X-ray focusing with efficient high-NA multilayer Laue lenses
Abstract
Multilayer Laue lenses are volume diffraction elements for the efficient focusing of X-rays. With a new manufacturing technique that we introduced, it is possible to fabricate lenses of sufficiently high numerical aperture (NA) to achieve focal spot sizes below 10 nm. The alternating layers of the materials that form the lens must span a broad range of thicknesses on the nanometer scale to achieve the necessary range of X-ray deflection angles required to achieve a high NA. This poses a challenge to both the accuracy of the deposition process and the control of the materials properties, which often vary with layer thickness. We introduced a new pair of materials—tungsten carbide and silicon carbide—to prepare layered structures with smooth and sharp interfaces and with no material phase transitions that hampered the manufacture of previous lenses. Using a pair of multilayer Laue lenses (MLLs) fabricated from this system, we achieved a two-dimensional focus of 8.4 × 6.8 nm2 at a photon energy of 16.3 keV with high diffraction efficiency and demonstrated scanning-based imaging of samples with a resolution well below 10 nm. The high NA also allowed projection holographic imaging with strong phase contrast over a large range of magnifications. Furthermore, anmore »
- Authors:
-
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- Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany)
- Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany); Univ. of Hamburg, Hamburg (Germany); Centre for Ultrafast Imaging, Hamburg (Germany)
- National Science Foundation BioXFEL Science and Technology Center, Buffalo, NY (United States)
- Arizona State Univ., Tempe, AZ (United States)
- Univ. of Bialystok, Bialystok (Poland)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Alfred-Wegener Institute, Bremerhaven (Germany)
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1439298
- Report Number(s):
- BNL-205711-2018-JAAM
Journal ID: ISSN 2047-7538
- Grant/Contract Number:
- SC0012704
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Light, Science & Applications
- Additional Journal Information:
- Journal Volume: 7; Journal Issue: 3; Journal ID: ISSN 2047-7538
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; multilayer Laue lenses; multilayers; ptychography; X-ray holography; X-ray optics
Citation Formats
Bajt, Sasa, Prasciolu, Mauro, Fleckenstein, Holger, Domaracky, Martin, Chapman, Henry N., Morgan, Andrew J., Yefanov, Oleksandr, Messerschmidt, Marc, Du, Yang, Murray, Kevin T., Mariani, Valerio, Kuhn, Manuela, Aplin, Steven, Pande, Kanupriya, Villanueva-Perez, Pablo, Stachnik, Karolina, Chen, Joe P. J., Andrejczuk, Andrzej, Meents, Alke, Burkhardt, Anja, Pennicard, David, Huang, Xiaojing, Yan, Hanfei, Nazaretski, Evgeny, Chu, Yong S., and Hamm, Christian E. X-ray focusing with efficient high-NA multilayer Laue lenses. United States: N. p., 2018.
Web. doi:10.1038/lsa.2017.162.
Bajt, Sasa, Prasciolu, Mauro, Fleckenstein, Holger, Domaracky, Martin, Chapman, Henry N., Morgan, Andrew J., Yefanov, Oleksandr, Messerschmidt, Marc, Du, Yang, Murray, Kevin T., Mariani, Valerio, Kuhn, Manuela, Aplin, Steven, Pande, Kanupriya, Villanueva-Perez, Pablo, Stachnik, Karolina, Chen, Joe P. J., Andrejczuk, Andrzej, Meents, Alke, Burkhardt, Anja, Pennicard, David, Huang, Xiaojing, Yan, Hanfei, Nazaretski, Evgeny, Chu, Yong S., & Hamm, Christian E. X-ray focusing with efficient high-NA multilayer Laue lenses. United States. https://doi.org/10.1038/lsa.2017.162
Bajt, Sasa, Prasciolu, Mauro, Fleckenstein, Holger, Domaracky, Martin, Chapman, Henry N., Morgan, Andrew J., Yefanov, Oleksandr, Messerschmidt, Marc, Du, Yang, Murray, Kevin T., Mariani, Valerio, Kuhn, Manuela, Aplin, Steven, Pande, Kanupriya, Villanueva-Perez, Pablo, Stachnik, Karolina, Chen, Joe P. J., Andrejczuk, Andrzej, Meents, Alke, Burkhardt, Anja, Pennicard, David, Huang, Xiaojing, Yan, Hanfei, Nazaretski, Evgeny, Chu, Yong S., and Hamm, Christian E. Fri .
"X-ray focusing with efficient high-NA multilayer Laue lenses". United States. https://doi.org/10.1038/lsa.2017.162. https://www.osti.gov/servlets/purl/1439298.
@article{osti_1439298,
title = {X-ray focusing with efficient high-NA multilayer Laue lenses},
author = {Bajt, Sasa and Prasciolu, Mauro and Fleckenstein, Holger and Domaracky, Martin and Chapman, Henry N. and Morgan, Andrew J. and Yefanov, Oleksandr and Messerschmidt, Marc and Du, Yang and Murray, Kevin T. and Mariani, Valerio and Kuhn, Manuela and Aplin, Steven and Pande, Kanupriya and Villanueva-Perez, Pablo and Stachnik, Karolina and Chen, Joe P. J. and Andrejczuk, Andrzej and Meents, Alke and Burkhardt, Anja and Pennicard, David and Huang, Xiaojing and Yan, Hanfei and Nazaretski, Evgeny and Chu, Yong S. and Hamm, Christian E.},
abstractNote = {Multilayer Laue lenses are volume diffraction elements for the efficient focusing of X-rays. With a new manufacturing technique that we introduced, it is possible to fabricate lenses of sufficiently high numerical aperture (NA) to achieve focal spot sizes below 10 nm. The alternating layers of the materials that form the lens must span a broad range of thicknesses on the nanometer scale to achieve the necessary range of X-ray deflection angles required to achieve a high NA. This poses a challenge to both the accuracy of the deposition process and the control of the materials properties, which often vary with layer thickness. We introduced a new pair of materials—tungsten carbide and silicon carbide—to prepare layered structures with smooth and sharp interfaces and with no material phase transitions that hampered the manufacture of previous lenses. Using a pair of multilayer Laue lenses (MLLs) fabricated from this system, we achieved a two-dimensional focus of 8.4 × 6.8 nm2 at a photon energy of 16.3 keV with high diffraction efficiency and demonstrated scanning-based imaging of samples with a resolution well below 10 nm. The high NA also allowed projection holographic imaging with strong phase contrast over a large range of magnifications. Furthermore, an error analysis indicates the possibility of achieving 1 nm focusing.},
doi = {10.1038/lsa.2017.162},
journal = {Light, Science & Applications},
number = 3,
volume = 7,
place = {United States},
year = {Fri Mar 23 00:00:00 EDT 2018},
month = {Fri Mar 23 00:00:00 EDT 2018}
}
Web of Science
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