Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors
Abstract
Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks furthermore display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes suggest greater than six times sensitivity enhancement over fundamental mode operation.
- Authors:
-
- Stanford Univ., CA (United States)
- Purdue Univ., West Lafayette, IN (United States); Harvard Medical School, Boston, MA (United States)
- Purdue Univ., West Lafayette, IN (United States)
- Stanford Univ., CA (United States); Chung-Ang Univ., Seoul (Korea, Republic of)
- Publication Date:
- Research Org.:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC); National Science Foundation (NSF)
- OSTI Identifier:
- 1443052
- Report Number(s):
- SLAC-PUB-13994
Journal ID: ISSN 0003-6951
- Grant/Contract Number:
- AC02-76SF00515
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 91; Journal Issue: 17; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Zeltzer, G., Randel, J. C., Gupta, A. K., Bashir, R., Song, S. -H., and Manoharan, H. C. Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors. United States: N. p., 2007.
Web. doi:10.1063/1.2803774.
Zeltzer, G., Randel, J. C., Gupta, A. K., Bashir, R., Song, S. -H., & Manoharan, H. C. Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors. United States. https://doi.org/10.1063/1.2803774
Zeltzer, G., Randel, J. C., Gupta, A. K., Bashir, R., Song, S. -H., and Manoharan, H. C. Fri .
"Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors". United States. https://doi.org/10.1063/1.2803774. https://www.osti.gov/servlets/purl/1443052.
@article{osti_1443052,
title = {Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors},
author = {Zeltzer, G. and Randel, J. C. and Gupta, A. K. and Bashir, R. and Song, S. -H. and Manoharan, H. C.},
abstractNote = {Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks furthermore display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes suggest greater than six times sensitivity enhancement over fundamental mode operation.},
doi = {10.1063/1.2803774},
journal = {Applied Physics Letters},
number = 17,
volume = 91,
place = {United States},
year = {Fri Oct 26 00:00:00 EDT 2007},
month = {Fri Oct 26 00:00:00 EDT 2007}
}
Web of Science
Figures / Tables:
Works referenced in this record:
Frequency modulation detection using high‐ Q cantilevers for enhanced force microscope sensitivity
journal, January 1991
- Albrecht, T. R.; Grütter, P.; Horne, D.
- Journal of Applied Physics, Vol. 69, Issue 2
High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork
journal, December 1998
- Giessibl, Franz J.
- Applied Physics Letters, Vol. 73, Issue 26
Atomic resolution on Si(111)-(7×7) by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork
journal, March 2000
- Giessibl, Franz J.
- Applied Physics Letters, Vol. 76, Issue 11
On the acoustics of tuning forks
journal, July 1992
- Rossing, Thomas D.; Russell, Daniel A.; Brown, David E.
- American Journal of Physics, Vol. 60, Issue 7
Interaction sensing in dynamic force microscopy
journal, February 2000
- Dürig, U.
- New Journal of Physics, Vol. 2
Force Microscopy with Light-Atom Probes
journal, July 2004
- Hembacher, S.
- Science, Vol. 305, Issue 5682
First Overtone Frequency Stimulated Quartz Tuning Fork Used for Shear-Force Scanning Near-Field Optical Microscopy
journal, November 2003
- Sheng, Liu; Jia-Lin, Sun; Hong-San, Sun
- Chinese Physics Letters, Vol. 20, Issue 11
Resonant harmonic response in tapping-mode atomic force microscopy
journal, April 2004
- Sahin, Ozgur; Quate, Calvin F.; Solgaard, Olav
- Physical Review B, Vol. 69, Issue 16
Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy
journal, July 2006
- Sadewasser, S.; Villanueva, G.; Plaza, J. A.
- Applied Physics Letters, Vol. 89, Issue 3
Micromechanical mass sensors for biomolecular detection in a physiological environment
journal, September 2005
- Braun, Thomas; Barwich, Viola; Ghatkesar, Murali Krishna
- Physical Review E, Vol. 72, Issue 3
Force microscope using a fiber‐optic displacement sensor
journal, November 1988
- Rugar, D.; Mamin, H. J.; Erlandsson, R.
- Review of Scientific Instruments, Vol. 59, Issue 11
A differential interferometer for force microscopy
journal, October 1989
- Schönenberger, C.; Alvarado, S. F.
- Review of Scientific Instruments, Vol. 60, Issue 10
Atomic force microscopy using optical interferometry
journal, March 1988
- Erlandsson, R.; McClelland, G. M.; Mate, C. M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 2
Femtogram mass detection using photothermally actuated nanomechanical resonators
journal, April 2003
- Lavrik, Nickolay V.; Datskos, Panos G.
- Applied Physics Letters, Vol. 82, Issue 16
Single virus particle mass detection using microresonators with nanoscale thickness
journal, March 2004
- Gupta, A.; Akin, D.; Bashir, R.
- Applied Physics Letters, Vol. 84, Issue 11
Works referencing / citing this record:
Electrical characterization of a tuning fork crystal oscillator using dual-phase lock-in technique
journal, March 2009
- Song, Sang-Hun
- Review of Scientific Instruments, Vol. 80, Issue 3
Figures / Tables found in this record: