Electrostatically actuated encased cantilevers
Abstract
Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an encasement around the cantilever, they provide low damping and maintain high resonance frequencies for exquisitely low tip–sample interaction forces even when immersed in a viscous fluid. Quantitative measurements of stiffness, energy dissipation and tip–sample interactions using dynamic force sensors remain challenging due to spurious resonances of the system. Results: We demonstrate for the first time electrostatic actuation with a built-in electrode. Solely actuating the cantilever results in a frequency response free of spurious peaks. We analyze static, harmonic, and sub-harmonic actuation modes. Sub-harmonic mode results in stable amplitudes unaffected by potential offsets or fluctuations of the electrical surface potential. We present a simple plate capacitor model to describe the electrostatic actuation. The predicted deflection and amplitudes match experimental results within a few percent. Consequently, target amplitudes can be set by the drive voltage without requiring calibration of optical lever sensitivity. Furthermore, the excitation bandwidth outperforms most other excitation methods. Conclusion: Compatible with any instrument using optical beam deflection detection electrostatic actuation in encased cantilevers combines ultra-low force noise with clean and stable excitation well-suited for quantitative measurements in liquid,more »
- Authors:
-
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry; Scuba Probe Technologies LLC, Alameda, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Scuba Probe Technologies LLC, Almeda, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)
- OSTI Identifier:
- 1460304
- Alternate Identifier(s):
- OSTI ID: 1460613
- Grant/Contract Number:
- AC02-05CH11231; SC0013212
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Beilstein Journal of Nanotechnology
- Additional Journal Information:
- Journal Volume: 9; Journal Issue: 1; Journal ID: ISSN 2190-4286
- Publisher:
- Beilstein Institute
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 47 OTHER INSTRUMENTATION; amplitude calibration; atomic force microscopy; electrostatic excitation; encased cantilevers; liquid AFM; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Desbiolles, Benoit X. E., Furlan, Gabriela, Schwartzberg, Adam M., Ashby, Paul D., and Ziegler, Dominik. Electrostatically actuated encased cantilevers. United States: N. p., 2018.
Web. doi:10.3762/bjnano.9.130.
Desbiolles, Benoit X. E., Furlan, Gabriela, Schwartzberg, Adam M., Ashby, Paul D., & Ziegler, Dominik. Electrostatically actuated encased cantilevers. United States. https://doi.org/10.3762/bjnano.9.130
Desbiolles, Benoit X. E., Furlan, Gabriela, Schwartzberg, Adam M., Ashby, Paul D., and Ziegler, Dominik. Tue .
"Electrostatically actuated encased cantilevers". United States. https://doi.org/10.3762/bjnano.9.130. https://www.osti.gov/servlets/purl/1460304.
@article{osti_1460304,
title = {Electrostatically actuated encased cantilevers},
author = {Desbiolles, Benoit X. E. and Furlan, Gabriela and Schwartzberg, Adam M. and Ashby, Paul D. and Ziegler, Dominik},
abstractNote = {Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an encasement around the cantilever, they provide low damping and maintain high resonance frequencies for exquisitely low tip–sample interaction forces even when immersed in a viscous fluid. Quantitative measurements of stiffness, energy dissipation and tip–sample interactions using dynamic force sensors remain challenging due to spurious resonances of the system. Results: We demonstrate for the first time electrostatic actuation with a built-in electrode. Solely actuating the cantilever results in a frequency response free of spurious peaks. We analyze static, harmonic, and sub-harmonic actuation modes. Sub-harmonic mode results in stable amplitudes unaffected by potential offsets or fluctuations of the electrical surface potential. We present a simple plate capacitor model to describe the electrostatic actuation. The predicted deflection and amplitudes match experimental results within a few percent. Consequently, target amplitudes can be set by the drive voltage without requiring calibration of optical lever sensitivity. Furthermore, the excitation bandwidth outperforms most other excitation methods. Conclusion: Compatible with any instrument using optical beam deflection detection electrostatic actuation in encased cantilevers combines ultra-low force noise with clean and stable excitation well-suited for quantitative measurements in liquid, compatible with air, or vacuum environments.},
doi = {10.3762/bjnano.9.130},
journal = {Beilstein Journal of Nanotechnology},
number = 1,
volume = 9,
place = {United States},
year = {Tue May 08 00:00:00 EDT 2018},
month = {Tue May 08 00:00:00 EDT 2018}
}
Web of Science
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Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load
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Ultra-Sensitive Imaging and Interfacial Analysis of Patterned Hydrophilic SAM Surfaces Using Energy Dissipation Chemical Force Microscopy
journal, May 2005
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Micro‐fabricated piezoelectric cantilever for atomic force microscopy
journal, November 1996
- Watanabe, Shunji; Fujii, Toru
- Review of Scientific Instruments, Vol. 67, Issue 11
Optical excitation of nanoelectromechanical oscillators
journal, May 2005
- Ilic, B.; Krylov, S.; Aubin, K.
- Applied Physics Letters, Vol. 86, Issue 19
True atomic resolution in liquid by frequency-modulation atomic force microscopy
journal, July 2005
- Fukuma, Takeshi; Kobayashi, Kei; Matsushige, Kazumi
- Applied Physics Letters, Vol. 87, Issue 3
Investigation of fluid cell resonances in intermittent contact mode atomic force microscopy
journal, July 2007
- Kokavecz, J.; Mechler, A.
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Cutting down the forest of peaks in acoustic dynamic atomic force microscopy in liquid
journal, December 2008
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- Review of Scientific Instruments, Vol. 79, Issue 12
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journal, October 1996
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Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
journal, August 1997
- Edwards, Hal; Taylor, Larry; Duncan, Walter
- Journal of Applied Physics, Vol. 82, Issue 3
A virtual instrument to standardise the calibration of atomic force microscope cantilevers
journal, September 2016
- Sader, John E.; Borgani, Riccardo; Gibson, Christopher T.
- Review of Scientific Instruments, Vol. 87, Issue 9
Single-chip mechatronic microsystem for surface imaging and force response studies
journal, November 2004
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Comparison of calibration methods for atomic-force microscopy cantilevers
journal, December 2002
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High spatial resolution Kelvin probe force microscopy with coaxial probes
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A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
journal, February 2005
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journal, November 2009
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Scanning attractive force microscope using photothermal vibration
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- Umeda, N.
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In situ Stiffness Adjustment of AFM Probes by Two Orders of Magnitude
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Works referencing / citing this record:
Wideband Magnetic Excitation System for Atomic Force Microscopy Cantilevers with Megahertz-Order Resonance Frequency
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