Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering
Abstract
Resonant soft x-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available x-ray transparent substrates are composed of Si3N4 and thereby absorb incident x-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al2O3 free-standing films for use as RSoXS windows. Al2O3 films offer higher x-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al2O3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si3N4 substrates.
- Authors:
-
- Pennsylvania State Univ., University Park, PA (United States)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
- Pennsylvania State Univ., University Park, PA (United States); Pennsylvania State Univ., University Park, PA (United States). Materials Research Inst.
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)
- OSTI Identifier:
- 1656502
- Grant/Contract Number:
- AC02-05CH11231; MRI-1626566
- Resource Type:
- Accepted Manuscript
- Journal Name:
- MRS Communications
- Additional Journal Information:
- Journal Volume: 9; Journal Issue: 01; Journal ID: ISSN 2159-6859
- Publisher:
- Materials Research Society - Cambridge University Press
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Ye, Dan, Rongpipi, Sintu, Litofsky, Joshua H., Lee, Youngmin, Culp, Tyler E., Yoo, Sang Ha, Jackson, Thomas N., Wang, Cheng, Gomez, Esther W., and Gomez, Enrique D. Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering. United States: N. p., 2018.
Web. doi:10.1557/mrc.2018.195.
Ye, Dan, Rongpipi, Sintu, Litofsky, Joshua H., Lee, Youngmin, Culp, Tyler E., Yoo, Sang Ha, Jackson, Thomas N., Wang, Cheng, Gomez, Esther W., & Gomez, Enrique D. Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering. United States. https://doi.org/10.1557/mrc.2018.195
Ye, Dan, Rongpipi, Sintu, Litofsky, Joshua H., Lee, Youngmin, Culp, Tyler E., Yoo, Sang Ha, Jackson, Thomas N., Wang, Cheng, Gomez, Esther W., and Gomez, Enrique D. Mon .
"Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering". United States. https://doi.org/10.1557/mrc.2018.195. https://www.osti.gov/servlets/purl/1656502.
@article{osti_1656502,
title = {Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering},
author = {Ye, Dan and Rongpipi, Sintu and Litofsky, Joshua H. and Lee, Youngmin and Culp, Tyler E. and Yoo, Sang Ha and Jackson, Thomas N. and Wang, Cheng and Gomez, Esther W. and Gomez, Enrique D.},
abstractNote = {Resonant soft x-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available x-ray transparent substrates are composed of Si3N4 and thereby absorb incident x-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al2O3 free-standing films for use as RSoXS windows. Al2O3 films offer higher x-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al2O3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si3N4 substrates.},
doi = {10.1557/mrc.2018.195},
journal = {MRS Communications},
number = 01,
volume = 9,
place = {United States},
year = {Mon Sep 17 00:00:00 EDT 2018},
month = {Mon Sep 17 00:00:00 EDT 2018}
}
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