Impacts of Mode Mixity on Controlled Spalling of (100)-Oriented Germanium
Abstract
Controlled spalling is a technology to prepare single-crystal thin films of semiconductors by fracture with a subsurface crack propagating nearly parallel to the substrate surface. Practical applications require uniform thickness and a smooth surface across the whole film. Both wafer-scale and patterned-stressor-defined small-area spalling of germanium substrates are conducted experimentally and numerically. River line features are observed on spalled surfaces close to lateral edges of the spall, regardless of the spall direction and the size of the spalled area. Three-dimensional finite element method modeling shows the river lines are caused by mixed mode I?+?III loading near the lateral edges of spall and predicts a spall depth variation near the lateral edges of spall due to mixed mode I?+?II loading. The absolute range of river lines increases with lateral size of spall, while the relative range of river lines decreases, consistent with variations in mode mixity.
- Authors:
-
[2]
- Colorado School of Mines, Golden, CO (United States)
- Colorado School of Mines, Golden, CO (United States); National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Publication Date:
- Research Org.:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Org.:
- U.S. Department of Defense (DOD), Air Force Research Laboratory; USDOE
- OSTI Identifier:
- 1781624
- Report Number(s):
- NREL/JA-5900-78868
Journal ID: ISSN 1047-4838; MainId:32785;UUID:e855b7e4-75e2-4d6f-b0d5-9965b661875f;MainAdminID:22351
- Grant/Contract Number:
- AC36-08GO28308
- Resource Type:
- Accepted Manuscript
- Journal Name:
- JOM. Journal of the Minerals, Metals & Materials Society
- Additional Journal Information:
- Journal Volume: 73; Journal Issue: 6; Journal ID: ISSN 1047-4838
- Publisher:
- Springer
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; controlled spalling; crack propagation; river lines; twist hackles; mode III loading; Ge wafers; germanium wafers; photovoltaic; PV
Citation Formats
Chen, Jie, Chenenko, Jason, and Packard, Corinne E. Impacts of Mode Mixity on Controlled Spalling of (100)-Oriented Germanium. United States: N. p., 2021.
Web. doi:10.1007/s11837-021-04639-5.
Chen, Jie, Chenenko, Jason, & Packard, Corinne E. Impacts of Mode Mixity on Controlled Spalling of (100)-Oriented Germanium. United States. https://doi.org/10.1007/s11837-021-04639-5
Chen, Jie, Chenenko, Jason, and Packard, Corinne E. Thu .
"Impacts of Mode Mixity on Controlled Spalling of (100)-Oriented Germanium". United States. https://doi.org/10.1007/s11837-021-04639-5. https://www.osti.gov/servlets/purl/1781624.
@article{osti_1781624,
title = {Impacts of Mode Mixity on Controlled Spalling of (100)-Oriented Germanium},
author = {Chen, Jie and Chenenko, Jason and Packard, Corinne E.},
abstractNote = {Controlled spalling is a technology to prepare single-crystal thin films of semiconductors by fracture with a subsurface crack propagating nearly parallel to the substrate surface. Practical applications require uniform thickness and a smooth surface across the whole film. Both wafer-scale and patterned-stressor-defined small-area spalling of germanium substrates are conducted experimentally and numerically. River line features are observed on spalled surfaces close to lateral edges of the spall, regardless of the spall direction and the size of the spalled area. Three-dimensional finite element method modeling shows the river lines are caused by mixed mode I?+?III loading near the lateral edges of spall and predicts a spall depth variation near the lateral edges of spall due to mixed mode I?+?II loading. The absolute range of river lines increases with lateral size of spall, while the relative range of river lines decreases, consistent with variations in mode mixity.},
doi = {10.1007/s11837-021-04639-5},
journal = {JOM. Journal of the Minerals, Metals & Materials Society},
number = 6,
volume = 73,
place = {United States},
year = {Thu Apr 08 00:00:00 EDT 2021},
month = {Thu Apr 08 00:00:00 EDT 2021}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Fracture ab initio: A force-based scaling law for atomistically informed continuum models
journal, November 2018
- Möller, Johannes J.; Bitzek, Erik; Janisch, Rebecca
- Journal of Materials Research, Vol. 33, Issue 22
Traction curves for the decohesion of covalent crystals
journal, January 2017
- Enrique, Raúl A.; Van der Ven, Anton
- Applied Physics Letters, Vol. 110, Issue 2
Single crystal cleavage of brittle materials
journal, February 1994
- Schultz, Richard A.; Jensen, Martin C.; Bradt, Richard C.
- International Journal of Fracture, Vol. 65, Issue 4
Kerf-Less Removal of Si, Ge, and III–V Layers by Controlled Spalling to Enable Low-Cost PV Technologies
journal, April 2012
- Bedell, Stephen W.; Shahrjerdi, Davood; Hekmatshoar, Bahman
- IEEE Journal of Photovoltaics, Vol. 2, Issue 2
Controlled exfoliation of (100) GaAs-based devices by spalling fracture
journal, January 2016
- Sweet, Cassi A.; Schulte, Kevin L.; Simon, John D.
- Applied Physics Letters, Vol. 108, Issue 1
Layer transfer of bulk gallium nitride by controlled spalling
journal, July 2017
- Bedell, S. W.; Lauro, P.; Ott, J. A.
- Journal of Applied Physics, Vol. 122, Issue 2
Analytic model of spalling technique for thickness-controlled separation of single-crystalline semiconductor layers
journal, January 2020
- Park, Honghwi; Lim, Changhee; Lee, Chang-Ju
- Solid-State Electronics, Vol. 163
Simple bond energy approach for non-destructive measurements of the fracture toughness of brittle materials
journal, June 2007
- King, S. W.; Antonelli, G. A.
- Thin Solid Films, Vol. 515, Issue 18
Ultralight High-Efficiency Flexible InGaP/(In)GaAs Tandem Solar Cells on Plastic
journal, December 2012
- Shahrjerdi, Davood; Bedell, Stephen W.; Bayram, Can
- Advanced Energy Materials, Vol. 3, Issue 5
III–V Solar Cells Grown on Unpolished and Reusable Spalled Ge Substrates
journal, September 2018
- Jain, Nikhil; Crouse, Dustin; Simon, John
- IEEE Journal of Photovoltaics, Vol. 8, Issue 5
Layer transfer by controlled spalling
journal, March 2013
- Bedell, Stephen W.; Fogel, Keith; Lauro, Paul
- Journal of Physics D: Applied Physics, Vol. 46, Issue 15
(Invited) Cost-Effective Layer Transfer by Controlled Spalling Technology
journal, March 2013
- Bedell, S. W.; Shahrjerdi, D.; Fogel, K.
- ECS Transactions, Vol. 50, Issue 7
Controlled spalling-based mechanical substrate exfoliation for III-V solar cells: A review
journal, June 2021
- Chen, Jie; Packard, Corinne E.
- Solar Energy Materials and Solar Cells, Vol. 225
Extremely Flexible Nanoscale Ultrathin Body Silicon Integrated Circuits on Plastic
journal, December 2012
- Shahrjerdi, Davood; Bedell, Stephen W.
- Nano Letters, Vol. 13, Issue 1, p. 315-320
Techno-economic analysis of three different substrate removal and reuse strategies for III-V solar cells: Techno-economic analysis for III-V solar cells
journal, May 2016
- Ward, J. Scott; Remo, Timothy; Horowitz, Kelsey
- Progress in Photovoltaics: Research and Applications, Vol. 24, Issue 9
Single Crystal Flexible Electronics Enabled by 3D Spalling
journal, February 2017
- Li, Ning; Bedell, Stephen; Hu, Huan
- Advanced Materials, Vol. 29, Issue 18
Steady-state cracking in brittle substrates beneath adherent films
journal, January 1989
- Suo, Zhigang; Hutchinson, John W.
- International Journal of Solids and Structures, Vol. 25, Issue 11
Sub-5 μ m-thick spalled single crystal Si foils by decoupling crack initiation and propagation
journal, September 2016
- Lee, Yong Hwan; Kim, Yong-Jae; Han, Seung Min Jane
- Applied Physics Letters, Vol. 109, Issue 13
Brittle fracture of solids with arbitrary cracks
journal, December 1974
- Gol'dstein, R. V.; Salganik, R. L.
- International Journal of Fracture, Vol. 10, Issue 4
The effect of mixed mode I/III on crack evolution in brittle solids
journal, January 1995
- Hull, Derek
- International Journal of Fracture, Vol. 70, Issue 1
Formation of fracture ‘lances’ in glass
journal, April 1969
- Sommer, E.
- Engineering Fracture Mechanics, Vol. 1, Issue 3
On the Crack Extension in Plates Under Plane Loading and Transverse Shear
journal, December 1963
- Erdogan, F.; Sih, G. C.
- Journal of Basic Engineering, Vol. 85, Issue 4
Increased fracture depth range in controlled spalling of (100)-oriented germanium via electroplating
journal, March 2018
- Crouse, Dustin; Simon, John; Schulte, Kevin L.
- Thin Solid Films, Vol. 649
Slightly curved or kinked cracks
journal, April 1980
- Cotterell, B.; Rice, J. R.
- International Journal of Fracture, Vol. 16, Issue 2
Formation and interpretation of dilatant echelon cracks
journal, January 1982
- Pollard, David D.; Segall, Paul; Delaney, Paul T.
- Geological Society of America Bulletin, Vol. 93, Issue 12
Wafer-Scale Ultrathin, Single-Crystal Si and GaAs Photocathodes for Photoelectrochemical Hydrogen Production
journal, September 2018
- Lee, Yong Hwan; Kim, Jaehoon; Oh, Jihun
- ACS Applied Materials & Interfaces, Vol. 10, Issue 39
Monocrystalline InP Thin Films with Tunable Surface Morphology and Energy Band gap
journal, July 2020
- Lee, Yonghwan; Yang, Inseok; Tan, Hark Hoe
- ACS Applied Materials & Interfaces, Vol. 12, Issue 32
On the growth of cracks under mixed-mode I + III loading
journal, March 2016
- Pham, K. H.; Ravi-Chandar, K.
- International Journal of Fracture, Vol. 199, Issue 1
Shear Stress Intensity Factors for a Planar Crack With Slightly Curved Front
journal, December 1986
- Gao, Huajian; Rice, James R.
- Journal of Applied Mechanics, Vol. 53, Issue 4
Current Distribution for the Metallization of Resistive Wafer Substrates under Controlled Geometric Variations
journal, January 2006
- Lee, Jong-Min; McCrabb, Heather; Jennings Taylor, E.
- Journal of The Electrochemical Society, Vol. 153, Issue 4
Review—Management of Copper Damascene Plating
journal, November 2018
- Carpio, R.; Jaworski, A.
- Journal of The Electrochemical Society, Vol. 166, Issue 1
Theoretical analysis of crack front instability in mode I+III
journal, September 2011
- Leblond, Jean-Baptiste; Karma, Alain; Lazarus, Véronique
- Journal of the Mechanics and Physics of Solids, Vol. 59, Issue 9
Further examination of the criterion for crack initiation under mixed-mode I+III loading
journal, September 2014
- Pham, K. H.; Ravi-Chandar, K.
- International Journal of Fracture, Vol. 189, Issue 2