Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field
Abstract
An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufacturing. We demonstrate that a simultaneous control of these quantities is possible by a suitable choice of a static magnetic field applied parallel to the plane electrodes in a standard single frequency capacitively coupled plasma device. Our particle-in-cell simulations show a 60% reduction in the sheath width (that improves control of ion energy) and a fourfold increase in the ion flux at the electrode as a consequence of the altered ion and electron dynamics due to the ambient magnetic field. A detailed analysis of the particle dynamics is presented, and the optimized operating parameters of the device are discussed. In conclusion, the present technique offers a simple and attractive alternative to conventional dual frequency based devices that often suffer from undesirable limitations arising from frequency coupling and electromagnetic effects.
- Authors:
-
[2];
- Institute for Plasma Research, Gandhinagar (India); Homi Babha National Institute, Mumbai (India)
- Princeton Univ., Princeton, NJ (United States)
- Institute for Plasma Research, Gandhinagar (India)
- Publication Date:
- Research Org.:
- Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1472113
- Grant/Contract Number:
- AC02-09CH11466
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physics of Plasmas
- Additional Journal Information:
- Journal Volume: 25; Journal Issue: 8; Journal ID: ISSN 1070-664X
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Sharma, Sarveshwar, Kaganovich, Igor D., Khrabrov, Alexander V., Kaw, Predhiman, and Sen, Abhijit. Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field. United States: N. p., 2018.
Web. doi:10.1063/1.5033350.
Sharma, Sarveshwar, Kaganovich, Igor D., Khrabrov, Alexander V., Kaw, Predhiman, & Sen, Abhijit. Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field. United States. https://doi.org/10.1063/1.5033350
Sharma, Sarveshwar, Kaganovich, Igor D., Khrabrov, Alexander V., Kaw, Predhiman, and Sen, Abhijit. Tue .
"Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field". United States. https://doi.org/10.1063/1.5033350. https://www.osti.gov/servlets/purl/1472113.
@article{osti_1472113,
title = {Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field},
author = {Sharma, Sarveshwar and Kaganovich, Igor D. and Khrabrov, Alexander V. and Kaw, Predhiman and Sen, Abhijit},
abstractNote = {An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufacturing. We demonstrate that a simultaneous control of these quantities is possible by a suitable choice of a static magnetic field applied parallel to the plane electrodes in a standard single frequency capacitively coupled plasma device. Our particle-in-cell simulations show a 60% reduction in the sheath width (that improves control of ion energy) and a fourfold increase in the ion flux at the electrode as a consequence of the altered ion and electron dynamics due to the ambient magnetic field. A detailed analysis of the particle dynamics is presented, and the optimized operating parameters of the device are discussed. In conclusion, the present technique offers a simple and attractive alternative to conventional dual frequency based devices that often suffer from undesirable limitations arising from frequency coupling and electromagnetic effects.},
doi = {10.1063/1.5033350},
journal = {Physics of Plasmas},
number = 8,
volume = 25,
place = {United States},
year = {Tue Aug 14 00:00:00 EDT 2018},
month = {Tue Aug 14 00:00:00 EDT 2018}
}
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