On-chip and freestanding elastic carbon films for micro-supercapacitors
Abstract
Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.
- Authors:
-
- Univ. Paul Sabatier-Toulouse III, Toulouse (France); Reseau sur le Stockage Electrochimique de l'Energie (France)
- Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. Lille 1 Science et Technologies, Villeneuve d'Ascq cedex (France)
- Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France)
- Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France); Univ. de Toulouse, Toulouse Cedex (France)
- Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. de Picardie Jules Verne, Amiens (France)
- Drexel Univ., Philadelphia, PA (United States)
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1346630
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Science
- Additional Journal Information:
- Journal Volume: 351; Journal Issue: 6274; Journal ID: ISSN 0036-8075
- Publisher:
- AAAS
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States: N. p., 2016.
Web. doi:10.1126/science.aad3345.
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., & Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States. https://doi.org/10.1126/science.aad3345
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. Thu .
"On-chip and freestanding elastic carbon films for micro-supercapacitors". United States. https://doi.org/10.1126/science.aad3345. https://www.osti.gov/servlets/purl/1346630.
@article{osti_1346630,
title = {On-chip and freestanding elastic carbon films for micro-supercapacitors},
author = {Huang, Peihua and Lethien, C. and Pinaud, S. and Brousse, K. and Laloo, R. and Turq, V. and Respaud, M. and Demortiere, A. and Daffos, B. and Taberna, Pierre -Louis and Chaudret, B. and Gogotsi, Yury G. and Simon, Patrice},
abstractNote = {Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.},
doi = {10.1126/science.aad3345},
journal = {Science},
number = 6274,
volume = 351,
place = {United States},
year = {Thu Feb 11 00:00:00 EST 2016},
month = {Thu Feb 11 00:00:00 EST 2016}
}
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