Experimental investigation of defect-assisted and intrinsic water vapor permeation through ultrabarrier films
Abstract
In the development of ultrabarrier films for packaging electronics, the effective water vapor transmission rate is a combination of permeation through pinhole defects and the intrinsic permeation through the actual barrier film. While it is possible to measure the effective permeation rate through barriers, it is important to develop a better understanding of the contribution from defects to the overall effective barrier performance. Here, we demonstrate a method to investigate independently defect-assisted permeation and intrinsic permeation rates by observing the degradation of a calcium layer encapsulated with a hybrid barrier film, that is, prepared using atomic layer deposition (ALD) and plasma enhanced deposition (PECVD). The results are rationalized using an analytical diffusion model to calculate the permeation rate as a function of spatial position within the barrier. It was observed that a barrier film consisting of a PECVD SiNx layer combined with an ALD Al2O3/HfOx nanolaminate resulted in a defect-assisted water vapor transmission rate (WVTR) of 4.84 × 10–5 g/m2 day and intrinsic WVTR of 1.41 × 10–4 g/m2 day at 50 °C/85% RH. Due to the low defect density of the tested barrier film, the defect-assisted WVTR was found to be three times lower than the intrinsic WVTR, andmore »
- Authors:
-
- Georgia Inst. of Technology, Atlanta, GA (United States)
- Publication Date:
- Research Org.:
- The Leland Stanford Junior Univ., Palo Alto, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1469699
- Alternate Identifier(s):
- OSTI ID: 1241569
- Grant/Contract Number:
- EE0004946
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 87; Journal Issue: 3; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Kim, Hyungchul, Singh, Ankit Kumar, Wang, Cheng -Yin, Fuentes-Hernandez, Canek, Kippelen, Bernard, and Graham, Samuel. Experimental investigation of defect-assisted and intrinsic water vapor permeation through ultrabarrier films. United States: N. p., 2016.
Web. doi:10.1063/1.4942510.
Kim, Hyungchul, Singh, Ankit Kumar, Wang, Cheng -Yin, Fuentes-Hernandez, Canek, Kippelen, Bernard, & Graham, Samuel. Experimental investigation of defect-assisted and intrinsic water vapor permeation through ultrabarrier films. United States. https://doi.org/10.1063/1.4942510
Kim, Hyungchul, Singh, Ankit Kumar, Wang, Cheng -Yin, Fuentes-Hernandez, Canek, Kippelen, Bernard, and Graham, Samuel. Tue .
"Experimental investigation of defect-assisted and intrinsic water vapor permeation through ultrabarrier films". United States. https://doi.org/10.1063/1.4942510. https://www.osti.gov/servlets/purl/1469699.
@article{osti_1469699,
title = {Experimental investigation of defect-assisted and intrinsic water vapor permeation through ultrabarrier films},
author = {Kim, Hyungchul and Singh, Ankit Kumar and Wang, Cheng -Yin and Fuentes-Hernandez, Canek and Kippelen, Bernard and Graham, Samuel},
abstractNote = {In the development of ultrabarrier films for packaging electronics, the effective water vapor transmission rate is a combination of permeation through pinhole defects and the intrinsic permeation through the actual barrier film. While it is possible to measure the effective permeation rate through barriers, it is important to develop a better understanding of the contribution from defects to the overall effective barrier performance. Here, we demonstrate a method to investigate independently defect-assisted permeation and intrinsic permeation rates by observing the degradation of a calcium layer encapsulated with a hybrid barrier film, that is, prepared using atomic layer deposition (ALD) and plasma enhanced deposition (PECVD). The results are rationalized using an analytical diffusion model to calculate the permeation rate as a function of spatial position within the barrier. It was observed that a barrier film consisting of a PECVD SiNx layer combined with an ALD Al2O3/HfOx nanolaminate resulted in a defect-assisted water vapor transmission rate (WVTR) of 4.84 × 10–5 g/m2 day and intrinsic WVTR of 1.41 × 10–4 g/m2 day at 50 °C/85% RH. Due to the low defect density of the tested barrier film, the defect-assisted WVTR was found to be three times lower than the intrinsic WVTR, and an effective (or total) WVTR value was 1.89 × 10–4 g/m2 day. Furthermore, improvements of the barrier performance should focus on reducing the number of defects while also improving the intrinsic barrier performance of the hybrid layer.},
doi = {10.1063/1.4942510},
journal = {Review of Scientific Instruments},
number = 3,
volume = 87,
place = {United States},
year = {Tue Mar 15 00:00:00 EDT 2016},
month = {Tue Mar 15 00:00:00 EDT 2016}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
A thin film encapsulation layer fabricated via initiated chemical vapor deposition and atomic layer deposition
journal, May 2014
- Kim, Bong Jun; Kim, Do Heung; Kang, Seung Youl
- Journal of Applied Polymer Science, Vol. 131, Issue 24
Moisture transport, adhesion, and corrosion protection of PV module packaging materials
journal, October 2006
- Jorgensen, G.; Terwilliger, K.; Delcueto, J.
- Solar Energy Materials and Solar Cells, Vol. 90, Issue 16
Effect of local flaws in polymeric permeation reducing barriers
journal, November 1993
- Rossi, Giuseppe; Nulman, Mark
- Journal of Applied Physics, Vol. 74, Issue 9
Gas permeation in silicon-oxide/polymer (SiOx/PET) barrier films: role of the oxide lattice, nano-defects and macro-defects
journal, October 2002
- Roberts, A. P.; Henry, B. M.; Sutton, A. P.
- Journal of Membrane Science, Vol. 208, Issue 1-2
Defect-permeation correlation for ultrathin transparent barrier coatings on polymers
journal, January 2000
- da Silva Sobrinho, A. S.; Czeremuszkin, G.; Latrèche, M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 1
Materials and methods for encapsulation of OPV: A review
journal, November 2013
- Ahmad, Jakaria; Bazaka, Kateryna; Anderson, Liam J.
- Renewable and Sustainable Energy Reviews, Vol. 27
Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition
journal, July 2009
- Carcia, P. F.; McLean, R. S.; Groner, M. D.
- Journal of Applied Physics, Vol. 106, Issue 2
Experimental comparison of high-performance water vapor permeation measurement methods
journal, December 2014
- Nisato, Giovanni; Klumbies, Hannes; Fahlteich, John
- Organic Electronics, Vol. 15, Issue 12
Al 2 O 3 /ZrO 2 Nanolaminates as Ultrahigh Gas-Diffusion Barriers-A Strategy for Reliable Encapsulation of Organic Electronics
journal, May 2009
- Meyer, Jens; Görrn, Patrick; Bertram, Franz
- Advanced Materials, Vol. 21, Issue 18
A study of defects in ultra-thin transparent coatings on polymers
journal, September 1999
- da Silva Sobrinho, A. S.; Czeremuszkin, G.; Latrèche, M.
- Surface and Coatings Technology, Vol. 116-119
H 2 O Vapor Transmission Rate through Polyethylene Naphthalate Polymer Using the Electrical Ca Test
journal, May 2013
- Bertrand, J. A.; Higgs, D. J.; Young, M. J.
- The Journal of Physical Chemistry A, Vol. 117, Issue 46
A Threshold Selection Method from Gray-Level Histograms
journal, January 1979
- Otsu, Nobuyuki
- IEEE Transactions on Systems, Man, and Cybernetics, Vol. 9, Issue 1
Engineering the mechanical properties of ultrabarrier films grown by atomic layer deposition for the encapsulation of printed electronics
journal, August 2015
- Bulusu, A.; Singh, A.; Wang, C. Y.
- Journal of Applied Physics, Vol. 118, Issue 8
Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices
journal, January 2004
- Lewis, J.S.; Weaver, M.S.
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, Issue 1, p. 45-57
Quantitative calcium resistivity based method for accurate and scalable water vapor transmission rate measurement
journal, August 2011
- Reese, Matthew O.; Dameron, Arrelaine A.; Kempe, Michael D.
- Review of Scientific Instruments, Vol. 82, Issue 8, Article No. 085101