Mechanism of Benzene Tribopolymerization on the RuO2 (110) Surface
Abstract
A tribopolymer formed on the contacts of microelectromechanical and nanoelectromechanical system (MEMS-NEMS) devices is a major concern hampering their practical use in information technology. Conductive metal oxides, such as RuO2 and ReO3, have been regarded as promising candidate materials for MEMS-NEMS contacts due to their conductivity, hardness, and relatively chemically inert surfaces. However, recent experimental works demonstrate that trace amounts of a polymer could still form on RuO2 surfaces. We demonstrate the mechanism of this class of unexpected tribopolymer formation by conducting density-functional-theory-based computational compression experiments with benzene as the contamination gas. First, mechanical force during compression changes the benzene molecules from slightly physisorbed to strongly chemisorbed. Further compression causes deformation and chemical linkage of the benzene molecules. Finally, the two contacts detach, with one having a complex organic molecule attached and the other a more reactive surface. The complex organic molecule, which has an oxabicyclic segment, can be viewed as the rudiment of a tribopolymer, and the more reactive surface can trigger the next adsorption-reaction-tribopolymer formation cycle. Based on these results, we also predict tribopolymer formation rates by using transition-state theory and the second-order rate law. We promote a deeper understanding of tribopolymer formation (especially on metal oxides) andmore »
- Authors:
-
- Pennsylvania State Univ., University Park, PA (United States). Dept. of Chemistry
- Publication Date:
- Research Org.:
- Univ. of Pennsylvania, Philadelphia, PA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC); National Science Foundation (NSF)
- OSTI Identifier:
- 1540707
- Alternate Identifier(s):
- OSTI ID: 1434827; OSTI ID: 1867863
- Grant/Contract Number:
- FG02-07ER15920; CMMI-1334241; DMR-1124696
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physical Review Applied
- Additional Journal Information:
- Journal Volume: 9; Journal Issue: 4; Journal ID: ISSN 2331-7019
- Publisher:
- American Physical Society (APS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; Physics; 36 MATERIALS SCIENCE; surfaces, nanotechnology, tribology
Citation Formats
Yang, J., Qi, Y., Kim, H. D., and Rappe, A. M. Mechanism of Benzene Tribopolymerization on the RuO2 (110) Surface. United States: N. p., 2018.
Web. doi:10.1103/physrevapplied.9.044038.
Yang, J., Qi, Y., Kim, H. D., & Rappe, A. M. Mechanism of Benzene Tribopolymerization on the RuO2 (110) Surface. United States. https://doi.org/10.1103/physrevapplied.9.044038
Yang, J., Qi, Y., Kim, H. D., and Rappe, A. M. Thu .
"Mechanism of Benzene Tribopolymerization on the RuO2 (110) Surface". United States. https://doi.org/10.1103/physrevapplied.9.044038. https://www.osti.gov/servlets/purl/1540707.
@article{osti_1540707,
title = {Mechanism of Benzene Tribopolymerization on the RuO2 (110) Surface},
author = {Yang, J. and Qi, Y. and Kim, H. D. and Rappe, A. M.},
abstractNote = {A tribopolymer formed on the contacts of microelectromechanical and nanoelectromechanical system (MEMS-NEMS) devices is a major concern hampering their practical use in information technology. Conductive metal oxides, such as RuO2 and ReO3, have been regarded as promising candidate materials for MEMS-NEMS contacts due to their conductivity, hardness, and relatively chemically inert surfaces. However, recent experimental works demonstrate that trace amounts of a polymer could still form on RuO2 surfaces. We demonstrate the mechanism of this class of unexpected tribopolymer formation by conducting density-functional-theory-based computational compression experiments with benzene as the contamination gas. First, mechanical force during compression changes the benzene molecules from slightly physisorbed to strongly chemisorbed. Further compression causes deformation and chemical linkage of the benzene molecules. Finally, the two contacts detach, with one having a complex organic molecule attached and the other a more reactive surface. The complex organic molecule, which has an oxabicyclic segment, can be viewed as the rudiment of a tribopolymer, and the more reactive surface can trigger the next adsorption-reaction-tribopolymer formation cycle. Based on these results, we also predict tribopolymer formation rates by using transition-state theory and the second-order rate law. We promote a deeper understanding of tribopolymer formation (especially on metal oxides) and provide strategies for suppressing tribopolymerization.},
doi = {10.1103/physrevapplied.9.044038},
journal = {Physical Review Applied},
number = 4,
volume = 9,
place = {United States},
year = {Thu Apr 26 00:00:00 EDT 2018},
month = {Thu Apr 26 00:00:00 EDT 2018}
}
Web of Science
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