skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Ion Generator

Abstract

Andre Anders discuss magnetron sputtering which is a technology used for fin films.

Authors:
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
987748
Resource Type:
Multimedia
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MAGNETRON SPUTTERING; ATOMS; IONIZATION; IONS; SUBSTRATE

Citation Formats

Anders, Andre. Ion Generator. United States: N. p., 2009. Web.
Anders, Andre. Ion Generator. United States.
Anders, Andre. Tue . "Ion Generator". United States. https://www.osti.gov/servlets/purl/987748.
@article{osti_987748,
title = {Ion Generator},
author = {Anders, Andre},
abstractNote = {Andre Anders discuss magnetron sputtering which is a technology used for fin films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {1}
}

Multimedia:

Save / Share:
Save to Playlist
You must Sign In or Create an Account in order to save documents to your library.