Silicon Micromachined Dimensional Calibration Artifact for M
Abstract
Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 987716
- Resource Type:
- Multimedia
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; SANDIA; NATIONAL; LABORATORIES; RESEARCH; SCIENCE; TECHNOLOGY; R&D; 100; MICROMACHINING
Citation Formats
Tran, Hy, Claudet, Andre, and Shilling, Meghan. Silicon Micromachined Dimensional Calibration Artifact for M. United States: N. p., 2008.
Web.
Tran, Hy, Claudet, Andre, & Shilling, Meghan. Silicon Micromachined Dimensional Calibration Artifact for M. United States.
Tran, Hy, Claudet, Andre, and Shilling, Meghan. Thu .
"Silicon Micromachined Dimensional Calibration Artifact for M". United States. https://www.osti.gov/servlets/purl/987716.
@article{osti_987716,
title = {Silicon Micromachined Dimensional Calibration Artifact for M},
author = {Tran, Hy and Claudet, Andre and Shilling, Meghan},
abstractNote = {Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {7}
}