Shoulder fillet effects in strength distributions of microelectromechanical system components
Abstract
The failure forces and fracture strengths of polysilicon microelectromechanical system (MEMS) components in the form of stepped tensile bars with shoulder fillets were measured using a sequential failure chain methodology. Approximately 150 specimens for each of four fillet geometries with different stress concentration factors were tested. The resulting failure force and strength distributions of the four geometries were related by a common sidewall flaw population existing within different effective stressed lengths. The failure forces, strengths, and flaw population were well described by a weakest-link based analytical framework. Finite element analysis was used to verify body-force based expressions for the stress concentration factors and to provide insight into the variation of specimen effective length with fillet geometry. Monte Carlo simulations of flaw size and location, based on the strength measurements, were also used to provide insight into fillet shape and size effects. The successful description of the shoulder fillet specimen strengths provides further empirical support for application of the strength and flaw framework in MEMS fabrication and design optimization.
- Authors:
-
- National Inst. of Standards and Technology (NIST), Boulder, CO (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- National Inst. of Standards and Technology (NIST), Boulder, CO (United States)
- National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1738922
- Report Number(s):
- SAND-2020-8355J
Journal ID: ISSN 0960-1317; 689903
- Grant/Contract Number:
- AC04-94AL85000; NA0003525
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Additional Journal Information:
- Journal Volume: 30; Journal Issue: 12; Journal ID: ISSN 0960-1317
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; strength distributions; flaw populations; polysilicon MEMS; shoulder fillets; fracture
Citation Formats
DelRio, Frank W., Boyce, Brad L., Benzing, Jake T., Friedman, Lawrence H., and Cook, Robert F. Shoulder fillet effects in strength distributions of microelectromechanical system components. United States: N. p., 2020.
Web. doi:10.1088/1361-6439/abbf89.
DelRio, Frank W., Boyce, Brad L., Benzing, Jake T., Friedman, Lawrence H., & Cook, Robert F. Shoulder fillet effects in strength distributions of microelectromechanical system components. United States. https://doi.org/10.1088/1361-6439/abbf89
DelRio, Frank W., Boyce, Brad L., Benzing, Jake T., Friedman, Lawrence H., and Cook, Robert F. Fri .
"Shoulder fillet effects in strength distributions of microelectromechanical system components". United States. https://doi.org/10.1088/1361-6439/abbf89. https://www.osti.gov/servlets/purl/1738922.
@article{osti_1738922,
title = {Shoulder fillet effects in strength distributions of microelectromechanical system components},
author = {DelRio, Frank W. and Boyce, Brad L. and Benzing, Jake T. and Friedman, Lawrence H. and Cook, Robert F.},
abstractNote = {The failure forces and fracture strengths of polysilicon microelectromechanical system (MEMS) components in the form of stepped tensile bars with shoulder fillets were measured using a sequential failure chain methodology. Approximately 150 specimens for each of four fillet geometries with different stress concentration factors were tested. The resulting failure force and strength distributions of the four geometries were related by a common sidewall flaw population existing within different effective stressed lengths. The failure forces, strengths, and flaw population were well described by a weakest-link based analytical framework. Finite element analysis was used to verify body-force based expressions for the stress concentration factors and to provide insight into the variation of specimen effective length with fillet geometry. Monte Carlo simulations of flaw size and location, based on the strength measurements, were also used to provide insight into fillet shape and size effects. The successful description of the shoulder fillet specimen strengths provides further empirical support for application of the strength and flaw framework in MEMS fabrication and design optimization.},
doi = {10.1088/1361-6439/abbf89},
journal = {Journal of Micromechanics and Microengineering. Structures, Devices and Systems},
number = 12,
volume = 30,
place = {United States},
year = {Fri Nov 06 00:00:00 EST 2020},
month = {Fri Nov 06 00:00:00 EST 2020}
}
Works referenced in this record:
Predicting strength distributions of MEMS structures using flaw size and spatial density
journal, November 2019
- Cook, Robert F.; DelRio, Frank W.; Boyce, Brad L.
- Microsystems & Nanoengineering, Vol. 5, Issue 1
Strength and sharp contact fracture of silicon
journal, February 2006
- Cook, R. F.
- Journal of Materials Science, Vol. 41, Issue 3
Predicting Fracture in Micrometer-Scale Polycrystalline Silicon MEMS Structures
journal, August 2011
- Reedy, E. David; Boyce, Brad L.; Foulk, James W.
- Journal of Microelectromechanical Systems, Vol. 20, Issue 4
A Sequential Tensile Method for Rapid Characterization of Extreme-value Behavior in Microfabricated Materials
journal, September 2009
- Boyce, B. L.
- Experimental Mechanics, Vol. 50, Issue 7
Monte carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks
journal, July 2010
- Mariani, Stefano; Martini, Roberto; Ghisi, Aldo
- International Journal of Fracture, Vol. 167, Issue 1
Validated Prediction of the Strength Size Effect in Polycrystalline Silicon Using the Three-Parameter Weibull Function
journal, September 2014
- Saleh, Mohamed E.; Beuth, Jack L.; de Boer, Maarten P.
- Journal of the American Ceramic Society, Vol. 97, Issue 12
Is Weibull distribution the correct model for predicting probability of failure initiated by non-interacting flaws?
journal, February 2009
- Todinov, M. T.
- International Journal of Solids and Structures, Vol. 46, Issue 3-4
Stress Concentration Factor Formulas Useful for Any Dimensions of Shoulder Fillet in a Flat Test Specimen Under Tension and Bending
journal, January 2004
- Noda, Na; Takase, Y.
- Journal of Testing and Evaluation, Vol. 32, Issue 3
A microsystem for the fracture characterization of polysilicon at the micro-scale
journal, March 2011
- Corigliano, A.; Ghisi, A.; Langfelder, G.
- European Journal of Mechanics - A/Solids, Vol. 30, Issue 2
Fracture strength of micro- and nano-scale silicon components
journal, June 2015
- DelRio, Frank W.; Cook, Robert F.; Boyce, Brad L.
- Applied Physics Reviews, Vol. 2, Issue 2
Stress concentration factors for shoulder fillets in round and flat bars under various loads
journal, January 1997
- Noda, N.; Takase, Y.; Monda, K.
- International Journal of Fatigue, Vol. 19, Issue 1
Deformation and fracture of single-crystal silicon theta-like specimens
journal, October 2011
- Gaither, Michael S.; DelRio, Frank W.; Gates, Richard S.
- Journal of Materials Research, Vol. 26, Issue 20
Strength Distributions in Polycrystalline Silicon MEMS
journal, April 2007
- Boyce, Brad L.; Grazier, J. Mark; Buchheit, Thomas E.
- Journal of Microelectromechanical Systems, Vol. 16, Issue 2
Etching Process Effects on Surface Structure, Fracture Strength, and Reliability of Single-Crystal Silicon Theta-Like Specimens
journal, June 2013
- Gaither, Michael S.; Gates, Richard S.; Kirkpatrick, Rebecca
- Journal of Microelectromechanical Systems, Vol. 22, Issue 3
Decoupling small-scale roughness and long-range features on deep reactive ion etched silicon surfaces
journal, September 2013
- DelRio, Frank W.; Friedman, Lawrence H.; Gaither, Michael S.
- Journal of Applied Physics, Vol. 114, Issue 11
Strength distribution of single-crystal silicon theta-like specimens
journal, August 2010
- Gaither, Michael S.; DelRio, Frank W.; Gates, Richard S.
- Scripta Materialia, Vol. 63, Issue 4
Determination of ceramic flaw populations from component strengths
journal, February 2019
- Cook, Robert F.; DelRio, Frank W.
- Journal of the American Ceramic Society, Vol. 102, Issue 8
An argument for proof testing brittle microsystems in high-reliability applications
journal, October 2008
- Boyce, B. L.; Ballarini, R.; Chasiotis, I.
- Journal of Micromechanics and Microengineering, Vol. 18, Issue 11
Vapor deposition of amino-functionalized self-assembled monolayers on MEMS
conference, January 2003
- Hankins, Matthew G.; Resnick, Paul J.; Clews, Peggy J.
- Micromachining and Microfabrication, SPIE Proceedings
Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures
journal, April 1999
- Suwito, Wan; Dunn, Martin L.; Cunningham, Shawn J.
- Journal of Applied Physics, Vol. 85, Issue 7
On weakest link theory and Weibull statistics
journal, January 2017
- Zok, Frank W.
- Journal of the American Ceramic Society, Vol. 100, Issue 4
A Renewal Weakest-Link Model of Strength Distribution of Polycrystalline Silicon MEMS Structures
journal, May 2019
- Xu, Zhifeng; Ballarini, Roberto; Le, Jia-Liang
- Journal of Applied Mechanics, Vol. 86, Issue 8
Material Flaw Populations and Component Strength Distributions in the Context of the Weibull Function
journal, August 2018
- Cook, R. F.; DelRio, F. W.
- Experimental Mechanics, Vol. 59, Issue 3