Three Dimensional Assembly in Directed Self-assembly of Block Copolymers

Segal-Peretz, Tamar; Zhou, Chun; Ren, Jiaxing; Dazai, Takahiro; Ocola, Leonidas E.; Divan, Ralu N.  S.; Nealey, Paul F.

doi:10.2494/photopolymer.29.653

Title: Three Dimensional Assembly in Directed Self-assembly of Block Copolymers

Abstract

The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Lastly, future work will include control over 3D assembly in sub-10 nm processes.

Authors:

Segal-Peretz, Tamar ^[1]; Zhou, Chun ^[2]; Ren, Jiaxing ^[2]; Dazai, Takahiro ^[3]; Ocola, Leonidas E. ^[4]; Divan, Ralu N. S. ^[4]; Nealey, Paul F. ^[1]

Univ. of Chicago, IL (United States). Inst. for Molecular Engineering; Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
Univ. of Chicago, IL (United States). Inst. for Molecular Engineering
Tokyo Ohka Kogyo Co., Ltd., Kanagawa (Japan)
Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials

Publication Date:: Fri Sep 02 00:00:00 EDT 2016

Research Org.:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1352873

Grant/Contract Number:: AC02-06CH11357

Resource Type:: Accepted Manuscript

Journal Name:: Journal of Photopolymer Science and Technology

Additional Journal Information:: Journal Volume: 29; Journal Issue: 5; Journal ID: ISSN 0914-9244

Publisher:: The Society of Photopolymer Science and Technology (SPST)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; Directed self-assembly; block copolymer, lithography; contact hole; transmission electron microscopy; metrology

Citation Formats


                    Segal-Peretz, Tamar, Zhou, Chun, Ren, Jiaxing, Dazai, Takahiro, Ocola, Leonidas E., Divan, Ralu N.  S., and Nealey, Paul F. Three Dimensional Assembly in Directed Self-assembly of Block Copolymers.  United States: N. p., 2016. 
Web.  doi:10.2494/photopolymer.29.653.

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                    Segal-Peretz, Tamar, Zhou, Chun, Ren, Jiaxing, Dazai, Takahiro, Ocola, Leonidas E., Divan, Ralu N.  S., & Nealey, Paul F. Three Dimensional Assembly in Directed Self-assembly of Block Copolymers.  United States.  https://doi.org/10.2494/photopolymer.29.653

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                    Segal-Peretz, Tamar, Zhou, Chun, Ren, Jiaxing, Dazai, Takahiro, Ocola, Leonidas E., Divan, Ralu N.  S., and Nealey, Paul F. Fri .  
"Three Dimensional Assembly in Directed Self-assembly of Block Copolymers".  United States.  https://doi.org/10.2494/photopolymer.29.653.  https://www.osti.gov/servlets/purl/1352873.

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@article{osti_1352873,

  title        = {Three Dimensional Assembly in Directed Self-assembly of Block Copolymers},

  author       = {Segal-Peretz, Tamar and Zhou, Chun and Ren, Jiaxing and Dazai, Takahiro and Ocola, Leonidas E. and Divan, Ralu N.  S. and Nealey, Paul F.},

  abstractNote = {The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Lastly, future work will include control over 3D assembly in sub-10 nm processes.},

  doi          = {10.2494/photopolymer.29.653},

  journal      = {Journal of Photopolymer Science and Technology},

  number       = 5,

  volume       = 29,

  place        = {United States},

  year         = {Fri Sep 02 00:00:00 EDT 2016},

  month        = {Fri Sep 02 00:00:00 EDT 2016}

}

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Works referencing / citing this record:

Quaternization of a Polystyrene‐ block ‐poly(4‐vinylpyridine) Isoporous Membrane: An Approach to Tune the Pore Size and the Charge Density
journal, November 2018

Zhang, Zhenzhen; Rahman, Md. Mushfequr; Abetz, Clarissa
Macromolecular Rapid Communications, Vol. 40, Issue 3
DOI: 10.1002/marc.201800729

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Title: Three Dimensional Assembly in Directed Self-assembly of Block Copolymers

Abstract

Citation Formats

Quaternization of a Polystyrene‐ block ‐poly(4‐vinylpyridine) Isoporous Membrane: An Approach to Tune the Pore Size and the Charge Density journal, November 2018

Quaternization of a Polystyrene‐ block ‐poly(4‐vinylpyridine) Isoporous Membrane: An Approach to Tune the Pore Size and the Charge Density
journal, November 2018