Efficiency of a multilayer-Laue-lens with a 102 μm aperture
Abstract
A multilayer-Laue-lens (MLL) comprised of WSi2/Al layers stacked to a full thickness of 102 microns was characterized for its diffraction efficiency and dynamical diffraction properties by x-ray measurements made in the far field. The achieved aperture roughly doubles the previous maximum reported aperture for an MLL, thereby doubling the working distance. Negative and positive first orders were found to have 14.2 % and 13.0 % efficiencies, respectively. A section thickness of 9.6 μm was determined from Laue-case thickness fringes in the diffraction data. A background gas consisting of 90 % Ar and 10 % N2 was used for sputtering. This material system was chosen to reduce grown-in stress as the multilayer is deposited. Although some regions of the full MLL exhibited defects, the presently reported results were obtained for a region devoid of defects. The data compare well to dynamical diffraction calculations with Coupled Wave Theory (CWT) which provided confirmation of the optical constants and densities assumed for the CWT calculations.
- Authors:
-
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source; Fraunhofer IWS Dresden (Germany)
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source; Brookhaven National Lab. (BNL), Upton, NY (United States)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1239773
- Alternate Identifier(s):
- OSTI ID: 1229639
- Report Number(s):
- BNL-108332-2015-JA
Journal ID: ISSN 0003-6951; APPLAB; R&D Project: LS001
- Grant/Contract Number:
- SC00112704; AC-02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 107; Journal Issue: 8; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Macrander, Albert T., Kubec, Adam, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Wojcik, Michael, and Maser, Jorg. Efficiency of a multilayer-Laue-lens with a 102 μm aperture. United States: N. p., 2015.
Web. doi:10.1063/1.4929505.
Macrander, Albert T., Kubec, Adam, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Wojcik, Michael, & Maser, Jorg. Efficiency of a multilayer-Laue-lens with a 102 μm aperture. United States. https://doi.org/10.1063/1.4929505
Macrander, Albert T., Kubec, Adam, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Wojcik, Michael, and Maser, Jorg. Tue .
"Efficiency of a multilayer-Laue-lens with a 102 μm aperture". United States. https://doi.org/10.1063/1.4929505. https://www.osti.gov/servlets/purl/1239773.
@article{osti_1239773,
title = {Efficiency of a multilayer-Laue-lens with a 102 μm aperture},
author = {Macrander, Albert T. and Kubec, Adam and Conley, Raymond and Bouet, Nathalie and Zhou, Juan and Wojcik, Michael and Maser, Jorg},
abstractNote = {A multilayer-Laue-lens (MLL) comprised of WSi2/Al layers stacked to a full thickness of 102 microns was characterized for its diffraction efficiency and dynamical diffraction properties by x-ray measurements made in the far field. The achieved aperture roughly doubles the previous maximum reported aperture for an MLL, thereby doubling the working distance. Negative and positive first orders were found to have 14.2 % and 13.0 % efficiencies, respectively. A section thickness of 9.6 μm was determined from Laue-case thickness fringes in the diffraction data. A background gas consisting of 90 % Ar and 10 % N2 was used for sputtering. This material system was chosen to reduce grown-in stress as the multilayer is deposited. Although some regions of the full MLL exhibited defects, the presently reported results were obtained for a region devoid of defects. The data compare well to dynamical diffraction calculations with Coupled Wave Theory (CWT) which provided confirmation of the optical constants and densities assumed for the CWT calculations.},
doi = {10.1063/1.4929505},
journal = {Applied Physics Letters},
number = 8,
volume = 107,
place = {United States},
year = {Tue Aug 25 00:00:00 EDT 2015},
month = {Tue Aug 25 00:00:00 EDT 2015}
}
Web of Science
Works referenced in this record:
Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens
journal, January 2015
- Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie
- Optics Express, Vol. 23, Issue 10
Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens
journal, June 2008
- Kang, Hyon Chol; Yan, Hanfei; Winarski, Robert P.
- Applied Physics Letters, Vol. 92, Issue 22
Optical Properties of MoSi 2 /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device
journal, October 2008
- Koyama, Takahisa; Ichimaru, Satoshi; Tsuji, Takuya
- Applied Physics Express, Vol. 1
High-efficiency diffractive x-ray optics from sectioned multilayers
journal, April 2005
- Kang, H. C.; Stephenson, G. B.; Liu, C.
- Applied Physics Letters, Vol. 86, Issue 15
Development of Multilayer Laue Lenses; (1) Linear Type
conference, January 2011
- Koyama, T.; Takenaka, H.; Ichimaru, S.
- THE 10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, AIP Conference Proceedings
Multilayer Laue lenses as high-resolution x-ray optics
conference, November 2004
- Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan
- Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
Performance of single-photon-counting PILATUS detector modules
journal, April 2009
- Kraft, P.; Bergamaschi, A.; Broennimann, Ch.
- Journal of Synchrotron Radiation, Vol. 16, Issue 3
Performance of a double-multilayer monochromator at Beamline 2-BM at the Advanced Photon Source
journal, March 2002
- Chu, Y. S.; Liu, C.; Mancini, D. C.
- Review of Scientific Instruments, Vol. 73, Issue 3
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses
journal, January 2011
- Yan, Hanfei; Rose, Volker; Shu, Deming
- Optics Express, Vol. 19, Issue 16
Wedged multilayer Laue lens
journal, May 2008
- Conley, Ray; Liu, Chian; Qian, Jun
- Review of Scientific Instruments, Vol. 79, Issue 5
Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer
journal, November 2014
- Niese, Sven; Krüger, Peter; Kubec, Adam
- Thin Solid Films, Vol. 571
Coupled wave description of the diffraction by zone plates with high aspect ratios
journal, May 1992
- Maser, Jörg; Schmahl, Günter
- Optics Communications, Vol. 89, Issue 2-4
Hard x-ray nanofocusing by multilayer Laue lenses
journal, June 2014
- Yan, Hanfei; Conley, Ray; Bouet, Nathalie
- Journal of Physics D: Applied Physics, Vol. 47, Issue 26
Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging
journal, May 2010
- Jahedi, N.; Conley, R.; Shi, B.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
NIH Image to ImageJ: 25 years of image analysis
journal, June 2012
- Schneider, Caroline A.; Rasband, Wayne S.; Eliceiri, Kevin W.
- Nature Methods, Vol. 9, Issue 7
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993
- Henke, B. L.; Gullikson, E. M.; Davis, J. C.
- Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
Sectioning of multilayers to make a multilayer Laue lens
journal, January 2007
- Kang, Hyon Chol; Stephenson, G. Brian; Liu, Chian
- Review of Scientific Instruments, Vol. 78, Issue 4
Multilayer growth in the APS rotary deposition system
conference, September 2007
- Conley, Ray; Liu, Chian; Kewish, Cameron M.
- Optical Engineering + Applications, SPIE Proceedings
Ptychography with multilayer Laue lenses
journal, August 2014
- Kubec, Adam; Braun, Stefan; Niese, Sven
- Journal of Synchrotron Radiation, Vol. 21, Issue 5
Works referencing / citing this record:
Interlaced zone plate optics for hard X-ray imaging in the 10 nm range
journal, March 2017
- Mohacsi, Istvan; Vartiainen, Ismo; Rösner, Benedikt
- Scientific Reports, Vol. 7, Issue 1
Multilayer Laue Lens: A Brief History and Current Status
journal, July 2016
- Conley, Ray; Bouet, Nathalie; Chu, Yong S.
- Synchrotron Radiation News, Vol. 29, Issue 4