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Title: Graphene milling dynamics during helium ion beam irradiation

Abstract

We explore the potential of the Helium Ion Microscope (HIM) as a tool for direct-write patterning of graphene and describe the underlying processes of graphene milling with image data processing. Controlled helium ion irradiation of suspended graphene conducted while monitoring the mill in-situ revealed the localized formation of nanopores, their growth, and coalescence. We also explore the effects of defects on the milling dynamics, and show that pre-exposed membranes rupture by cracking and rapid crack propagation at the edges of the growing defects. The mechanism for the rupturing process is described by local defect formation by excessive irradiation of helium ions, dictated by the scanning direction of the beam. As a result, these findings enrich fundamental understanding of the graphene milling process with a helium ion beam that, is necessary for high-resolution and high throughput patterning of graphene with nanoscale precision.

Authors:
 [1]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [2]
+ Show Author Affiliations
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Pusan National Univ., Busan (South Korea)
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Publication Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1509549
Alternate Identifier(s):
OSTI ID: 1548134
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Carbon
Additional Journal Information:
Journal Volume: 138; Journal Issue: C; Journal ID: ISSN 0008-6223
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Kim, Songkil, Dyck, Ondrej, Ievlev, Anton V., Vlassiouk, Ivan V., Kalinin, Sergei V., Belianinov, Alex, Jesse, Stephen, and Ovchinnikova, Olga S. Graphene milling dynamics during helium ion beam irradiation. United States: N. p., 2018. Web. doi:10.1016/j.carbon.2018.06.017.
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Kim, Songkil, Dyck, Ondrej, Ievlev, Anton V., Vlassiouk, Ivan V., Kalinin, Sergei V., Belianinov, Alex, Jesse, Stephen, & Ovchinnikova, Olga S. Graphene milling dynamics during helium ion beam irradiation. United States. https://doi.org/10.1016/j.carbon.2018.06.017
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Kim, Songkil, Dyck, Ondrej, Ievlev, Anton V., Vlassiouk, Ivan V., Kalinin, Sergei V., Belianinov, Alex, Jesse, Stephen, and Ovchinnikova, Olga S. Thu . "Graphene milling dynamics during helium ion beam irradiation". United States. https://doi.org/10.1016/j.carbon.2018.06.017. https://www.osti.gov/servlets/purl/1509549.
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@article{osti_1509549,
title = {Graphene milling dynamics during helium ion beam irradiation},
author = {Kim, Songkil and Dyck, Ondrej and Ievlev, Anton V. and Vlassiouk, Ivan V. and Kalinin, Sergei V. and Belianinov, Alex and Jesse, Stephen and Ovchinnikova, Olga S.},
abstractNote = {We explore the potential of the Helium Ion Microscope (HIM) as a tool for direct-write patterning of graphene and describe the underlying processes of graphene milling with image data processing. Controlled helium ion irradiation of suspended graphene conducted while monitoring the mill in-situ revealed the localized formation of nanopores, their growth, and coalescence. We also explore the effects of defects on the milling dynamics, and show that pre-exposed membranes rupture by cracking and rapid crack propagation at the edges of the growing defects. The mechanism for the rupturing process is described by local defect formation by excessive irradiation of helium ions, dictated by the scanning direction of the beam. As a result, these findings enrich fundamental understanding of the graphene milling process with a helium ion beam that, is necessary for high-resolution and high throughput patterning of graphene with nanoscale precision.},
doi = {10.1016/j.carbon.2018.06.017},
journal = {Carbon},
number = C,
volume = 138,
place = {United States},
year = {Thu Jun 14 00:00:00 EDT 2018},
month = {Thu Jun 14 00:00:00 EDT 2018}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1016/j.carbon.2018.06.017
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Cited by: 14 works
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Figures / Tables:

Figure 1 Figure 1: In-situ monitoring of the graphene milling process during HIM scanning. (a) Representative image sequence illustrating the suspended graphene milling process, which involves the localized formation of nanopores, their preferential growth at the edges, and coalescence in the final stages. The bottom row highlights the nanopores as identified bymore » an image data processing routine of the images in the top row. (b) Quantitative analysis of milling dynamics as pore diameter versus scan time. Diameter is defined assuming a circular pore with an area extracted by the image processing routine. After the formation of pore 1 at ~4.4 x 1016 ions/cm2 (scanning time~1.25 s), the milling process is accelerated and driven by linear growth and coalescence with other nanopores formed during scanning.« less
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    Works referencing / citing this record:

    Nanometre electron beam sculpting of suspended graphene and hexagonal boron nitride heterostructures
    journal, March 2019

    Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns
    journal, September 2019

    • Zhang, Cheng; Dyck, Ondrej; Garfinkel, David A.
    • Nanomaterials, Vol. 9, Issue 10
    • DOI: 10.3390/nano9101394

    Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns
    journal, September 2019

    • Zhang, Cheng; Dyck, Ondrej; Garfinkel, David A.
    • Nanomaterials, Vol. 9, Issue 10
    • DOI: 10.3390/nano9101394
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