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Title: Diffraction-Based Optical Switching with MEMS

Abstract

In this article, we are presenting an overview of MEMS-based (Micro-Electro-Mechanical System) optical switch technology starting from the reflective two-dimensional (2D) and three-dimensional (3D) MEMS implementations. To further increase the speed of the MEMS from these devices, the mirror size needs to be reduced. Small mirror size prevents efficient reflection but favors a diffraction-based approach. Two implementations have been demonstrated, one using the Texas Instruments DLP (Digital Light Processing), and the other an LCoS-based (Liquid Crystal on Silicon) SLM (Spatial Light Modulator). These switches demonstrated the benefit of diffraction, by independently achieving high speed, efficiency, and high number of ports. We also demonstrated for the first time that PSK (Phase Shift Keying) modulation format can be used with diffraction-based devices. To be truly effective in diffraction mode, the MEMS pixels should modulate the phase of the incident light. We are presenting our past and current efforts to manufacture a new type of MEMS where the pixels are moving in the vertical direction. The original structure is a 32 x 32 phase modulator array with high contrast grating pixels, and we are introducing a new sub-wavelength linear array capable of a 310 kHz modulation rate

Authors:
 [1];  [1];  [2];  [2]
  1. Univ. of Arizona, Tucson, AZ (United States). College of Optical Sciences
  2. Univ. of California, Berkeley, CA (United States). School of Electrical Engineering and Computer Sciences
Publication Date:
Research Org.:
Univ. of California, Berkeley, CA (United States)
Sponsoring Org.:
USDOE; National Science Foundation (NSF); Univ. of Arizona, Tucson, AZ (United States)
OSTI Identifier:
1418644
Grant/Contract Number:  
SC0015178; EEC-0812072; PFI:AIR-TT 1640329
Resource Type:
Accepted Manuscript
Journal Name:
Applied Sciences
Additional Journal Information:
Journal Volume: 7; Journal Issue: 4; Journal ID: ISSN 2076-3417
Publisher:
MDPI
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE; MEMS; MOEMS; diffraction; optical switch; data-communication

Citation Formats

Blanche, Pierre-Alexandre, LaComb, Lloyd, Wang, Youmin, and Wu, Ming. Diffraction-Based Optical Switching with MEMS. United States: N. p., 2017. Web. doi:10.3390/app7040411.
Blanche, Pierre-Alexandre, LaComb, Lloyd, Wang, Youmin, & Wu, Ming. Diffraction-Based Optical Switching with MEMS. United States. https://doi.org/10.3390/app7040411
Blanche, Pierre-Alexandre, LaComb, Lloyd, Wang, Youmin, and Wu, Ming. Wed . "Diffraction-Based Optical Switching with MEMS". United States. https://doi.org/10.3390/app7040411. https://www.osti.gov/servlets/purl/1418644.
@article{osti_1418644,
title = {Diffraction-Based Optical Switching with MEMS},
author = {Blanche, Pierre-Alexandre and LaComb, Lloyd and Wang, Youmin and Wu, Ming},
abstractNote = {In this article, we are presenting an overview of MEMS-based (Micro-Electro-Mechanical System) optical switch technology starting from the reflective two-dimensional (2D) and three-dimensional (3D) MEMS implementations. To further increase the speed of the MEMS from these devices, the mirror size needs to be reduced. Small mirror size prevents efficient reflection but favors a diffraction-based approach. Two implementations have been demonstrated, one using the Texas Instruments DLP (Digital Light Processing), and the other an LCoS-based (Liquid Crystal on Silicon) SLM (Spatial Light Modulator). These switches demonstrated the benefit of diffraction, by independently achieving high speed, efficiency, and high number of ports. We also demonstrated for the first time that PSK (Phase Shift Keying) modulation format can be used with diffraction-based devices. To be truly effective in diffraction mode, the MEMS pixels should modulate the phase of the incident light. We are presenting our past and current efforts to manufacture a new type of MEMS where the pixels are moving in the vertical direction. The original structure is a 32 x 32 phase modulator array with high contrast grating pixels, and we are introducing a new sub-wavelength linear array capable of a 310 kHz modulation rate},
doi = {10.3390/app7040411},
journal = {Applied Sciences},
number = 4,
volume = 7,
place = {United States},
year = {Wed Apr 19 00:00:00 EDT 2017},
month = {Wed Apr 19 00:00:00 EDT 2017}
}

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Cited by: 18 works
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Works referenced in this record:

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Works referencing / citing this record:

Adaptive optical beam steering and tuning system based on electrowetting driven fluidic rotor
journal, January 2020


2D broadband beamsteering with large-scale MEMS optical phased array
journal, January 2019


A New Type of AODF Based on an Imitation of the Weft Insertion of a Rapier Loom
journal, February 2019