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Title: Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template

Abstract

Nanoporous conformal coating is an important class of materials for electrocatalysis, water purification, antireflective coatings, etc. Common synthesis methods of porous films often require harsh conditions (high temperature and high plasma power) or specific substrate materials. Here, we report a plasma-enhanced sequential infiltration synthesis (PE SIS) as a new platform toward deposition of nanoporous inorganic films. PE SIS is based on oxygen-plasma-induced rapid conversion of metal precursors selectively adsorbed in a block-copolymer template. Porosity and thickness of resulting materials can be easily controlled by characteristics of the template. PE SIS is conducted under gentle conditions, and can be applied to a broad range of substrates, including water-sensitive surfaces. PE SIS offers adventurous rapid infiltration with improved ability to obtain highly interconnected porous alumina films with thicknesses up to 5 μm. Here, we show that full infiltration of the polar domain of the polymer template can be achieved upon initial exposure to TMA, followed by its oxygen-plasma-induced conversion into a functional material. Since different types of plasma (such as oxygen, nitrogen, hydrogen, etc.) induce conversion of a broad range of metal precursors, PE SIS opens a new approach for synthesis of highly porous materials with various elemental compositions and stoichiometries.

Authors:
 [1];  [1]; ORCiD logo [2]; ORCiD logo [2];  [1]; ORCiD logo [2]; ORCiD logo [1]
  1. Univ. of North Texas, Denton, TX (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)
Publication Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); University of North Texas
OSTI Identifier:
1557610
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
ACS Omega
Additional Journal Information:
Journal Volume: 2; Journal Issue: 11; Journal ID: ISSN 2470-1343
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Coating materials; Deposition process; Heat treatment; Luminescence; Perovskites; Phase; Power; Pressure

Citation Formats

She, Yunlong, Lee, Jihyung, Diroll, Benjamin T., Lee, Byeongdu, Aouadi, Samir, Shevchenko, Elena V., and Berman, Diana. Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template. United States: N. p., 2017. Web. doi:10.1021/acsomega.7b01314.
She, Yunlong, Lee, Jihyung, Diroll, Benjamin T., Lee, Byeongdu, Aouadi, Samir, Shevchenko, Elena V., & Berman, Diana. Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template. United States. https://doi.org/10.1021/acsomega.7b01314
She, Yunlong, Lee, Jihyung, Diroll, Benjamin T., Lee, Byeongdu, Aouadi, Samir, Shevchenko, Elena V., and Berman, Diana. Fri . "Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template". United States. https://doi.org/10.1021/acsomega.7b01314. https://www.osti.gov/servlets/purl/1557610.
@article{osti_1557610,
title = {Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template},
author = {She, Yunlong and Lee, Jihyung and Diroll, Benjamin T. and Lee, Byeongdu and Aouadi, Samir and Shevchenko, Elena V. and Berman, Diana},
abstractNote = {Nanoporous conformal coating is an important class of materials for electrocatalysis, water purification, antireflective coatings, etc. Common synthesis methods of porous films often require harsh conditions (high temperature and high plasma power) or specific substrate materials. Here, we report a plasma-enhanced sequential infiltration synthesis (PE SIS) as a new platform toward deposition of nanoporous inorganic films. PE SIS is based on oxygen-plasma-induced rapid conversion of metal precursors selectively adsorbed in a block-copolymer template. Porosity and thickness of resulting materials can be easily controlled by characteristics of the template. PE SIS is conducted under gentle conditions, and can be applied to a broad range of substrates, including water-sensitive surfaces. PE SIS offers adventurous rapid infiltration with improved ability to obtain highly interconnected porous alumina films with thicknesses up to 5 μm. Here, we show that full infiltration of the polar domain of the polymer template can be achieved upon initial exposure to TMA, followed by its oxygen-plasma-induced conversion into a functional material. Since different types of plasma (such as oxygen, nitrogen, hydrogen, etc.) induce conversion of a broad range of metal precursors, PE SIS opens a new approach for synthesis of highly porous materials with various elemental compositions and stoichiometries.},
doi = {10.1021/acsomega.7b01314},
journal = {ACS Omega},
number = 11,
volume = 2,
place = {United States},
year = {Fri Nov 10 00:00:00 EST 2017},
month = {Fri Nov 10 00:00:00 EST 2017}
}

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Cited by: 17 works
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Nanoporous Membranes Derived from Block Copolymers: From Drug Delivery to Water Filtration
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A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
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  • ACS Nano, Vol. 5, Issue 6, p. 4600-4606
  • DOI: 10.1021/nn2003234

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journal, November 2014

  • Kumeria, Tushar; Santos, Abel; Rahman, Mohammad Mahbubur
  • ACS Photonics, Vol. 1, Issue 12
  • DOI: 10.1021/ph500316u

Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat
journal, March 2017

  • Suh, Hyo Seon; Kim, Do Han; Moni, Priya
  • Nature Nanotechnology, Vol. 12, Issue 6
  • DOI: 10.1038/nnano.2017.34

Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection
journal, March 2007


Nanoporous leaky waveguide based chemical and biological sensors with broadband spectroscopy
journal, January 2007

  • Qi, Zhi-Mei; Honma, Itaru; Zhou, Haoshen
  • Applied Physics Letters, Vol. 90, Issue 1
  • DOI: 10.1063/1.2424643

Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
journal, January 2008

  • Ting, Yuk-Hong; Park, Sang-Min; Liu, Chi-Chun
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 5
  • DOI: 10.1116/1.2966433

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
journal, September 2011

  • Profijt, H. B.; Potts, S. E.; van de Sanden, M. C. M.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 5
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journal, April 1996


Porous broadband antireflection coating by glancing angle deposition
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Works referencing / citing this record:

The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
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Accessibility of the pores in highly porous alumina films synthesized via sequential infiltration synthesis
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