Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template
Abstract
Nanoporous conformal coating is an important class of materials for electrocatalysis, water purification, antireflective coatings, etc. Common synthesis methods of porous films often require harsh conditions (high temperature and high plasma power) or specific substrate materials. Here, we report a plasma-enhanced sequential infiltration synthesis (PE SIS) as a new platform toward deposition of nanoporous inorganic films. PE SIS is based on oxygen-plasma-induced rapid conversion of metal precursors selectively adsorbed in a block-copolymer template. Porosity and thickness of resulting materials can be easily controlled by characteristics of the template. PE SIS is conducted under gentle conditions, and can be applied to a broad range of substrates, including water-sensitive surfaces. PE SIS offers adventurous rapid infiltration with improved ability to obtain highly interconnected porous alumina films with thicknesses up to 5 μm. Here, we show that full infiltration of the polar domain of the polymer template can be achieved upon initial exposure to TMA, followed by its oxygen-plasma-induced conversion into a functional material. Since different types of plasma (such as oxygen, nitrogen, hydrogen, etc.) induce conversion of a broad range of metal precursors, PE SIS opens a new approach for synthesis of highly porous materials with various elemental compositions and stoichiometries.
- Authors:
-
- Univ. of North Texas, Denton, TX (United States)
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); University of North Texas
- OSTI Identifier:
- 1557610
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- ACS Omega
- Additional Journal Information:
- Journal Volume: 2; Journal Issue: 11; Journal ID: ISSN 2470-1343
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; Coating materials; Deposition process; Heat treatment; Luminescence; Perovskites; Phase; Power; Pressure
Citation Formats
She, Yunlong, Lee, Jihyung, Diroll, Benjamin T., Lee, Byeongdu, Aouadi, Samir, Shevchenko, Elena V., and Berman, Diana. Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template. United States: N. p., 2017.
Web. doi:10.1021/acsomega.7b01314.
She, Yunlong, Lee, Jihyung, Diroll, Benjamin T., Lee, Byeongdu, Aouadi, Samir, Shevchenko, Elena V., & Berman, Diana. Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template. United States. https://doi.org/10.1021/acsomega.7b01314
She, Yunlong, Lee, Jihyung, Diroll, Benjamin T., Lee, Byeongdu, Aouadi, Samir, Shevchenko, Elena V., and Berman, Diana. Fri .
"Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template". United States. https://doi.org/10.1021/acsomega.7b01314. https://www.osti.gov/servlets/purl/1557610.
@article{osti_1557610,
title = {Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template},
author = {She, Yunlong and Lee, Jihyung and Diroll, Benjamin T. and Lee, Byeongdu and Aouadi, Samir and Shevchenko, Elena V. and Berman, Diana},
abstractNote = {Nanoporous conformal coating is an important class of materials for electrocatalysis, water purification, antireflective coatings, etc. Common synthesis methods of porous films often require harsh conditions (high temperature and high plasma power) or specific substrate materials. Here, we report a plasma-enhanced sequential infiltration synthesis (PE SIS) as a new platform toward deposition of nanoporous inorganic films. PE SIS is based on oxygen-plasma-induced rapid conversion of metal precursors selectively adsorbed in a block-copolymer template. Porosity and thickness of resulting materials can be easily controlled by characteristics of the template. PE SIS is conducted under gentle conditions, and can be applied to a broad range of substrates, including water-sensitive surfaces. PE SIS offers adventurous rapid infiltration with improved ability to obtain highly interconnected porous alumina films with thicknesses up to 5 μm. Here, we show that full infiltration of the polar domain of the polymer template can be achieved upon initial exposure to TMA, followed by its oxygen-plasma-induced conversion into a functional material. Since different types of plasma (such as oxygen, nitrogen, hydrogen, etc.) induce conversion of a broad range of metal precursors, PE SIS opens a new approach for synthesis of highly porous materials with various elemental compositions and stoichiometries.},
doi = {10.1021/acsomega.7b01314},
journal = {ACS Omega},
number = 11,
volume = 2,
place = {United States},
year = {Fri Nov 10 00:00:00 EST 2017},
month = {Fri Nov 10 00:00:00 EST 2017}
}
Web of Science
Works referenced in this record:
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
journal, May 2011
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- ACS Nano, Vol. 5, Issue 6, p. 4600-4606
Etch properties of resists modified by sequential infiltration synthesis
journal, November 2011
- Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6, Article No. 06FG01
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011
- Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E.
- The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729
Effects of thermal treatment on porous amorphous fluoropolymer film with a low dielectric constant
journal, June 2001
- Ding, Shi-Jin; Wang, Peng-Fei; Wan, Xin-Gong
- Materials Science and Engineering: B, Vol. 83, Issue 1-3
Functional nanomaterials based on block copolymer self-assembly
journal, November 2010
- Kim, Jin Kon; Yang, Seung Yun; Lee, Youngmin
- Progress in Polymer Science, Vol. 35, Issue 11
Nanoporous leaky waveguide based chemical and biological sensors with broadband spectroscopy
journal, January 2007
- Qi, Zhi-Mei; Honma, Itaru; Zhou, Haoshen
- Applied Physics Letters, Vol. 90, Issue 1
Antireflective Coatings for Glass and Transparent Polymers
journal, May 2016
- Buskens, Pascal; Burghoorn, Marieke; Mourad, Maurice Christian Danho
- Langmuir, Vol. 32, Issue 27
Self-Cleaning Antireflective Optical Coatings
journal, October 2013
- Guldin, Stefan; Kohn, Peter; Stefik, Morgan
- Nano Letters, Vol. 13, Issue 11
Advanced Structural Engineering of Nanoporous Photonic Structures: Tailoring Nanopore Architecture to Enhance Sensing Properties
journal, November 2014
- Kumeria, Tushar; Santos, Abel; Rahman, Mohammad Mahbubur
- ACS Photonics, Vol. 1, Issue 12
Outlook and challenges for hydrogen storage in nanoporous materials
journal, February 2016
- Broom, D. P.; Webb, C. J.; Hurst, K. E.
- Applied Physics A, Vol. 122, Issue 3
Silica Nanorod-Array Films with Very Low Refractive Indices
journal, June 2005
- Xi, J. -Q.; Kim, Jong Kyu; Schubert, E. F.
- Nano Letters, Vol. 5, Issue 7
Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection
journal, March 2007
- Xi, J. -Q.; Schubert, Martin F.; Kim, Jong Kyu
- Nature Photonics, Vol. 1, Issue 3
An Abrasion-Resistant and Broadband Antireflective Silica Coating by Block Copolymer Assisted Sol–Gel Method
journal, August 2014
- Zou, Liping; Li, Xiaoguang; Zhang, Qinghua
- Langmuir, Vol. 30, Issue 34
Novel Highly Porous Metal Technology in Artificial Hip and Knee Replacement: Processing Methodologies and Clinical Applications
journal, December 2012
- Muth, John; Poggie, Matthew; Kulesha, Gene
- JOM, Vol. 65, Issue 2
Fabrication methods of porous metals for use in orthopaedic applications
journal, May 2006
- Ryan, G.; Pandit, A.; Apatsidis, D.
- Biomaterials, Vol. 27, Issue 13
Formation and characterization of self-lubricating MoS2 precursor films on anodized aluminium
journal, May 1997
- Skeldon, P.; Wang, H. W.; Thompson, G. E.
- Wear, Vol. 206, Issue 1-2
Novel tribological properties of anodic oxide coating of aluminum impregnated with iodine compound
journal, June 2003
- Takaya, M.; Hashimoto, K.; Toda, Y.
- Surface and Coatings Technology, Vol. 169-170
Nanoporous Membranes Derived from Block Copolymers: From Drug Delivery to Water Filtration
journal, June 2010
- Jackson, Elizabeth A.; Hillmyer, Marc A.
- ACS Nano, Vol. 4, Issue 7
Porous One-Dimensional Nanomaterials: Design, Fabrication and Applications in Electrochemical Energy Storage
journal, January 2017
- Wei, Qiulong; Xiong, Fangyu; Tan, Shuangshuang
- Advanced Materials, Vol. 29, Issue 20
Imprint Lithography with 25-Nanometer Resolution
journal, April 1996
- Chou, S. Y.; Krauss, P. R.; Renstrom, P. J.
- Science, Vol. 272, Issue 5258, p. 85-87
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy
journal, October 2014
- Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
- Chemistry of Materials, Vol. 26, Issue 21
Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study
journal, January 2015
- Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
- The Journal of Physical Chemistry C, Vol. 119, Issue 26
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
journal, September 2010
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- Advanced Materials, Vol. 22, Issue 45, p. 5129-5133
Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
journal, March 2017
- Suh, Hyo Seon; Kim, Do Han; Moni, Priya
- Nature Nanotechnology, Vol. 12, Issue 6
Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness
journal, February 2017
- Berman, Diana; Guha, Supratik; Lee, Byeongdu
- ACS Nano, Vol. 11, Issue 3
Application of automated electrical resistance sensors for measurement of corrosion rate of copper, bronze and iron in model indoor atmospheres containing short-chain volatile carboxylic acids
journal, October 2014
- Prosek, Tomas; Taube, Michelle; Dubois, Francois
- Corrosion Science, Vol. 87
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
journal, February 2014
- Ylivaara, Oili M. E.; Liu, Xuwen; Kilpi, Lauri
- Thin Solid Films, Vol. 552
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
journal, September 2011
- Profijt, H. B.; Potts, S. E.; van de Sanden, M. C. M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 5
Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
journal, January 2008
- Ting, Yuk-Hong; Park, Sang-Min; Liu, Chi-Chun
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 5
Structural modification of poly(methyl methacrylate) by proton irradiation
journal, January 2001
- Choi, H. W.; Woo, H. J.; Hong, W.
- Applied Surface Science, Vol. 169-170
Thin-film behavior of poly(methyl methacrylates). 2. An FT-IR study of Langmuir-Blodgett films of isotactic PMMA
journal, April 1991
- Brinkhuis, R. H. G.; Schouten, A. J.
- Macromolecules, Vol. 24, Issue 7
Investigation on electrical properties of thermally aged PMMA by combined use of FTIR and impedance spectroscopies
journal, February 2009
- Namouchi, F.; Smaoui, H.; Fourati, N.
- Journal of Alloys and Compounds, Vol. 469, Issue 1-2
Plasma-enhanced and thermal atomic layer deposition of Al 2 O 3 using dimethylaluminum isopropoxide, [Al(CH 3 ) 2 (μ-O i Pr)] 2 , as an alternative aluminum precursor
journal, March 2012
- Potts, Stephen E.; Dingemans, Gijs; Lachaud, Christophe
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 2
Nondestructive Creation of Ordered Nanopores by Selective Swelling of Block Copolymers: Toward Homoporous Membranes
journal, June 2016
- Wang, Yong
- Accounts of Chemical Research, Vol. 49, Issue 7
The effect of the substrate on the Raman and photoluminescence emission of single-layer MoS2
journal, April 2014
- Buscema, Michele; Steele, Gary A.; van der Zant, Herre S. J.
- Nano Research, Vol. 7, Issue 4
High-Temperature Photoluminescence of CsPbX 3 (X = Cl, Br, I) Nanocrystals
journal, March 2017
- Diroll, Benjamin T.; Nedelcu, Georgian; Kovalenko, Maksym V.
- Advanced Functional Materials, Vol. 27, Issue 21
High-Temperature Photoluminescence of CsPbX 3 (X = Cl, Br, I) Nanocrystals
journal, March 2017
- Diroll, Benjamin T.; Nedelcu, Georgian; Kovalenko, Maksym V.
- Advanced Functional Materials, Vol. 27, Issue 21
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
journal, September 2010
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- Advanced Materials, Vol. 22, Issue 45, p. 5129-5133
Porous One-Dimensional Nanomaterials: Design, Fabrication and Applications in Electrochemical Energy Storage
journal, January 2017
- Wei, Qiulong; Xiong, Fangyu; Tan, Shuangshuang
- Advanced Materials, Vol. 29, Issue 20
Novel Highly Porous Metal Technology in Artificial Hip and Knee Replacement: Processing Methodologies and Clinical Applications
journal, December 2012
- Muth, John; Poggie, Matthew; Kulesha, Gene
- JOM, Vol. 65, Issue 2
The effect of the substrate on the Raman and photoluminescence emission of single-layer MoS2
journal, April 2014
- Buscema, Michele; Steele, Gary A.; van der Zant, Herre S. J.
- Nano Research, Vol. 7, Issue 4
Fabrication methods of porous metals for use in orthopaedic applications
journal, May 2006
- Ryan, G.; Pandit, A.; Apatsidis, D.
- Biomaterials, Vol. 27, Issue 13
Application of automated electrical resistance sensors for measurement of corrosion rate of copper, bronze and iron in model indoor atmospheres containing short-chain volatile carboxylic acids
journal, October 2014
- Prosek, Tomas; Taube, Michelle; Dubois, Francois
- Corrosion Science, Vol. 87
Investigation on electrical properties of thermally aged PMMA by combined use of FTIR and impedance spectroscopies
journal, February 2009
- Namouchi, F.; Smaoui, H.; Fourati, N.
- Journal of Alloys and Compounds, Vol. 469, Issue 1-2
Functional nanomaterials based on block copolymer self-assembly
journal, November 2010
- Kim, Jin Kon; Yang, Seung Yun; Lee, Youngmin
- Progress in Polymer Science, Vol. 35, Issue 11
Nanoscale patterning with block copolymers
journal, September 2006
- Krishnamoorthy, Sivashankar; Hinderling, Christian; Heinzelmann, Harry
- Materials Today, Vol. 9, Issue 9
Nondestructive Creation of Ordered Nanopores by Selective Swelling of Block Copolymers: Toward Homoporous Membranes
journal, June 2016
- Wang, Yong
- Accounts of Chemical Research, Vol. 49, Issue 7
Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness
journal, February 2017
- Berman, Diana; Guha, Supratik; Lee, Byeongdu
- ACS Nano, Vol. 11, Issue 3
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy
journal, October 2014
- Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
- Chemistry of Materials, Vol. 26, Issue 21
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011
- Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E.
- The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729
Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study
journal, January 2015
- Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
- The Journal of Physical Chemistry C, Vol. 119, Issue 26
Thin-film behavior of poly(methyl methacrylates). 2. An FT-IR study of Langmuir-Blodgett films of isotactic PMMA
journal, April 1991
- Brinkhuis, R. H. G.; Schouten, A. J.
- Macromolecules, Vol. 24, Issue 7
Self-Cleaning Antireflective Optical Coatings
journal, October 2013
- Guldin, Stefan; Kohn, Peter; Stefik, Morgan
- Nano Letters, Vol. 13, Issue 11
Nanoporous Membranes Derived from Block Copolymers: From Drug Delivery to Water Filtration
journal, June 2010
- Jackson, Elizabeth A.; Hillmyer, Marc A.
- ACS Nano, Vol. 4, Issue 7
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
journal, May 2011
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- ACS Nano, Vol. 5, Issue 6, p. 4600-4606
Advanced Structural Engineering of Nanoporous Photonic Structures: Tailoring Nanopore Architecture to Enhance Sensing Properties
journal, November 2014
- Kumeria, Tushar; Santos, Abel; Rahman, Mohammad Mahbubur
- ACS Photonics, Vol. 1, Issue 12
Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
journal, March 2017
- Suh, Hyo Seon; Kim, Do Han; Moni, Priya
- Nature Nanotechnology, Vol. 12, Issue 6
Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection
journal, March 2007
- Xi, J. -Q.; Schubert, Martin F.; Kim, Jong Kyu
- Nature Photonics, Vol. 1, Issue 3
Nanoporous leaky waveguide based chemical and biological sensors with broadband spectroscopy
journal, January 2007
- Qi, Zhi-Mei; Honma, Itaru; Zhou, Haoshen
- Applied Physics Letters, Vol. 90, Issue 1
Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
journal, January 2008
- Ting, Yuk-Hong; Park, Sang-Min; Liu, Chi-Chun
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 5
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
journal, September 2011
- Profijt, H. B.; Potts, S. E.; van de Sanden, M. C. M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 5
Imprint Lithography with 25-Nanometer Resolution
journal, April 1996
- Chou, S. Y.; Krauss, P. R.; Renstrom, P. J.
- Science, Vol. 272, Issue 5258, p. 85-87
Porous broadband antireflection coating by glancing angle deposition
journal, January 2003
- Kennedy, Scott R.; Brett, Michael J.
- Applied Optics, Vol. 42, Issue 22
Works referencing / citing this record:
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
journal, November 2019
- Waldman, Ruben Z.; Mandia, David J.; Yanguas-Gil, Angel
- The Journal of Chemical Physics, Vol. 151, Issue 19
Vapor phase infiltration: from a bioinspired process to technologic application, a prospective review
journal, July 2018
- Azpitarte, Itxasne; Knez, Mato
- MRS Communications, Vol. 8, Issue 03
Accessibility of the pores in highly porous alumina films synthesized via sequential infiltration synthesis
journal, October 2018
- She, Yunlong; Lee, Jihyung; Diroll, Benjamin T.
- Nanotechnology, Vol. 29, Issue 49
Effect of Polymer Removal on the Morphology and Phase of the Nanoparticles in All-Inorganic Heterostructures Synthesized via Two-Step Polymer Infiltration
journal, January 2021
- Berman, Diana; Sha, Yuchen; Shevchenko, Elena V.
- Molecules, Vol. 26, Issue 3