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Title: Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film

Abstract

We extend the theory for scattering by oblique columnar structure thin films to include the induced form birefringence and the propagation of radiation in those films. We generalize the 4 × 4 matrix theory to include arbitrary sources in the layer, which are necessary to determine the Green function for the inhomogeneous wave equation. We further extend first-order vector perturbation theory for scattering by roughness in the smooth surface limit, when the layer is anisotropic. Scattering by an inhomogeneous medium is approximated by a distorted Born approximation, where effective medium theory is used to determine the effective properties of the medium and strong fluctuation theory is used to determine the inhomogeneous sources. In this manner, we develop a model for scattering by inhomogeneous films, with anisotropic correlation functions. Here, the results are compared to Mueller matrix bidirectional scattering distribution function measurements for a glancing-angle deposition (GLAD) film. While the results are applied to the GLAD film example, the development of the theory is general enough that it can guide simulations for scattering in other anisotropic thin films.

Authors:
 [1];  [2];  [2];  [2]
+ Show Author Affiliations
  1. National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States)
  2. Univ. of Rochester, Rochester, NY (United States)
Publication Date:
Research Org.:
Univ. of Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
Contributing Org.:
Laboratory for Laser Energetics, University of Rochester
OSTI Identifier:
1400250
Alternate Identifier(s):
OSTI ID: 1399644
Report Number(s):
2017-116, 1355
Journal ID: ISSN 1084-7529; JOAOD6; 2017-116, 2310, 1355
Grant/Contract Number:  
NA0001944
Resource Type:
Accepted Manuscript
Journal Name:
Journal of the Optical Society of America. A, Optics, Image Science, and Vision
Additional Journal Information:
Journal Volume: 34; Journal Issue: 11; Journal ID: ISSN 1084-7529
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Scattering measurements; BSDF; BRDF; BTDF

Citation Formats

Germer, Thomas A., Sharma, Katelynn A., Brown, Thomas G., and Oliver, James B. Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film. United States: N. p., 2017. Web. doi:10.1364/JOSAA.34.001974.
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Germer, Thomas A., Sharma, Katelynn A., Brown, Thomas G., & Oliver, James B. Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film. United States. https://doi.org/10.1364/JOSAA.34.001974
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Germer, Thomas A., Sharma, Katelynn A., Brown, Thomas G., and Oliver, James B. Wed . "Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film". United States. https://doi.org/10.1364/JOSAA.34.001974. https://www.osti.gov/servlets/purl/1400250.
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@article{osti_1400250,
title = {Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film},
author = {Germer, Thomas A. and Sharma, Katelynn A. and Brown, Thomas G. and Oliver, James B.},
abstractNote = {We extend the theory for scattering by oblique columnar structure thin films to include the induced form birefringence and the propagation of radiation in those films. We generalize the 4 × 4 matrix theory to include arbitrary sources in the layer, which are necessary to determine the Green function for the inhomogeneous wave equation. We further extend first-order vector perturbation theory for scattering by roughness in the smooth surface limit, when the layer is anisotropic. Scattering by an inhomogeneous medium is approximated by a distorted Born approximation, where effective medium theory is used to determine the effective properties of the medium and strong fluctuation theory is used to determine the inhomogeneous sources. In this manner, we develop a model for scattering by inhomogeneous films, with anisotropic correlation functions. Here, the results are compared to Mueller matrix bidirectional scattering distribution function measurements for a glancing-angle deposition (GLAD) film. While the results are applied to the GLAD film example, the development of the theory is general enough that it can guide simulations for scattering in other anisotropic thin films.},
doi = {10.1364/JOSAA.34.001974},
journal = {Journal of the Optical Society of America. A, Optics, Image Science, and Vision},
number = 11,
volume = 34,
place = {United States},
year = {Wed Oct 18 00:00:00 EDT 2017},
month = {Wed Oct 18 00:00:00 EDT 2017}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1364/JOSAA.34.001974
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Works referenced in this record:

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    Works referencing / citing this record:

    Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity
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