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Title: Silicon Mircomachined Dimensional Calibration Artifact for M

Abstract

Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured. 2008 R&D 100 winner (SAND2008-2227P).

Authors:
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
987144
Resource Type:
Multimedia
Country of Publication:
United States
Language:
English
Subject:
97 MATHEMATICS AND COMPUTING; SANDIA NATIONAL LABORATORIES; RESEARCH SCIENCE TECHNOLOGY; R&D 100; MICROMACHINING; MESOSCALE MEASUREMENT MACHINES; METROLOGY

Citation Formats

Sandia,. Silicon Mircomachined Dimensional Calibration Artifact for M. United States: N. p., 2008. Web.
Sandia,. Silicon Mircomachined Dimensional Calibration Artifact for M. United States.
Sandia,. Thu . "Silicon Mircomachined Dimensional Calibration Artifact for M". United States. https://www.osti.gov/servlets/purl/987144.
@article{osti_987144,
title = {Silicon Mircomachined Dimensional Calibration Artifact for M},
author = {Sandia,},
abstractNote = {Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured. 2008 R&D 100 winner (SAND2008-2227P).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {7}
}

Multimedia:

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