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Title: Achieving Selectivity in Plasma Material Processing: Addressing the Physics While Still Making a Profit

Authors:
Publication Date:
Research Org.:
Princeton Univ., NJ (United States); Iowa State Univ., Ames, IA (United States)
OSTI Identifier:
987499
Resource Type:
Multimedia
Country of Publication:
United States
Language:
English
Subject:
PLASMA; MATERIALS PROCESSING; COMMERCIAL APPLICATIONS

Citation Formats

Kushner, Mark J. Achieving Selectivity in Plasma Material Processing: Addressing the Physics While Still Making a Profit. United States: N. p., 2008. Web.
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Kushner, Mark J. Achieving Selectivity in Plasma Material Processing: Addressing the Physics While Still Making a Profit. United States.
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Kushner, Mark J. Wed . "Achieving Selectivity in Plasma Material Processing: Addressing the Physics While Still Making a Profit". United States. https://www.osti.gov/servlets/purl/987499.
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@article{osti_987499,
title = {Achieving Selectivity in Plasma Material Processing: Addressing the Physics While Still Making a Profit},
author = {Kushner, Mark J},
abstractNote = {},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {2}
}
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Multimedia:
View Multimedia (282.29 MB)