DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Abstract

X-ray optics, desired for beamlines at free-electron-laser and diffraction-limited-storage-ring x-ray light sources, must have almost perfect surfaces, capable of delivering light to experiments without significant degradation of brightness and coherence. To accurately characterize such optics at an optical metrology lab, two basic types of surface slope profilometers are used: The long trace profilers (LTPs) and nanometer optical measuring (NOM) like angular deflectometers, based on electronic autocollimator (AC) ELCOMAT-3000. The inherent systematic errors of the instrument's optical sensors set the principle limit to their measuring performance. Where autocollimator of a NOM-like profiler may be calibrated at a unique dedicated facility, this is for a particular configuration of distance, aperture size, and angular range that does not always match the exact use in a scanning measurement with the profiler. Here we discuss the developed methodology, experimental set-up, and numerical methods of transferring the calibration of one reference AC to the scanning AC of the Optical Surface Measuring System (OSMS), recently brought to operation at the ALS Xray Optics Laboratory. We show that precision calibration of the OSMS performed in three steps, allows us to provide high confidence and accuracy low-spatial-frequency metrology and not â€print into' measurements the inherent systematic error of toolmore » in use. Here, with the examples of the OSMS measurements with a state-of-The-Art x-ray aspherical mirror, available from one of the most advanced vendors of X-ray optics, we demonstrate the high efficacy of the developed calibration procedure. The results of our work are important for obtaining high reliability data, needed for sophisticated numerical simulations of beamline performance and optimization of beamline usage of the optics. This work was supported by the U. S. Department of Energy under contract number DE-AC02-05CH11231.« less

Authors:
 [1];  [1];  [1];  [2];  [2];  [3];  [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. Physikalisch-Technische Bundesanstalt (PTB), Braunschweig (Germany)
  3. Helmholtz-Zentrum Berlin (HZB), (Germany). German Research Centre for Materials and Energy
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1887190
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Advances in Metrology for X-Ray and EUV Optics VIII
Additional Journal Information:
Journal Volume: 11109; Conference: SPIE Optical Engineering + Applications, San Diego, CA (United States), 11-15 Aug 2019
Publisher:
SPIE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; synchrotron; radiation; error suppression; calibration; metrology of x-ray optics; surface metrology; profilometry; DLSR; FEL

Citation Formats

Lacey, Ian, Anderson, Kevan, Dickert, Jeff M., Geckeler, Ralf D., Just, Andreas, Siewert, Frank, Smith, Brian V., and Yashchuk, Valeriy V. Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors. United States: N. p., 2019. Web. doi:10.1117/12.2529519.
Lacey, Ian, Anderson, Kevan, Dickert, Jeff M., Geckeler, Ralf D., Just, Andreas, Siewert, Frank, Smith, Brian V., & Yashchuk, Valeriy V. Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors. United States. https://doi.org/10.1117/12.2529519
Lacey, Ian, Anderson, Kevan, Dickert, Jeff M., Geckeler, Ralf D., Just, Andreas, Siewert, Frank, Smith, Brian V., and Yashchuk, Valeriy V. Wed . "Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors". United States. https://doi.org/10.1117/12.2529519. https://www.osti.gov/servlets/purl/1887190.
@article{osti_1887190,
title = {Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors},
author = {Lacey, Ian and Anderson, Kevan and Dickert, Jeff M. and Geckeler, Ralf D. and Just, Andreas and Siewert, Frank and Smith, Brian V. and Yashchuk, Valeriy V.},
abstractNote = {X-ray optics, desired for beamlines at free-electron-laser and diffraction-limited-storage-ring x-ray light sources, must have almost perfect surfaces, capable of delivering light to experiments without significant degradation of brightness and coherence. To accurately characterize such optics at an optical metrology lab, two basic types of surface slope profilometers are used: The long trace profilers (LTPs) and nanometer optical measuring (NOM) like angular deflectometers, based on electronic autocollimator (AC) ELCOMAT-3000. The inherent systematic errors of the instrument's optical sensors set the principle limit to their measuring performance. Where autocollimator of a NOM-like profiler may be calibrated at a unique dedicated facility, this is for a particular configuration of distance, aperture size, and angular range that does not always match the exact use in a scanning measurement with the profiler. Here we discuss the developed methodology, experimental set-up, and numerical methods of transferring the calibration of one reference AC to the scanning AC of the Optical Surface Measuring System (OSMS), recently brought to operation at the ALS Xray Optics Laboratory. We show that precision calibration of the OSMS performed in three steps, allows us to provide high confidence and accuracy low-spatial-frequency metrology and not â€print into' measurements the inherent systematic error of tool in use. Here, with the examples of the OSMS measurements with a state-of-The-Art x-ray aspherical mirror, available from one of the most advanced vendors of X-ray optics, we demonstrate the high efficacy of the developed calibration procedure. The results of our work are important for obtaining high reliability data, needed for sophisticated numerical simulations of beamline performance and optimization of beamline usage of the optics. This work was supported by the U. S. Department of Energy under contract number DE-AC02-05CH11231.},
doi = {10.1117/12.2529519},
journal = {Advances in Metrology for X-Ray and EUV Optics VIII},
number = ,
volume = 11109,
place = {United States},
year = {Wed Oct 02 00:00:00 EDT 2019},
month = {Wed Oct 02 00:00:00 EDT 2019}
}

Works referenced in this record:

Portable long trace profiler: Concept and solution
journal, August 2001

  • Qian, Shinan; Takacs, Peter; Sostero, Giovanni
  • Review of Scientific Instruments, Vol. 72, Issue 8
  • DOI: 10.1063/1.1384452

Error reduction techniques for measuring long synchrotron mirrors
conference, November 1998


Characterization of the error budget of Alba-NOM
journal, May 2013

  • Nicolas, Josep; Martínez, Juan Carlos
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710
  • DOI: 10.1016/j.nima.2012.10.125

Multiplexed high resolution soft x-ray RIXS
conference, January 2016

  • Chuang, Y. -D.; Anderson, C.; Benk, M.
  • PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION – SRI2015, AIP Conference Proceedings
  • DOI: 10.1063/1.4952931

Pencil Beam Interferometer For Aspherical Optical Surfaces
conference, November 1982

  • von Bieren, K.
  • 1982 Technical Symposium East, SPIE Proceedings
  • DOI: 10.1117/12.933743

Long Trace Profile Measurements On Cylindrical Aspheres
conference, January 1989

  • Takacs, Peter Z.; Feng, Su-chen K.; Church, Eugene L.
  • 32nd Annual Technical Symposium, SPIE Proceedings
  • DOI: 10.1117/12.948082

Automated suppression of errors in LTP-II slope measurements with x-ray optics
conference, September 2011

  • Ali, Zulfiqar; Artemiev, Nikolay A.; Cummings, Curtis L.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.894061

Requirements on hard x-ray grazing incidence optics for European XFEL: analysis and simulation of wavefront transformations
conference, May 2009

  • Samoylova, Liubov; Sinn, Harald; Siewert, Frank
  • SPIE Europe Optics + Optoelectronics, SPIE Proceedings
  • DOI: 10.1117/12.822251

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors
conference, November 2018

  • Lacey, Ian; Anderson, Kevan; Centers, Gary P.
  • Advances in X-Ray/EUV Optics and Components XIII
  • DOI: 10.1117/12.2321347

Mirror metrology and bender characterization at ESRF
conference, August 2005

  • Rommeveaux, Amparo; Hignette, Olivier; Morawe, Christian
  • Optics & Photonics 2005, SPIE Proceedings
  • DOI: 10.1117/12.621379

Development of a long trace profiler in situ at National Synchrotron Radiation Research Center
journal, February 2019

  • Lin, Shang-Wei; Wang, Duan-Jen; Fu, Huang-Wen
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5055634

The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS
conference, September 2014

  • Lacey, Ian; Artemiev, Nikolay A.; Domning, Edward E.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2061969

Improvements in the accuracy and the repeatability of long trace profiler measurements
journal, January 1999

  • Takacs, Peter Z.; Church, Eugene L.; Bresloff, Cynthia J.
  • Applied Optics, Vol. 38, Issue 25
  • DOI: 10.1364/AO.38.005468

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics
conference, September 2017

  • Lacey, Ian; Adam, Jérôme; Centers, Gary P.
  • Advances in Metrology for X-Ray and EUV Optics VII
  • DOI: 10.1117/12.2273029

Positioning errors of pencil-beam interferometers for long trace profilers
conference, August 2006

  • Yashchuk, Valeriy V.
  • SPIE Optics + Photonics, SPIE Proceedings
  • DOI: 10.1117/12.677956

Correlation methods in optical metrology with state-of-the-art x-ray mirrors
conference, January 2018

  • Yashchuk, Valeriy V.; Centers, Gary; Gevorkyan, Gevork S.
  • Correlation Optics 2017, Thirteenth International Conference on Correlation Optics
  • DOI: 10.1117/12.2305441

Improved measurement accuracy in a long trace profiler: Compensation for laser pointing instability
journal, August 1994

  • Irick, Steven C.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 347, Issue 1-3
  • DOI: 10.1016/0168-9002(94)91882-1

New operational mode of the pencil beam interferometry based LTP
conference, September 2016

  • Centers, Gary; Smith, Brian V.; Yashchuk, Valeriy V.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2238298

Optimization of the size and shape of the scanning aperture in autocollimator-based deflectometric profilometers
journal, February 2019

  • Lacey, Ian; Geckler, Ralf D.; Just, Andreas
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5058710

Design Of A Long Trace Surface Profiler
conference, April 1987

  • Takacs, Peter Z.; Qian, Shi-nan; Colbert, Jeffrey
  • OE LASE'87 and EO Imaging Symp (January 1987, Los Angeles), SPIE Proceedings
  • DOI: 10.1117/12.939842

Grating metrology for X-ray and V-UV synchrotron beamlines at SOLEIL
journal, February 2019

  • Thomasset, M.; Dvorak, J.; Brochet, S.
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5055284

Air convection noise of pencil-beam interferometer for long trace profiler
conference, August 2006

  • Yashchuk, Valeriy V.; Irick, Steve C.; MacDowell, Alastair A.
  • SPIE Optics + Photonics, SPIE Proceedings
  • DOI: 10.1117/12.681297

Optimal alignment of mirror-based pentaprisms for scanning deflectometric devices
journal, July 2011


The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY
conference, January 2004

  • Siewert, Frank
  • SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings
  • DOI: 10.1063/1.1757928

Developmental long-trace profiler using optimally aligned mirror-based pentaprism
journal, May 2011


High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments
journal, May 2016

  • Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Centers, Gary
  • Review of Scientific Instruments, Vol. 87, Issue 5
  • DOI: 10.1063/1.4950729

Characterization and calibration of 2nd generation slope measuring profiler
journal, May 2010

  • Siewert, Frank; Buchheim, Jana; Zeschke, Thomas
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.12.033

Optimized use and calibration of autocollimators in deflectometry
conference, September 2007

  • Geckeler, Ralf D.; Just, Andreas
  • Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.732384

Aperture alignment in autocollimator-based deflectometric profilometers
journal, May 2016

  • Geckeler, R. D.; Artemiev, N. A.; Barber, S. K.
  • Review of Scientific Instruments, Vol. 87, Issue 5
  • DOI: 10.1063/1.4950734

Comparison of angle standards with the aid of a high-resolution angle encoder
journal, October 2009


Performance of the APS optical slope measuring system
journal, May 2013

  • Qian, Jun; Sullivan, Joe; Erdmann, Mark
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710
  • DOI: 10.1016/j.nima.2012.10.102

New twist in the optical schematic of surface slope measuring long trace profiler
conference, September 2017

  • Gevorkyan, Gevork S.; McKinney, Wayne R.; Lacey, Ian
  • Advances in Metrology for X-Ray and EUV Optics VII
  • DOI: 10.1117/12.2274400

Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler
journal, January 1992

  • Irick, S. C.; McKinney, W. R.; Lunt, D. L. J.
  • Review of Scientific Instruments, Vol. 63, Issue 1
  • DOI: 10.1063/1.1143036

Linear chirped slope profile for spatial calibration in slope measuring deflectometry
journal, May 2016

  • Siewert, F.; Zeschke, T.; Arnold, T.
  • Review of Scientific Instruments, Vol. 87, Issue 5
  • DOI: 10.1063/1.4950737

Capabilities and limitations of the self-calibration of angle encoders
journal, March 2014


Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine
journal, June 2015

  • Qian, Shinan; Geckeler, Ralf D.; Just, Andreas
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 785
  • DOI: 10.1016/j.nima.2015.02.065

A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology capabilities, performance, and future plans
conference, September 2014

  • Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Lacey, Ian
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2062042

Development of a high-performance gantry system for a new generation of optical slope measuring profilers
journal, May 2013

  • Assoufid, Lahsen; Brown, Nathan; Crews, Dan
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710
  • DOI: 10.1016/j.nima.2012.11.063

Correlation analysis of surface slope metrology measurements of high quality x-ray optics
conference, September 2013

  • Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Lacey, Ian
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2024694

Development of a long trace profiler at SPring-8 using a newly developed slope sensor
conference, September 2016

  • Senba, Y.; Kishimoto, H.; Miura, T.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2239394

Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler
journal, May 2010

  • Yashchuk, Valeriy V.; Barber, Samuel; Domning, Edward E.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.10.175

Optimal measurement strategies for effective suppression of drift errors
journal, November 2009

  • Yashchuk, Valeriy V.
  • Review of Scientific Instruments, Vol. 80, Issue 11
  • DOI: 10.1063/1.3249559

Investigations on the spatial resolution of autocollimator-based slope measuring profilers
journal, May 2013

  • Siewert, F.; Buchheim, J.; Höft, T.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710
  • DOI: 10.1016/j.nima.2012.10.130

XUV synchrotron optical components for the Advanced Light Source: summary of the requirements and the developmental program
conference, January 1993

  • McKinney, Wayne R.; Irick, Steven C.; Lunt, David L.
  • SPIE Proceedings
  • DOI: 10.1117/12.138697

Characterization of optical surfaces for the present generations of synchrotron sources
conference, October 2008

  • Thomasset, M.; Polack, F.
  • Ninth International Symposium on Laser Metrology, SPIE Proceedings
  • DOI: 10.1117/12.814695

Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8
journal, May 2010

  • Senba, Y.; Kishimoto, H.; Ohashi, H.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.12.007

The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability
journal, May 2010

  • Alcock, S. G.; Sawhney, K. J. S.; Scott, S.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.10.137

Autocollimators for deflectometry: Current status and future progress
journal, May 2010

  • Geckeler, Ralf D.; Just, Andreas; Krause, Michael
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.11.021

Investigation on lateral resolution of surface slope profilers
conference, September 2019

  • Yashchuk, Valeriy V.; Lacey, Ian; Arnold, Thomas
  • Advances in Metrology for X-Ray and EUV Optics VIII
  • DOI: 10.1117/12.2539527

Proposal for a universal test mirror for characterization of slope measuring instruments
conference, September 2007

  • Yashchuk, Valeriy V.; McKinney, Wayne R.; Warwick, Tony
  • Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.732719

Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source
journal, February 2019

  • Yashchuk, Valeriy V.; Lacey, Ian; Gevorkyan, Gevork S.
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5057441

Technique for measuring the groove density of diffraction gratings using the long trace profiler
journal, July 2003

  • Cocco, D.; Sostero, G.; Zangrando, M.
  • Review of Scientific Instruments, Vol. 74, Issue 7
  • DOI: 10.1063/1.1584080

The new PTB angle comparator
journal, July 1998


Interferometry of wave fronts reflected off conical surfaces
journal, January 1983


Innovative nano-accuracy surface profiler for sub-50 nrad rms mirror test
conference, October 2016

  • Qian, Shinan; Idir, Mourad
  • Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings
  • DOI: 10.1117/12.2247575

Environmental influences on autocollimator-based angle and form metrology
journal, February 2019

  • Geckeler, Ralf D.; Křen, Petr; Just, Andreas
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5057402

Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory
conference, August 2008

  • Kirschman, Jonathan L.; Domning, Edward E.; McKinney, Wayne R.
  • Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.796335