 1993; Other Information: PBD: Dec 1993
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
47 OTHER INSTRUMENTATION
NIOBATES
CHEMICAL VAPOR DEPOSITION
FERROELECTRIC MATERIALS
WAVEGUIDES
ELECTRO-OPTICAL EFFECTS
STRONTIUM COMPOUNDS
LITHIUM COMPOUNDS
BARIUM COMPOUNDS
POTASSIUM COMPOUNDS
ORGANOMETALLIC COMPOUNDS
THIN FILMS
OPTICAL SYSTEMS
360601
440600
PREPARATION AND MANUFACTURE
OPTICAL INSTRUMENTATION