A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications
Abstract
SrTiO3 epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the route to the monolithic integration of various complex oxides on the complementary metal-oxide-semiconductor silicon platform. Among functional oxides, ferroelectric perovskite oxides offer promising perspectives to improve or add functionalities on-chip. We review the growth by MBE of the ferroelectric compound BaTiO3 on silicon (Si), germanium (Ge) and gallium arsenide (GaAs) and we discuss the film properties in terms of crystalline structure, microstructure and ferroelectricity. Lastly, we review the last developments in two areas of interest for the applications of BaTiO3 films on silicon, namely integrated photonics, which benefits from the large Pockels effect of BaTiO3, and low power logic devices, which may benefit from the negative capacitance of the ferroelectric.
- Authors:
-
- Univ. de Lyon, Ecully (France)
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Univ. de Toulouse, Toulouse (France)
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1337832
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Science and Technology of Advanced Materials
- Additional Journal Information:
- Journal Volume: 16; Journal Issue: 3; Journal ID: ISSN 1468-6996
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; molecular beam epitaxy; ferroelectric; semiconductor
Citation Formats
Mazet, Lucie, Yang, Sang Mo, Kalinin, Sergei V., Schamm-Chardon, Sylvie, and Dubourdieu, Catherine. A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications. United States: N. p., 2015.
Web. doi:10.1088/1468-6996/16/3/036005.
Mazet, Lucie, Yang, Sang Mo, Kalinin, Sergei V., Schamm-Chardon, Sylvie, & Dubourdieu, Catherine. A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications. United States. https://doi.org/10.1088/1468-6996/16/3/036005
Mazet, Lucie, Yang, Sang Mo, Kalinin, Sergei V., Schamm-Chardon, Sylvie, and Dubourdieu, Catherine. Tue .
"A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications". United States. https://doi.org/10.1088/1468-6996/16/3/036005. https://www.osti.gov/servlets/purl/1337832.
@article{osti_1337832,
title = {A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications},
author = {Mazet, Lucie and Yang, Sang Mo and Kalinin, Sergei V. and Schamm-Chardon, Sylvie and Dubourdieu, Catherine},
abstractNote = {SrTiO3 epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the route to the monolithic integration of various complex oxides on the complementary metal-oxide-semiconductor silicon platform. Among functional oxides, ferroelectric perovskite oxides offer promising perspectives to improve or add functionalities on-chip. We review the growth by MBE of the ferroelectric compound BaTiO3 on silicon (Si), germanium (Ge) and gallium arsenide (GaAs) and we discuss the film properties in terms of crystalline structure, microstructure and ferroelectricity. Lastly, we review the last developments in two areas of interest for the applications of BaTiO3 films on silicon, namely integrated photonics, which benefits from the large Pockels effect of BaTiO3, and low power logic devices, which may benefit from the negative capacitance of the ferroelectric.},
doi = {10.1088/1468-6996/16/3/036005},
journal = {Science and Technology of Advanced Materials},
number = 3,
volume = 16,
place = {United States},
year = {Tue Jun 30 00:00:00 EDT 2015},
month = {Tue Jun 30 00:00:00 EDT 2015}
}
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Works referenced in this record:
Structural characterisation of BaTiO 3 thin films deposited on SrRuO 3 /YSZ buffered silicon substrates and silicon microcantilevers
journal, February 2014
- Colder, H.; Domengès, B.; Jorel, C.
- Journal of Applied Physics, Vol. 115, Issue 5
Epitaxial c -axis oriented BaTiO 3 thin films on SrTiO 3 -buffered Si(001) by atomic layer deposition
journal, February 2014
- Ngo, Thong Q.; Posadas, Agham B.; McDaniel, Martin D.
- Applied Physics Letters, Vol. 104, Issue 8
Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application
journal, July 2011
- Niu, G.; Yin, S.; Saint-Girons, G.
- Microelectronic Engineering, Vol. 88, Issue 7
Emerging physics of oxide heterostructures
journal, June 2011
- Demkov, A. A.; Posadas, A.; Seo, H.
- physica status solidi (b)
Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy
journal, May 2000
- Zhao, Tong; Chen, Fan; Lu, Huibin
- Journal of Applied Physics, Vol. 87, Issue 10
Growth of SrTiO 3 on Si(001) by hybrid molecular beam epitaxy : Growth of SrTiO
journal, September 2014
- Zhang, Lei; Engel-Herbert, Roman
- physica status solidi (RRL) - Rapid Research Letters, Vol. 8, Issue 11
Tuning of the Depolarization Field and Nanodomain Structure in Ferroelectric Thin Films
journal, July 2014
- Lichtensteiger, Céline; Fernandez-Pena, Stéphanie; Weymann, Christian
- Nano Letters, Vol. 14, Issue 8
Ionically-Mediated Electromechanical Hysteresis in Transition Metal Oxides
journal, July 2012
- Kim, Yunseok; Morozovska, Anna N.; Kumar, Amit
- ACS Nano, Vol. 6, Issue 8
Phase Transition, Stability, and Depolarization Field in Ferroelectric Thin Films
journal, October 1973
- Batra, I. P.; Wurfel, P.; Silverman, B. D.
- Physical Review B, Vol. 8, Issue 7
Nonlinear photonic crystal waveguide structures based on barium titanate thin films and their optical properties
journal, May 2007
- Liu, Zhifu; Lin, Pao-Tai; Wessels, Bruce W.
- Applied Physics Letters, Vol. 90, Issue 20
Oxide Interfaces--An Opportunity for Electronics
journal, March 2010
- Mannhart, J.; Schlom, D. G.
- Science, Vol. 327, Issue 5973, p. 1607-1611
Augmented methods for growth and development of novel multi-cation oxides
conference, March 2014
- Yamamoto, Hideki; Krockenberger, Yoshiharu; Naito, Michio
- SPIE OPTO, SPIE Proceedings
Ferroelectricity in ultrathin perovskite films
journal, July 2005
- Sai, Na; Kolpak, Alexie M.; Rappe, Andrew M.
- Physical Review B, Vol. 72, Issue 2, Article No. 020101
Molecular beam epitaxial growth of BaTiO3 single crystal on Ge-on-Si(001) substrates
journal, February 2011
- Merckling, C.; Saint-Girons, G.; Botella, C.
- Applied Physics Letters, Vol. 98, Issue 9
Atomic structure of epitaxial SrTiO3–GaAs(001) heterojunctions
journal, October 2005
- Klie, R. F.; Zhu, Y.; Altman, E. I.
- Applied Physics Letters, Vol. 87, Issue 14
Adsorption-controlled growth of PbTiO3 by reactive molecular beam epitaxy
journal, July 1998
- Theis, C. D.; Yeh, J.; Schlom, D. G.
- Thin Solid Films, Vol. 325, Issue 1-2
Hetero-epitaxy of SrTiO3 on Si and control of the interface
journal, June 2007
- Delhaye, G.; El Kazzi, M.; Gendry, M.
- Thin Solid Films, Vol. 515, Issue 16
Mechanism of cleaning Si(100) surface using Sr or SrO for the growth of crystalline SrTiO[sub 3] films
journal, January 2002
- Wei, Yi; Hu, Xiaoming; Liang, Yong
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 4
Antiferromagnetic LaFeO 3 thin films and their effect on exchange bias
journal, June 2008
- Seo, J. W.; Fullerton, E. E.; Nolting, F.
- Journal of Physics: Condensed Matter, Vol. 20, Issue 26
Atomically precise interfaces from non-stoichiometric deposition
journal, August 2014
- Nie, Y. F.; Zhu, Y.; Lee, C. -H.
- Nature Communications, Vol. 5, Issue 1
Front Matter: Volume 7934
conference, February 2011
- Spie, Proceedings of
- SPIE OPTO, SPIE Proceedings
Oxide interfaces: pathways to novel phenomena
journal, July 2012
- Yu, Pu; Chu, Ying-Hao; Ramesh, Ramamoorthy
- Materials Today, Vol. 15, Issue 7-8
Evolution of dislocation arrays in epitaxial BaTiO3 thin films grown on (100) SrTiO3
journal, April 2004
- Sun, H. P.; Tian, W.; Pan, X. Q.
- Applied Physics Letters, Vol. 84, Issue 17
Structural study and ferroelectricity of epitaxial BaTiO 3 films on silicon grown by molecular beam epitaxy
journal, December 2014
- Mazet, L.; Bachelet, R.; Louahadj, L.
- Journal of Applied Physics, Vol. 116, Issue 21
Epitaxial growth and strain relaxation of BaTiO[sub 3] thin films on SrTiO[sub 3] buffered (001) Si by molecular beam epitaxy
journal, January 2007
- Niu, F.; Wessels, B. W.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 3
The interface between silicon and a high-k oxide
journal, January 2004
- Först, Clemens J.; Ashman, Christopher R.; Schwarz, Karlheinz
- Nature, Vol. 427, Issue 6969
Experimental confirmation of temperature dependent negative capacitance in ferroelectric field effect transistor
journal, April 2012
- Salvatore, Giovanni A.; Rusu, Alexandru; Ionescu, Adrian M.
- Applied Physics Letters, Vol. 100, Issue 16
Structural, optical, and electrical properties of strained La-doped SrTiO 3 films
journal, July 2014
- Choi, Miri; Posadas, Agham B.; Rodriguez, Cesar A.
- Journal of Applied Physics, Vol. 116, Issue 4
Combined in-situ photoemission spectroscopy and density functional theory of the Sr Zintl template for oxide heteroepitaxy on Si(001)
journal, July 2013
- Seo, Hosung; Choi, Miri; Posadas, Agham B.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 4
Electric field induced superconductivity in an overdoped cuprate superconductor
journal, December 1994
- Matijasevic, V. C.; Bogers, S.; Chen, N. Y.
- Physica C: Superconductivity, Vol. 235-240
Vertically aligned BaTiO 3 nanowire arrays for energy harvesting
journal, January 2014
- Koka, Aneesh; Zhou, Zhi; Sodano, Henry A.
- Energy Environ. Sci., Vol. 7, Issue 1
Epitaxial growth of LaAlO3 on Si(001) using interface engineering
journal, April 2007
- Merckling, C.; Delhaye, G.; El-Kazzi, M.
- Microelectronics Reliability, Vol. 47, Issue 4-5
Advances in heteroepitaxy of oxides on silicon
journal, September 2004
- Yu, Z.; Liang, Y.; Overgaard, C.
- Thin Solid Films, Vol. 462-463
Direct epitaxial growth of SrTiO3 on Si (001): Interface, crystallization and IR evidence of phase transition
journal, June 2011
- Niu, G.; Peng, W. W.; Saint-Girons, G.
- Thin Solid Films, Vol. 519, Issue 17
Ultra-flat BaTiO 3 epitaxial films on Si(001) with large out-of-plane polarization
journal, March 2013
- Scigaj, M.; Dix, N.; Fina, I.
- Applied Physics Letters, Vol. 102, Issue 11
Epitaxial integration of ferromagnetic correlated oxide LaCoO3 with Si (100)
journal, January 2011
- Posadas, A.; Berg, M.; Seo, H.
- Applied Physics Letters, Vol. 98, Issue 5
Domain Wall Geometry Controls Conduction in Ferroelectrics
journal, September 2012
- Vasudevan, R. K.; Morozovska, A. N.; Eliseev, E. A.
- Nano Letters, Vol. 12, Issue 11
Solid phase epitaxy of SrTiO3 on (Ba,Sr)O∕Si(100): The relationship between oxygen stoichiometry and interface stability
journal, April 2006
- Norga, G. J.; Marchiori, C.; Rossel, C.
- Journal of Applied Physics, Vol. 99, Issue 8
Piezoelectric force microscopy of crystalline oxide-semiconductor heterostructures
journal, September 2012
- Marshall, M. S. J.; Kumah, D. P.; Reiner, J. W.
- Applied Physics Letters, Vol. 101, Issue 10
Negative capacitance to the rescue?
journal, February 2008
- Zhirnov, Victor V.; Cavin, Ralph K.
- Nature Nanotechnology, Vol. 3, Issue 2
Room-Temperature Negative Capacitance in a Ferroelectric–Dielectric Superlattice Heterostructure
journal, September 2014
- Gao, Weiwei; Khan, Asif; Marti, Xavi
- Nano Letters, Vol. 14, Issue 10
Epitaxial LaAlO3 thin film on silicon: Structure and electronic properties
journal, April 2007
- Mi, Y. Y.; Yu, Z.; Wang, S. J.
- Applied Physics Letters, Vol. 90, Issue 18
Switching of ferroelectric polarization in epitaxial BaTiO3 films on silicon without a conducting bottom electrode
journal, September 2013
- Dubourdieu, Catherine; Bruley, John; Arruda, Thomas M.
- Nature Nanotechnology, Vol. 8, Issue 10
The interface of epitaxial SrTiO3 on silicon: in situ and ex situ studies
journal, January 2003
- Hu, Xiaoming; Li, H.; Liang, Y.
- Applied Physics Letters, Vol. 82, Issue 2
A Ferroelectric Oxide Made Directly on Silicon
journal, April 2009
- Warusawithana, M. P.; Cen, C.; Sleasman, C. R.
- Science, Vol. 324, Issue 5925
Formation of alkaline-earth template layers on Ge(100) for oxide heteroepitaxy: Self-organization of ordered islands and trenches
journal, August 2011
- Lukanov, B. R.; Reiner, J. W.; Walker, F. J.
- Physical Review B, Vol. 84, Issue 7
Molecular beam epitaxy of SrTiO3 on GaAs(001): GaAs surface treatment and structural characterization of the oxide layer
journal, July 2014
- Louahadj, L.; Bachelet, R.; Regreny, P.
- Thin Solid Films, Vol. 563
Controlled stripes of ultrafine ferroelectric domains
journal, August 2014
- Feigl, Ludwig; Yudin, Petr; Stolichnov, Igor
- Nature Communications, Vol. 5, Issue 1
Interface Physics in Complex Oxide Heterostructures
journal, March 2011
- Zubko, Pavlo; Gariglio, Stefano; Gabay, Marc
- Annual Review of Condensed Matter Physics, Vol. 2, Issue 1
Molecular beam epitaxy of SrTiO3 with a growth window
journal, July 2009
- Jalan, Bharat; Moetakef, Pouya; Stemmer, Susanne
- Applied Physics Letters, Vol. 95, Issue 3
High-Temperature Superconducting Multilayers and Heterostructures Grown by Atomic Layer-By-Layer Molecular Beam Epitaxy
journal, August 1995
- Eckstein, J. N.; Bozovic, I.
- Annual Review of Materials Science, Vol. 25, Issue 1
Fabrication of high-Tc superconductors using ozone-assisted molecular beam epitaxy
journal, August 1992
- Achutharaman, V. S.; Beauchamp, K. M.; Chandrasekhar, N.
- Thin Solid Films, Vol. 216, Issue 1
Giant tunnel electroresistance for non-destructive readout of ferroelectric states
journal, May 2009
- Garcia, V.; Fusil, S.; Bouzehouane, K.
- Nature, Vol. 460, Issue 7251, p. 81-84
Interface-Induced Polarization and Inhibition of Ferroelectricity in Epitaxial
journal, November 2010
- Kolpak, A. M.; Walker, F. J.; Reiner, J. W.
- Physical Review Letters, Vol. 105, Issue 21
Ferroelectric and ferromagnetic properties in BaTiO 3 thin films on Si (100)
journal, September 2014
- Singamaneni, Srinivasa Rao; Punugupati, Sandhyarani; Prater, John T.
- Journal of Applied Physics, Vol. 116, Issue 9
Epitaxial oxide thin films on Si(001)
journal, January 2000
- Yu, Z.; Ramdani, J.; Curless, J. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 4
Experimental Observation of Negative Capacitance in Ferroelectrics at Room Temperature
journal, June 2014
- Appleby, Daniel J. R.; Ponon, Nikhil K.; Kwa, Kelvin S. K.
- Nano Letters, Vol. 14, Issue 7
Emergent phenomena at oxide interfaces
journal, January 2012
- Hwang, H. Y.; Iwasa, Y.; Kawasaki, M.
- Nature Materials, Vol. 11, Issue 2
Molecular beam epitaxy growth of BaTiO3 thin films and crucial impact of oxygen content conditions on the electrical characteristics
journal, May 2012
- Niu, G.; Gautier, B.; Yin, S.
- Thin Solid Films, Vol. 520, Issue 14
Molecular beam epitaxy
journal, December 1985
- Joyce, B. A.
- Reports on Progress in Physics, Vol. 48, Issue 12
Depolarizing field and “real” hysteresis loops in nanometer-scale ferroelectric films
journal, December 2006
- Bratkovsky, A. M.; Levanyuk, A. P.
- Applied Physics Letters, Vol. 89, Issue 25
Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
journal, April 2005
- Dubourdieu, C.; Roussel, H.; Jimenez, C.
- Materials Science and Engineering: B, Vol. 118, Issue 1-3
Anomalous lattice expansion of coherently strained thin films grown on by kinetically controlled sequential deposition
journal, January 2006
- Woicik, J.; Li, H.; Zschack, P.
- Physical Review B, Vol. 73, Issue 2
Active Silicon Integrated Nanophotonics: Ferroelectric BaTiO 3 Devices
journal, February 2014
- Xiong, Chi; Pernice, Wolfram H. P.; Ngai, Joseph H.
- Nano Letters, Vol. 14, Issue 3
c-axis oriented epitaxial BaTiO3 films on (001) Si
journal, July 2006
- Vaithyanathan, V.; Lettieri, J.; Tian, W.
- Journal of Applied Physics, Vol. 100, Issue 2
Electromechanical Imaging and Spectroscopy of Ferroelectric and Piezoelectric Materials: State of the Art and Prospects for the Future
journal, August 2009
- Balke, Nina; Bdikin, Igor; Kalinin, Sergei V.
- Journal of the American Ceramic Society, Vol. 92, Issue 8
Properties of epitaxial BaTiO 3 deposited on GaAs
journal, January 2013
- Contreras-Guerrero, R.; Veazey, J. P.; Levy, J.
- Applied Physics Letters, Vol. 102, Issue 1
Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3
journal, September 1997
- Gill, D. M.; Conrad, C. W.; Ford, G.
- Applied Physics Letters, Vol. 71, Issue 13
Reversible nano-structuring of SrCrO3-δ through oxidation and reduction at low temperature
journal, August 2014
- Zhang, K. H. L.; Sushko, P. V.; Colby, R.
- Nature Communications, Vol. 5, Issue 1
Field-effect transistors with SrHfO3 as gate oxide
journal, July 2006
- Rossel, C.; Mereu, B.; Marchiori, C.
- Applied Physics Letters, Vol. 89, Issue 5
Electrical properties of ferroelectric BaTiO3 thin film on SrTiO3 buffered GaAs by laser molecular beam epitaxy
journal, January 2009
- Huang, W.; Wu, Z. P.; Hao, J. H.
- Applied Physics Letters, Vol. 94, Issue 3
Wetting at the BaTiO 3 /Pt interface
journal, May 2013
- Fredrickson, Kurt D.; Posadas, Agham B.; Demkov, Alexander A.
- Journal of Applied Physics, Vol. 113, Issue 18
LaAlO3 films prepared by MBE on LaAlO3(001) and Si(001) substrates
journal, June 2005
- Gaillard, S.; Rozier, Y.; Merckling, C.
- Microelectronic Engineering, Vol. 80
Adsorption-controlled molecular-beam epitaxial growth of BiFeO3
journal, August 2007
- Ihlefeld, J. F.; Kumar, A.; Gopalan, V.
- Applied Physics Letters, Vol. 91, Issue 7
Critical thickness for ferroelectricity in perovskite ultrathin films
journal, April 2003
- Junquera, Javier; Ghosez, Philippe
- Nature, Vol. 422, Issue 6931, p. 506-509
Epitaxial growth of the first five members of the Srn+1TinO3n+1 Ruddlesden–Popper homologous series
journal, May 2001
- Haeni, J. H.; Theis, C. D.; Schlom, D. G.
- Applied Physics Letters, Vol. 78, Issue 21
Optical absorption in epitaxial La1−xSrxFeO3 thin films
journal, February 2013
- Scafetta, M. D.; Xie, Y. J.; Torres, M.
- Applied Physics Letters, Vol. 102, Issue 8
Adsorption-controlled growth of Bi4Ti3O12 by reactive MBE
journal, June 1998
- Theis, C. D.; Yeh, J.; Schlom, D. G.
- Applied Physics Letters, Vol. 72, Issue 22
Charge transfer in Sr Zintl template on Si(001)
journal, January 2013
- Choi, Miri; Posadas, Agham B.; Seo, Hosung
- Applied Physics Letters, Vol. 102, Issue 3
In-plane dielectric properties of epitaxial Ba 0.7 Sr 0.3 TiO 3 thin films grown on GaAs for tunable device application
journal, September 2012
- Yang, Zhibin; Hao, Jianhua
- Journal of Applied Physics, Vol. 112, Issue 5
Epitaxial integration of perovskite-based multifunctional oxides on silicon
journal, May 2013
- Baek, Seung-Hyub; Eom, Chang-Beom
- Acta Materialia, Vol. 61, Issue 8
Towards precise defect control in layered oxide structures by using oxide molecular beam epitaxy
journal, January 2014
- Baiutti, Federico; Christiani, Georg; Logvenov, Gennady
- Beilstein Journal of Nanotechnology, Vol. 5
Structural properties of epitaxial SrTiO3 thin films grown by molecular beam epitaxy on Si(001)
journal, December 2006
- Delhaye, G.; Merckling, C.; El-Kazzi, M.
- Journal of Applied Physics, Vol. 100, Issue 12
Negative capacitance in a ferroelectric capacitor
journal, December 2014
- Khan, Asif Islam; Chatterjee, Korok; Wang, Brian
- Nature Materials, Vol. 14, Issue 2
Molecular beam epitaxy
journal, January 1975
- Cho, A. Y.; Arthur, J. R.
- Progress in Solid State Chemistry, Vol. 10
Crystalline Oxides on Silicon
journal, April 2010
- Reiner, James W.; Kolpak, Alexie M.; Segal, Yaron
- Advanced Materials, Vol. 22, Issue 26-27
Structural properties of epitaxial SrHfO3 thin films on Si (001)
journal, January 2010
- Sawkar-Mathur, Monica; Marchiori, Chiara; Fompeyrine, Jean
- Thin Solid Films, Vol. 518, Issue 6
Surface composition of BaTiO3/SrTiO3(001) films grown by atomic oxygen plasma assisted molecular beam epitaxy
journal, December 2012
- Barbier, A.; Mocuta, C.; Stanescu, D.
- Journal of Applied Physics, Vol. 112, Issue 11
Interfacial reaction effects in the growth of MgO on GaAs(001) by reactive molecular beam epitaxy
journal, July 1998
- Robey, S. W.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 16, Issue 4
Creation of a two-dimensional electron gas at an oxide interface on silicon
journal, October 2010
- Park, J. W.; Bogorin, D. F.; Cen, C.
- Nature Communications, Vol. 1, Issue 1
Epitaxial growth of MgO on GaAs(001) for growing epitaxial BaTiO 3 thin films by pulsed laser deposition
journal, March 1992
- Nashimoto, Keiichi; Fork, David K.; Geballe, Theodore H.
- Applied Physics Letters, Vol. 60, Issue 10
Conduction at domain walls in oxide multiferroics
journal, January 2009
- Seidel, J.; Martin, L. W.; He, Q.
- Nature Materials, Vol. 8, Issue 3
Band alignment at epitaxial SrTiO3–GaAs(001) heterojunction
journal, February 2005
- Liang, Y.; Curless, J.; McCready, D.
- Applied Physics Letters, Vol. 86, Issue 8
Giant Piezoelectricity on Si for Hyperactive MEMS
journal, November 2011
- Baek, S. H.; Park, J.; Kim, D. M.
- Science, Vol. 334, Issue 6058
Morphology of epitaxial SrTiO3/Si (001) determined using three-dimensional diffraction profile analysis
journal, July 2010
- Segal, Y.; Reiner, J. W.; Zhang, Z.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 4
Physical Structure and Inversion Charge at a Semiconductor Interface with a Crystalline Oxide
journal, July 2001
- McKee, R. A.
- Science, Vol. 293, Issue 5529
Epitaxial SrTiO3 films with electron mobilities exceeding 30,000 cm2 V-1 s-1
journal, April 2010
- Son, Junwoo; Moetakef, Pouya; Jalan, Bharat
- Nature Materials, Vol. 9, Issue 6, p. 482-484
Atomic and electronic structure of the ferroelectric BaTiO 3 /Ge(001) interface
journal, June 2014
- Fredrickson, Kurt D.; Ponath, Patrick; Posadas, Agham B.
- Applied Physics Letters, Vol. 104, Issue 24
Oxide nano-engineering using MBE
journal, December 2001
- Schlom, D. G.; Haeni, J. H.; Lettieri, J.
- Materials Science and Engineering: B, Vol. 87, Issue 3
Controlling tetragonality and crystalline orientation in BaTiO 3 nano-layers grown on Si
journal, June 2013
- Abel, S.; Sousa, M.; Rossel, C.
- Nanotechnology, Vol. 24, Issue 28
On the route to epitaxial growth of YBa2Cu3O7 superconducting thin films by molecular beam epitaxy.
journal, June 1988
- Cabanel, R.; Hirtz, J. P.; Etienne, P.
- Physica C: Superconductivity, Vol. 153-155
Switchable Induced Polarization in LaAlO 3 /SrTiO 3 Heterostructures
journal, January 2012
- Bark, C. W.; Sharma, P.; Wang, Y.
- Nano Letters, Vol. 12, Issue 4
Two-dimensional growth of high-quality strontium titanate thin films on Si
journal, April 2003
- Li, H.; Hu, X.; Wei, Y.
- Journal of Applied Physics, Vol. 93, Issue 8
Experimental evidence of ferroelectric negative capacitance in nanoscale heterostructures
journal, September 2011
- Islam Khan, Asif; Bhowmik, Debanjan; Yu, Pu
- Applied Physics Letters, Vol. 99, Issue 11
A strong electro-optically active lead-free ferroelectric integrated on silicon
journal, April 2013
- Abel, Stefan; Stöferle, Thilo; Marchiori, Chiara
- Nature Communications, Vol. 4, Issue 1
Ferroelectric Pb(Zr,Ti)O 3 epitaxial layers on GaAs
journal, November 2013
- Louahadj, L.; Le Bourdais, D.; Largeau, L.
- Applied Physics Letters, Vol. 103, Issue 21
Preparation of a clean Ge(001) surface using oxygen plasma cleaning
journal, May 2013
- Ponath, Patrick; Posadas, Agham B.; Hatch, Richard C.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 3
Atomic-layer engineering of cuprate superconductors
journal, February 1994
- Bozovic, I.; Eckstein, J. N.; Virshup, G. F.
- Journal of Superconductivity, Vol. 7, Issue 1
The Role of Electrochemical Phenomena in Scanning Probe Microscopy of Ferroelectric Thin Films
journal, June 2011
- Kalinin, Sergei V.; Jesse, Stephen; Tselev, Alexander
- ACS Nano, Vol. 5, Issue 7
Growth and properties of GdTiO3 films prepared by hybrid molecular beam epitaxy
journal, September 2012
- Moetakef, Pouya; Ouellette, Daniel G.; Zhang, Jack Y.
- Journal of Crystal Growth, Vol. 355, Issue 1
Highly Conductive SrVO 3 as a Bottom Electrode for Functional Perovskite Oxides
journal, May 2013
- Moyer, Jarrett A.; Eaton, Craig; Engel-Herbert, Roman
- Advanced Materials, Vol. 25, Issue 26
Abrupt PbTiO3/SrTiO3 superlattices grown by reactive molecular beam epitaxy
journal, May 1999
- Jiang, J. C.; Pan, X. Q.; Tian, W.
- Applied Physics Letters, Vol. 74, Issue 19
Optical identification of oxygen vacancy formation at SrTiO 3 –(Ba,Sr)TiO 3 heterostructures
journal, May 2014
- Rutkowski, M. M.; McNicholas, K.; Zeng, Z. Q.
- Journal of Physics D: Applied Physics, Vol. 47, Issue 25
Carrier density modulation in a germanium heterostructure by ferroelectric switching
journal, January 2015
- Ponath, Patrick; Fredrickson, Kurt; Posadas, Agham B.
- Nature Communications, Vol. 6, Issue 1
Elastic anomaly for thin films grown on Si(001)
journal, November 2004
- Aguirre-Tostado, F. S.; Herrera-Gómez, A.; Woicik, J. C.
- Physical Review B, Vol. 70, Issue 20
Multidomain ferroelectricity as a limiting factor for voltage amplification in ferroelectric field-effect transistors
journal, September 2010
- Cano, A.; Jiménez, D.
- Applied Physics Letters, Vol. 97, Issue 13
RHEED Intensity Oscillations for the Stoichiometric Growth of SrTiO3 Thin Films by Reactive Molecular Beam Epitaxy
journal, January 2000
- Haeni, J. H.; Theis, C. D.; Schlom, D. G.
- Journal of Electroceramics, Vol. 4, Issue 2/3, p. 385-391
Electronic properties of ferroelectric BaTiO3∕MgO capacitors on GaAs
journal, October 2004
- Murphy, T. E.; Chen, D.; Phillips, J. D.
- Applied Physics Letters, Vol. 85, Issue 15
Growth and structural properties of crystalline LaAlO3 on Si (001)
journal, January 2008
- Reiner, J. W.; Posadas, A.; Wang, M.
- Microelectronic Engineering, Vol. 85, Issue 1
Physics of the ferroelectric nonvolatile memory field effect transistor
journal, December 1992
- Miller, S. L.; McWhorter, P. J.
- Journal of Applied Physics, Vol. 72, Issue 12
Crystalline Oxides on Silicon: The First Five Monolayers
journal, October 1998
- McKee, R. A.; Walker, F. J.; Chisholm, M. F.
- Physical Review Letters, Vol. 81, Issue 14
Cheap and stable titanium source for use in oxide molecular beam epitaxy systems
journal, July 1996
- Theis, C. D.; Schlom, D. G.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 4
Interface properties of MBE grown epitaxial oxides on GaAs
journal, September 2013
- Contreras-Guerrero, R.; Edirisooriya, M.; Noriega, O. C.
- Journal of Crystal Growth, Vol. 378
Interfacial structure of epitaxial SrTiO 3 on Si: experiments and simulations
journal, April 2009
- Wang, X. F.; Wang, Juan; Li, Quan
- Journal of Physics D: Applied Physics, Vol. 42, Issue 8
Quasi-single-crystal (001) SrTiO3 templates on Si
journal, August 2009
- Park, J. W.; Baek, S. H.; Bark, C. W.
- Applied Physics Letters, Vol. 95, Issue 6
Use of Negative Capacitance to Provide Voltage Amplification for Low Power Nanoscale Devices
journal, February 2008
- Salahuddin, Sayeef; Datta, Supriyo
- Nano Letters, Vol. 8, Issue 2
Ferroelectric Epitaxial Thin Films for Integrated Optics
journal, August 2007
- Wessels, Bruce W.
- Annual Review of Materials Research, Vol. 37, Issue 1
The Impacts of Cation Stoichiometry and Substrate Surface Quality on Nucleation, Structure, Defect Formation, and Intermixing in Complex Oxide Heteroepitaxy-LaCrO 3 on SrTiO 3 (001)
journal, January 2013
- Qiao, L.; Zhang, K. H. L.; Bowden, M. E.
- Advanced Functional Materials, Vol. 23, Issue 23
Growth of SrTiO 3 (110) film by oxide molecular beam epitaxy with feedback control
journal, December 2012
- Feng, Jiagui; Yang, Fang; Wang, Zhiming
- AIP Advances, Vol. 2, Issue 4
An Epitaxial Ferroelectric Tunnel Junction on Silicon
journal, September 2014
- Li, Zhipeng; Guo, Xiao; Lu, Hui-Bin
- Advanced Materials, Vol. 26, Issue 42
Electrical characteristics of epitaxially grown SrTiO 3 on silicon for metal-insulator-semiconductor gate dielectric applications
journal, April 2003
- Sanghun Jeon, ; Walker, F. J.; Billman, C. A.
- IEEE Electron Device Letters, Vol. 24, Issue 4
I n s i t u growth of DyBa 2 Cu 3 O 7− x thin films by molecular beam epitaxy
journal, May 1990
- Johnson, B. R.; Beauchamp, K. M.; Wang, T.
- Applied Physics Letters, Vol. 56, Issue 19
Electric field-tunable Ba x Sr 1− x TiO 3 films with high figures of merit grown by molecular beam epitaxy
journal, December 2012
- Mikheev, Evgeny; Kajdos, Adam P.; Hauser, Adam J.
- Applied Physics Letters, Vol. 101, Issue 25
Field effect transistors with SrTiO3 gate dielectric on Si
journal, March 2000
- Eisenbeiser, K.; Finder, J. M.; Yu, Z.
- Applied Physics Letters, Vol. 76, Issue 10
Epitaxial ferroelectric oxides on semiconductors- A route towards negative capacitance devices
journal, September 2013
- Droopad, R.; Contreras-Guerrero, R.; Veazey, J. P.
- Microelectronic Engineering, Vol. 109
Structural and dielectric properties of epitaxial SrTiO3 films grown directly on GaAs substrates by laser molecular beam epitaxy
journal, September 2008
- Wu, Z. P.; Huang, W.; Wong, K. H.
- Journal of Applied Physics, Vol. 104, Issue 5
Conduction through 71° Domain Walls in Thin Films
journal, September 2011
- Farokhipoor, S.; Noheda, B.
- Physical Review Letters, Vol. 107, Issue 12
The atomic structure and polarization of strained SrTiO3/Si
journal, December 2010
- Kumah, D. P.; Reiner, J. W.; Segal, Y.
- Applied Physics Letters, Vol. 97, Issue 25
Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach
journal, May 2009
- Jalan, Bharat; Engel-Herbert, Roman; Wright, Nicholas J.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 3
Tunable electrical properties of TaN x thin films grown by ionized physical vapor deposition
journal, September 2014
- Choi, Miri; Dubourdieu, Catherine; Kellock, Andrew J.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 5
Stability Constraints Define the Minimum Subthreshold Swing of a Negative Capacitance Field-Effect Transistor
journal, July 2014
- Jain, Ankit; Alam, Muhammad Ashraful
- IEEE Transactions on Electron Devices, Vol. 61, Issue 7
Controlling domain wall motion in ferroelectric thin films
journal, January 2015
- McGilly, L. J.; Yudin, P.; Feigl, L.
- Nature Nanotechnology, Vol. 10, Issue 2
Structure of Films on Si
journal, April 2012
- Hellberg, C. Stephen; Andersen, Kristopher E.; Li, Hao
- Physical Review Letters, Vol. 108, Issue 16
Atomic structure of the interface between SrTiO3 thin films and Si(001) substrates
journal, September 2008
- Mi, Shao-Bo; Jia, Chun-Lin; Vaithyanathan, Venu
- Applied Physics Letters, Vol. 93, Issue 10
The classification of tilted octahedra in perovskites
journal, November 1972
- Glazer, A. M.
- Acta Crystallographica Section B Structural Crystallography and Crystal Chemistry, Vol. 28, Issue 11
Epitaxial lead titanate grown by MBE
journal, April 1997
- Theis, C. D.; Schlom, D. G.
- Journal of Crystal Growth, Vol. 174, Issue 1-4
Molecular beam epitaxy of SrTiO3 on Si (001): Early stages of the growth and strain relaxation
journal, August 2009
- Niu, G.; Saint-Girons, G.; Vilquin, B.
- Applied Physics Letters, Vol. 95, Issue 6
Growth and characterization of (111) and (001) oriented MgO films on (001) GaAs
journal, April 1993
- Tarsa, E. J.; De Graef, M.; Clarke, D. R.
- Journal of Applied Physics, Vol. 73, Issue 7
Domain wall nanoelectronics
journal, February 2012
- Catalan, G.; Seidel, J.; Ramesh, R.
- Reviews of Modern Physics, Vol. 84, Issue 1
Physics of thin-film ferroelectric oxides
journal, October 2005
- Dawber, M.; Rabe, K. M.; Scott, J. F.
- Reviews of Modern Physics, Vol. 77, Issue 4
Hysteretic electrical transport in BaTiO 3 /Ba 1− x Sr x TiO 3 /Ge heterostructures
journal, February 2014
- Ngai, J. H.; Kumah, D. P.; Ahn, C. H.
- Applied Physics Letters, Vol. 104, Issue 6
Design of ion-implanted MOSFET's with very small physical dimensions
journal, October 1974
- Dennard, R. H.; Gaensslen, F. H.; Rideout, V. L.
- IEEE Journal of Solid-State Circuits, Vol. 9, Issue 5
Characterization of a radio frequency plasma source for molecular beam epitaxial growth of high‐ T c superconductor films
journal, September 1992
- Locquet, Jean‐Pierre; Mächler, Erich
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 5
Nanoscale ferroelectrics: processing, characterization and future trends
journal, July 2006
- Gruverman, A.; Kholkin, A.
- Reports on Progress in Physics, Vol. 69, Issue 8
Strain relaxation in single crystal SrTiO 3 grown on Si (001) by molecular beam epitaxy
journal, March 2012
- Choi, Miri; Posadas, Agham; Dargis, Rytis
- Journal of Applied Physics, Vol. 111, Issue 6
Thermal stability of the SrTiO3∕(Ba,Sr)O stacks epitaxially grown on Si
journal, February 2006
- Marchiori, Chiara; Sousa, M.; Guiller, A.
- Applied Physics Letters, Vol. 88, Issue 7
High-sensitivity accelerometer composed of ultra-long vertically aligned barium titanate nanowire arrays
journal, November 2013
- Koka, Aneesh; Sodano, Henry A.
- Nature Communications, Vol. 4, Issue 1
Interface formation and defect structures in epitaxial La2Zr2O7 thin films on (111) Si
journal, December 2003
- Seo, J. W.; Fompeyrine, J.; Guiller, A.
- Applied Physics Letters, Vol. 83, Issue 25
Hetero-epitaxy of perovskite oxides on GaAs(001) by molecular beam epitaxy
journal, August 2004
- Liang, Y.; Kulik, J.; Eschrich, T. C.
- Applied Physics Letters, Vol. 85, Issue 7
Analysis of Growing Films of Complex Oxides by RHEED
journal, May 1995
- Bozovic, Ivan; Eckstein, J. N.
- MRS Bulletin, Vol. 20, Issue 5
Design of Ion-Implanted MOSFET's with Very Small Physical Dimensions
journal, January 2007
- Dennard, Robert H.; Gaensslen, Fritz H.; Yu, Hwa-Nien
- IEEE Solid-State Circuits Newsletter, Vol. 12, Issue 1
Molecular Beam Epitaxy
book, January 1996
- Herman, Marian A.; Sitter, Helmut
- Springer Series in Materials Science
Ionically-mediated electromechanical hysteresis in transition metal oxides
preprint, January 2011
- Kim, Yunseok; Morozovska, Anna N.; Kumar, Amit
- arXiv
Tuning of the depolarization field and nanodomain structure in ferroelectric thin films
text, January 2015
- Lichtensteiger, Céline; Fernandez-Pena, Stéphanie; Weymann, Christian
- arXiv
Physics of thin-film ferroelectric oxides
text, January 2005
- Dawber, M.; Rabe, K. M.; Scott, J. F.
- arXiv
The Impacts of Cation Stoichiometry and Substrate Surface Quality on Nucleation, Structure, Defect Formation, and Intermixing in Complex Oxide Heteroepitaxy-LaCrO 3 on SrTiO 3 (001)
journal, January 2013
- Qiao, L.; Zhang, K. H. L.; Bowden, M. E.
- Advanced Functional Materials, Vol. 23, Issue 23
Crystalline Oxides on Silicon
journal, April 2010
- Reiner, James W.; Kolpak, Alexie M.; Segal, Yaron
- Advanced Materials, Vol. 22, Issue 26-27
Highly Conductive SrVO 3 as a Bottom Electrode for Functional Perovskite Oxides
journal, May 2013
- Moyer, Jarrett A.; Eaton, Craig; Engel-Herbert, Roman
- Advanced Materials, Vol. 25, Issue 26
An Epitaxial Ferroelectric Tunnel Junction on Silicon
journal, September 2014
- Li, Zhipeng; Guo, Xiao; Lu, Hui-Bin
- Advanced Materials, Vol. 26, Issue 42
Emerging physics of oxide heterostructures
journal, June 2011
- Demkov, A. A.; Posadas, A.; Seo, H.
- physica status solidi (b)
Growth of SrTiO 3 on Si(001) by hybrid molecular beam epitaxy : Growth of SrTiO
journal, September 2014
- Zhang, Lei; Engel-Herbert, Roman
- physica status solidi (RRL) - Rapid Research Letters, Vol. 8, Issue 11
Fabrication of high-Tc superconductors using ozone-assisted molecular beam epitaxy
journal, August 1992
- Achutharaman, V. S.; Beauchamp, K. M.; Chandrasekhar, N.
- Thin Solid Films, Vol. 216, Issue 1
Molecular beam epitaxy
journal, January 1975
- Cho, A. Y.; Arthur, J. R.
- Progress in Solid State Chemistry, Vol. 10
On the route to epitaxial growth of YBa2Cu3O7 superconducting thin films by molecular beam epitaxy.
journal, June 1988
- Cabanel, R.; Hirtz, J. P.; Etienne, P.
- Physica C: Superconductivity, Vol. 153-155
Electric field induced superconductivity in an overdoped cuprate superconductor
journal, December 1994
- Matijasevic, V. C.; Bogers, S.; Chen, N. Y.
- Physica C: Superconductivity, Vol. 235-240
Epitaxial integration of perovskite-based multifunctional oxides on silicon
journal, May 2013
- Baek, Seung-Hyub; Eom, Chang-Beom
- Acta Materialia, Vol. 61, Issue 8
Growth and properties of GdTiO3 films prepared by hybrid molecular beam epitaxy
journal, September 2012
- Moetakef, Pouya; Ouellette, Daniel G.; Zhang, Jack Y.
- Journal of Crystal Growth, Vol. 355, Issue 1
Interface properties of MBE grown epitaxial oxides on GaAs
journal, September 2013
- Contreras-Guerrero, R.; Edirisooriya, M.; Noriega, O. C.
- Journal of Crystal Growth, Vol. 378
Growth and structural properties of crystalline LaAlO3 on Si (001)
journal, January 2008
- Reiner, J. W.; Posadas, A.; Wang, M.
- Microelectronic Engineering, Vol. 85, Issue 1
Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application
journal, July 2011
- Niu, G.; Yin, S.; Saint-Girons, G.
- Microelectronic Engineering, Vol. 88, Issue 7
Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
journal, April 2005
- Dubourdieu, C.; Roussel, H.; Jimenez, C.
- Materials Science and Engineering: B, Vol. 118, Issue 1-3
Advances in heteroepitaxy of oxides on silicon
journal, September 2004
- Yu, Z.; Liang, Y.; Overgaard, C.
- Thin Solid Films, Vol. 462-463
Hetero-epitaxy of SrTiO3 on Si and control of the interface
journal, June 2007
- Delhaye, G.; El Kazzi, M.; Gendry, M.
- Thin Solid Films, Vol. 515, Issue 16
Structural properties of epitaxial SrHfO3 thin films on Si (001)
journal, January 2010
- Sawkar-Mathur, Monica; Marchiori, Chiara; Fompeyrine, Jean
- Thin Solid Films, Vol. 518, Issue 6
Molecular beam epitaxy growth of BaTiO3 thin films and crucial impact of oxygen content conditions on the electrical characteristics
journal, May 2012
- Niu, G.; Gautier, B.; Yin, S.
- Thin Solid Films, Vol. 520, Issue 14
Molecular beam epitaxy of SrTiO3 on GaAs(001): GaAs surface treatment and structural characterization of the oxide layer
journal, July 2014
- Louahadj, L.; Bachelet, R.; Regreny, P.
- Thin Solid Films, Vol. 563
Use of Negative Capacitance to Provide Voltage Amplification for Low Power Nanoscale Devices
journal, February 2008
- Salahuddin, Sayeef; Datta, Supriyo
- Nano Letters, Vol. 8, Issue 2
Switchable Induced Polarization in LaAlO 3 /SrTiO 3 Heterostructures
journal, January 2012
- Bark, C. W.; Sharma, P.; Wang, Y.
- Nano Letters, Vol. 12, Issue 4
Domain Wall Geometry Controls Conduction in Ferroelectrics
journal, September 2012
- Vasudevan, R. K.; Morozovska, A. N.; Eliseev, E. A.
- Nano Letters, Vol. 12, Issue 11
Room-Temperature Negative Capacitance in a Ferroelectric–Dielectric Superlattice Heterostructure
journal, September 2014
- Gao, Weiwei; Khan, Asif; Marti, Xavi
- Nano Letters, Vol. 14, Issue 10
The Role of Electrochemical Phenomena in Scanning Probe Microscopy of Ferroelectric Thin Films
journal, June 2011
- Kalinin, Sergei V.; Jesse, Stephen; Tselev, Alexander
- ACS Nano, Vol. 5, Issue 7
The interface between silicon and a high-k oxide
journal, January 2004
- Först, Clemens J.; Ashman, Christopher R.; Schwarz, Karlheinz
- Nature, Vol. 427, Issue 6969
Creation of a two-dimensional electron gas at an oxide interface on silicon
journal, October 2010
- Park, J. W.; Bogorin, D. F.; Cen, C.
- Nature Communications, Vol. 1, Issue 1
High-sensitivity accelerometer composed of ultra-long vertically aligned barium titanate nanowire arrays
journal, November 2013
- Koka, Aneesh; Sodano, Henry A.
- Nature Communications, Vol. 4, Issue 1
Reversible nano-structuring of SrCrO3-δ through oxidation and reduction at low temperature
journal, August 2014
- Zhang, K. H. L.; Sushko, P. V.; Colby, R.
- Nature Communications, Vol. 5, Issue 1
Controlled stripes of ultrafine ferroelectric domains
journal, August 2014
- Feigl, Ludwig; Yudin, Petr; Stolichnov, Igor
- Nature Communications, Vol. 5, Issue 1
Carrier density modulation in a germanium heterostructure by ferroelectric switching
journal, January 2015
- Ponath, Patrick; Fredrickson, Kurt; Posadas, Agham B.
- Nature Communications, Vol. 6, Issue 1
Epitaxial SrTiO3 films with electron mobilities exceeding 30,000 cm2 V-1 s-1
journal, April 2010
- Son, Junwoo; Moetakef, Pouya; Jalan, Bharat
- Nature Materials, Vol. 9, Issue 6, p. 482-484
Switching of ferroelectric polarization in epitaxial BaTiO3 films on silicon without a conducting bottom electrode
journal, September 2013
- Dubourdieu, Catherine; Bruley, John; Arruda, Thomas M.
- Nature Nanotechnology, Vol. 8, Issue 10
Controlling domain wall motion in ferroelectric thin films
journal, January 2015
- McGilly, L. J.; Yudin, P.; Feigl, L.
- Nature Nanotechnology, Vol. 10, Issue 2
I n s i t u growth of DyBa 2 Cu 3 O 7− x thin films by molecular beam epitaxy
journal, May 1990
- Johnson, B. R.; Beauchamp, K. M.; Wang, T.
- Applied Physics Letters, Vol. 56, Issue 19
Epitaxial growth of MgO on GaAs(001) for growing epitaxial BaTiO 3 thin films by pulsed laser deposition
journal, March 1992
- Nashimoto, Keiichi; Fork, David K.; Geballe, Theodore H.
- Applied Physics Letters, Vol. 60, Issue 10
Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3
journal, September 1997
- Gill, D. M.; Conrad, C. W.; Ford, G.
- Applied Physics Letters, Vol. 71, Issue 13
Adsorption-controlled growth of Bi4Ti3O12 by reactive MBE
journal, June 1998
- Theis, C. D.; Yeh, J.; Schlom, D. G.
- Applied Physics Letters, Vol. 72, Issue 22
Abrupt PbTiO3/SrTiO3 superlattices grown by reactive molecular beam epitaxy
journal, May 1999
- Jiang, J. C.; Pan, X. Q.; Tian, W.
- Applied Physics Letters, Vol. 74, Issue 19
Field effect transistors with SrTiO3 gate dielectric on Si
journal, March 2000
- Eisenbeiser, K.; Finder, J. M.; Yu, Z.
- Applied Physics Letters, Vol. 76, Issue 10
The interface of epitaxial SrTiO3 on silicon: in situ and ex situ studies
journal, January 2003
- Hu, Xiaoming; Li, H.; Liang, Y.
- Applied Physics Letters, Vol. 82, Issue 2
Two-dimensional growth of high-quality strontium titanate thin films on Si
journal, April 2003
- Li, H.; Hu, X.; Wei, Y.
- Journal of Applied Physics, Vol. 93, Issue 8
Interface formation and defect structures in epitaxial La2Zr2O7 thin films on (111) Si
journal, December 2003
- Seo, J. W.; Fompeyrine, J.; Guiller, A.
- Applied Physics Letters, Vol. 83, Issue 25
Evolution of dislocation arrays in epitaxial BaTiO3 thin films grown on (100) SrTiO3
journal, April 2004
- Sun, H. P.; Tian, W.; Pan, X. Q.
- Applied Physics Letters, Vol. 84, Issue 17
Electronic properties of ferroelectric BaTiO3∕MgO capacitors on GaAs
journal, October 2004
- Murphy, T. E.; Chen, D.; Phillips, J. D.
- Applied Physics Letters, Vol. 85, Issue 15
Atomic structure of epitaxial SrTiO3–GaAs(001) heterojunctions
journal, October 2005
- Klie, R. F.; Zhu, Y.; Altman, E. I.
- Applied Physics Letters, Vol. 87, Issue 14
Solid phase epitaxy of SrTiO3 on (Ba,Sr)O∕Si(100): The relationship between oxygen stoichiometry and interface stability
journal, April 2006
- Norga, G. J.; Marchiori, C.; Rossel, C.
- Journal of Applied Physics, Vol. 99, Issue 8
Field-effect transistors with SrHfO3 as gate oxide
journal, July 2006
- Rossel, C.; Mereu, B.; Marchiori, C.
- Applied Physics Letters, Vol. 89, Issue 5
Structural properties of epitaxial SrTiO3 thin films grown by molecular beam epitaxy on Si(001)
journal, December 2006
- Delhaye, G.; Merckling, C.; El-Kazzi, M.
- Journal of Applied Physics, Vol. 100, Issue 12
Epitaxial LaAlO3 thin film on silicon: Structure and electronic properties
journal, April 2007
- Mi, Y. Y.; Yu, Z.; Wang, S. J.
- Applied Physics Letters, Vol. 90, Issue 18
Structural and dielectric properties of epitaxial SrTiO3 films grown directly on GaAs substrates by laser molecular beam epitaxy
journal, September 2008
- Wu, Z. P.; Huang, W.; Wong, K. H.
- Journal of Applied Physics, Vol. 104, Issue 5
Molecular beam epitaxy of SrTiO3 with a growth window
journal, July 2009
- Jalan, Bharat; Moetakef, Pouya; Stemmer, Susanne
- Applied Physics Letters, Vol. 95, Issue 3
Multidomain ferroelectricity as a limiting factor for voltage amplification in ferroelectric field-effect transistors
journal, September 2010
- Cano, A.; Jiménez, D.
- Applied Physics Letters, Vol. 97, Issue 13
The atomic structure and polarization of strained SrTiO3/Si
journal, December 2010
- Kumah, D. P.; Reiner, J. W.; Segal, Y.
- Applied Physics Letters, Vol. 97, Issue 25
Epitaxial integration of ferromagnetic correlated oxide LaCoO3 with Si (100)
journal, January 2011
- Posadas, A.; Berg, M.; Seo, H.
- Applied Physics Letters, Vol. 98, Issue 5
Molecular beam epitaxial growth of BaTiO3 single crystal on Ge-on-Si(001) substrates
journal, February 2011
- Merckling, C.; Saint-Girons, G.; Botella, C.
- Applied Physics Letters, Vol. 98, Issue 9
Strain relaxation in single crystal SrTiO 3 grown on Si (001) by molecular beam epitaxy
journal, March 2012
- Choi, Miri; Posadas, Agham; Dargis, Rytis
- Journal of Applied Physics, Vol. 111, Issue 6
Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy
journal, May 2000
- Zhao, Tong; Chen, Fan; Lu, Huibin
- Journal of Applied Physics, Vol. 87, Issue 10
In-plane dielectric properties of epitaxial Ba 0.7 Sr 0.3 TiO 3 thin films grown on GaAs for tunable device application
journal, September 2012
- Yang, Zhibin; Hao, Jianhua
- Journal of Applied Physics, Vol. 112, Issue 5
Surface composition of BaTiO3/SrTiO3(001) films grown by atomic oxygen plasma assisted molecular beam epitaxy
journal, December 2012
- Barbier, A.; Mocuta, C.; Stanescu, D.
- Journal of Applied Physics, Vol. 112, Issue 11
Electric field-tunable Ba x Sr 1− x TiO 3 films with high figures of merit grown by molecular beam epitaxy
journal, December 2012
- Mikheev, Evgeny; Kajdos, Adam P.; Hauser, Adam J.
- Applied Physics Letters, Vol. 101, Issue 25
Properties of epitaxial BaTiO 3 deposited on GaAs
journal, January 2013
- Contreras-Guerrero, R.; Veazey, J. P.; Levy, J.
- Applied Physics Letters, Vol. 102, Issue 1
Charge transfer in Sr Zintl template on Si(001)
journal, January 2013
- Choi, Miri; Posadas, Agham B.; Seo, Hosung
- Applied Physics Letters, Vol. 102, Issue 3
Optical absorption in epitaxial La1−xSrxFeO3 thin films
journal, February 2013
- Scafetta, M. D.; Xie, Y. J.; Torres, M.
- Applied Physics Letters, Vol. 102, Issue 8
Ultra-flat BaTiO 3 epitaxial films on Si(001) with large out-of-plane polarization
journal, March 2013
- Scigaj, M.; Dix, N.; Fina, I.
- Applied Physics Letters, Vol. 102, Issue 11
Wetting at the BaTiO 3 /Pt interface
journal, May 2013
- Fredrickson, Kurt D.; Posadas, Agham B.; Demkov, Alexander A.
- Journal of Applied Physics, Vol. 113, Issue 18
Ferroelectric Pb(Zr,Ti)O 3 epitaxial layers on GaAs
journal, November 2013
- Louahadj, L.; Le Bourdais, D.; Largeau, L.
- Applied Physics Letters, Vol. 103, Issue 21
Epitaxial c -axis oriented BaTiO 3 thin films on SrTiO 3 -buffered Si(001) by atomic layer deposition
journal, February 2014
- Ngo, Thong Q.; Posadas, Agham B.; McDaniel, Martin D.
- Applied Physics Letters, Vol. 104, Issue 8
Atomic and electronic structure of the ferroelectric BaTiO 3 /Ge(001) interface
journal, June 2014
- Fredrickson, Kurt D.; Ponath, Patrick; Posadas, Agham B.
- Applied Physics Letters, Vol. 104, Issue 24
Ferroelectric and ferromagnetic properties in BaTiO 3 thin films on Si (100)
journal, September 2014
- Singamaneni, Srinivasa Rao; Punugupati, Sandhyarani; Prater, John T.
- Journal of Applied Physics, Vol. 116, Issue 9
Structural study and ferroelectricity of epitaxial BaTiO 3 films on silicon grown by molecular beam epitaxy
journal, December 2014
- Mazet, L.; Bachelet, R.; Louahadj, L.
- Journal of Applied Physics, Vol. 116, Issue 21
Molecular beam epitaxy
journal, December 1985
- Joyce, B. A.
- Reports on Progress in Physics, Vol. 48, Issue 12
Antiferromagnetic LaFeO 3 thin films and their effect on exchange bias
journal, June 2008
- Seo, J. W.; Fullerton, E. E.; Nolting, F.
- Journal of Physics: Condensed Matter, Vol. 20, Issue 26
Controlling tetragonality and crystalline orientation in BaTiO 3 nano-layers grown on Si
journal, June 2013
- Abel, S.; Sousa, M.; Rossel, C.
- Nanotechnology, Vol. 24, Issue 28
A decade of piezoresponse force microscopy: progress, challenges, and opportunities
journal, December 2006
- Kalinin, Sergei; Rar, Andrei; Jesse, Stephen
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 53, Issue 12
Electromechanical Imaging and Spectroscopy of Ferroelectric and Piezoelectric Materials: State of the Art and Prospects for the Future
journal, August 2009
- Balke, Nina; Bdikin, Igor; Kalinin, Sergei V.
- Journal of the American Ceramic Society, Vol. 92, Issue 8
Mechanism of cleaning Si(100) surface using Sr or SrO for the growth of crystalline SrTiO[sub 3] films
journal, January 2002
- Wei, Yi; Hu, Xiaoming; Liang, Yong
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 4
Combined in-situ photoemission spectroscopy and density functional theory of the Sr Zintl template for oxide heteroepitaxy on Si(001)
journal, July 2013
- Seo, Hosung; Choi, Miri; Posadas, Agham B.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 4
Tunable electrical properties of TaN x thin films grown by ionized physical vapor deposition
journal, September 2014
- Choi, Miri; Dubourdieu, Catherine; Kellock, Andrew J.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 5
Characterization of a radio frequency plasma source for molecular beam epitaxial growth of high‐ T c superconductor films
journal, September 1992
- Locquet, Jean‐Pierre; Mächler, Erich
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 5
Augmented methods for growth and development of novel multi-cation oxides
conference, March 2014
- Yamamoto, Hideki; Krockenberger, Yoshiharu; Naito, Michio
- SPIE OPTO, SPIE Proceedings
A Ferroelectric Oxide Made Directly on Silicon
journal, April 2009
- Warusawithana, M. P.; Cen, C.; Sleasman, C. R.
- Science, Vol. 324, Issue 5925
Giant Piezoelectricity on Si for Hyperactive MEMS
journal, November 2011
- Baek, S. H.; Park, J.; Kim, D. M.
- Science, Vol. 334, Issue 6058
High-Temperature Superconducting Multilayers and Heterostructures Grown by Atomic Layer-By-Layer Molecular Beam Epitaxy
journal, August 1995
- Eckstein, J. N.; Bozovic, I.
- Annual Review of Materials Science, Vol. 25, Issue 1
125 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes
journal, January 2013
- Chen, Li; Wood, Michael G.; Reano, Ronald M.
- Optics Express, Vol. 21, Issue 22
Towards precise defect control in layered oxide structures by using oxide molecular beam epitaxy
journal, January 2014
- Baiutti, Federico; Christiani, Georg; Logvenov, Gennady
- Beilstein Journal of Nanotechnology, Vol. 5
Experimental Evidence of Ferroelectric Negative Capacitance in Nanoscale Heterostructures
text, January 2011
- Khan, Asif Islam; Bhowmik, Debanjan; Yu, Pu
- arXiv
Ionically-mediated electromechanical hysteresis in transition metal oxides
preprint, January 2011
- Kim, Yunseok; Morozovska, Anna N.; Kumar, Amit
- arXiv
Hysteretic electrical transport in BaTiO$_3$/Ba$_{1-x}$Sr$_x$TiO$_3$/Ge heterostructures
text, January 2013
- Ngai, J. H.; Kumah, D. P.; Ahn, C. H.
- arXiv
Converse flexoelectricity around ferroelastic domain walls
preprint, January 2019
- Wang, Y. J.; Tang, Y. L.; Zhu, Y. L.
- arXiv
Physics of thin-film ferroelectric oxides
text, January 2005
- Dawber, M.; Rabe, K. M.; Scott, J. F.
- arXiv
Ferroelectricity in ultra-thin perovskite films
text, January 2005
- Sai, Na; Kolpak, Alexie M.; Rappe, Andrew M.
- arXiv
Works referencing / citing this record:
Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices
journal, July 2019
- Kumah, Divine P.; Ngai, Joseph H.; Kornblum, Lior
- Advanced Functional Materials
Mixed electrochemical–ferroelectric states in nanoscale ferroelectrics
journal, May 2017
- Yang, Sang Mo; Morozovska, Anna N.; Kumar, Rajeev
- Nature Physics, Vol. 13, Issue 8
Ferroelectric negative capacitance
journal, March 2019
- Íñiguez, Jorge; Zubko, Pavlo; Luk’yanchuk, Igor
- Nature Reviews Materials, Vol. 4, Issue 4
Interfacial structure of SrZr x Ti 1− x O 3 films on Ge
journal, November 2018
- Chen, Tongjie; Ahmadi-Majlan, Kamyar; Lim, Zheng Hui
- Applied Physics Letters, Vol. 113, Issue 20
Atomic layer deposition of epitaxial ferroelectric barium titanate on Si(001) for electronic and photonic applications
journal, August 2019
- Lin, Edward L.; Posadas, Agham B.; Zheng, Lu
- Journal of Applied Physics, Vol. 126, Issue 6
Traps induced Greens function based mathematical modeling for BaTiO 3 –SrTiO 3 gate stack dual metal GAA MOSFET
journal, October 2019
- Gauba, Tushar; Pratap, Yogesh; Rewari, Sonam
- Semiconductor Science and Technology, Vol. 34, Issue 11
Epitaxial growth of (111) BaTiO3 thin films on (0002) GaN substrates with SrTiO3/TiN buffer layers
journal, April 2019
- Jia, Shasha; Li, Xiaomin; Li, Guanjie
- Journal of Materials Science: Materials in Electronics, Vol. 30, Issue 10
van der Waals epitaxy of highly (111)-oriented BaTiO 3 on MXene
journal, January 2019
- Bennett-Jackson, Andrew L.; Falmbigl, Matthias; Hantanasirisakul, Kanit
- Nanoscale, Vol. 11, Issue 2
Strain-dependence of χ(2) in thin film barium strontium titanate
journal, February 2019
- Foster, Natalie D.; Edmondson, Bryce I.; Ekerdt, John G.
- AIP Advances, Vol. 9, Issue 2
Bragg coherent diffractive imaging of strain at the nanoscale
journal, March 2019
- Karpov, Dmitry; Fohtung, Edwin
- Journal of Applied Physics, Vol. 125, Issue 12
Enhanced in-plane ferroelectricity in BaTiO 3 thin films fabricated by aqueous chemical solution deposition
journal, October 2018
- Raeder, T. M.; Bakken, K.; Glaum, J.
- AIP Advances, Vol. 8, Issue 10
Interfacial Structure of SrZr$_{x}$Ti$_{1-x}$O$_3$ films on Ge
text, January 2018
- Chen, Tongjie; Ahmadi-Majlan, Kamyar; Lim, Zheng Hui
- arXiv