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Title: Silicon Micromachines for Science and Technology

The era of silicon micromechanics is upon us. In areas as diverse as telecommunications, automotive, aerospace, chemistry, entertainment and basic science, the ability to build microscopic machines frmore »om silicon is having a revolutionary impact. In my talk, I will discuss what micromachines are, how they are built and show examples of how they will have a revolutionary impact in many areas of science as well as technology.« less
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Title: Silicon Micromachines for Science and Technology
Authors:
Publication Date: 2002-05-08
OSTI Identifier: 1007471
DOE Contract Number: AC02-07CH11359
Other Number(s): TRN: US1200632
Resource Type: Multimedia
Resource Relation: Conference: Fermilab Colloquia, Fermi National Accelerator Laboratory (FNAL), Batvia, Illinois (United States), presented on May 08, 2002
Research Org: FNAL (Fermi National Accelerator Laboratory (FNAL), Batavia, IL (United States))
Sponsoring Org: USDOE Office of Science (SC)
Subject: 43 PARTICLE ACCELERATORS ; 77 NANOSCIENCE AND NANOTECHNOLOGY ; CHEMISTRY ; FERMILAB ; FERMILAB ACCELERATOR ; SILICON ; Micromachines
Country of Publication: United States
Language: English
Run Time: 1:09:01
System Entry Date: 2016-01-27