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Title: Silicon Micromachined Dimensional Calibration Artifact for M

Abstract

Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured.

Authors:
; ;
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
987716
Resource Type:
Multimedia
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; SANDIA; NATIONAL; LABORATORIES; RESEARCH; SCIENCE; TECHNOLOGY; R&D; 100; MICROMACHINING

Citation Formats

Tran, Hy, Claudet, Andre, and Shilling, Meghan. Silicon Micromachined Dimensional Calibration Artifact for M. United States: N. p., 2008. Web.
Tran, Hy, Claudet, Andre, & Shilling, Meghan. Silicon Micromachined Dimensional Calibration Artifact for M. United States.
Tran, Hy, Claudet, Andre, and Shilling, Meghan. Thu . "Silicon Micromachined Dimensional Calibration Artifact for M". United States. https://www.osti.gov/servlets/purl/987716.
@article{osti_987716,
title = {Silicon Micromachined Dimensional Calibration Artifact for M},
author = {Tran, Hy and Claudet, Andre and Shilling, Meghan},
abstractNote = {Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {7}
}

Multimedia:

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