Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts
Abstract
Vertically aligned, untangled planarized arrays of multiwall carbon nanotubes (MWNTs) with Ohmic back contacts were grown in nanopore templates on arbitrary substrates. The templates were prepared by sputter depositing Nd-doped Al films onto W-coated substrates, followed by anodization to form an aluminum oxide nanopore array. The W underlayer helps eliminate the aluminum oxide barrier that typically occurs at the nanopore bottoms by instead forming a thin WO3 layer. The WO3 can be selectively etched to enable electrodeposition of Co catalysts with control over the Co site density. This led to control of the site density of MWNTs grown by thermal chemical vapor deposition, with the W also serving as a back electrical contact. As a result, Ohmic contact to MWNTs was confirmed, even following ultrasonic cutting of the entire array to a uniform height.
- Authors:
-
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1235254
- Report Number(s):
- SAND-2014-17681J
Journal ID: ISSN 0884-2914; applab; PII: S0884291414003598
- Grant/Contract Number:
- AC04-94AL85000
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Materials Research
- Additional Journal Information:
- Journal Volume: 30; Journal Issue: 02; Journal ID: ISSN 0884-2914
- Publisher:
- Materials Research Society
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Rochford, C., Limmer, S. J., Howell, S. W., Beechem, T. E., and Siegal, M. P. Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts. United States: N. p., 2014.
Web. doi:10.1557/jmr.2014.359.
Rochford, C., Limmer, S. J., Howell, S. W., Beechem, T. E., & Siegal, M. P. Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts. United States. https://doi.org/10.1557/jmr.2014.359
Rochford, C., Limmer, S. J., Howell, S. W., Beechem, T. E., and Siegal, M. P. Wed .
"Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts". United States. https://doi.org/10.1557/jmr.2014.359. https://www.osti.gov/servlets/purl/1235254.
@article{osti_1235254,
title = {Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts},
author = {Rochford, C. and Limmer, S. J. and Howell, S. W. and Beechem, T. E. and Siegal, M. P.},
abstractNote = {Vertically aligned, untangled planarized arrays of multiwall carbon nanotubes (MWNTs) with Ohmic back contacts were grown in nanopore templates on arbitrary substrates. The templates were prepared by sputter depositing Nd-doped Al films onto W-coated substrates, followed by anodization to form an aluminum oxide nanopore array. The W underlayer helps eliminate the aluminum oxide barrier that typically occurs at the nanopore bottoms by instead forming a thin WO3 layer. The WO3 can be selectively etched to enable electrodeposition of Co catalysts with control over the Co site density. This led to control of the site density of MWNTs grown by thermal chemical vapor deposition, with the W also serving as a back electrical contact. As a result, Ohmic contact to MWNTs was confirmed, even following ultrasonic cutting of the entire array to a uniform height.},
doi = {10.1557/jmr.2014.359},
journal = {Journal of Materials Research},
number = 02,
volume = 30,
place = {United States},
year = {Wed Nov 26 00:00:00 EST 2014},
month = {Wed Nov 26 00:00:00 EST 2014}
}
Web of Science
Works referenced in this record:
Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown
journal, April 2001
- Collins, Philip G.; Arnold, Michael S.; Avouris, Phaedon
- Science, Vol. 292, Issue 5517, p. 706-709
Electrochemical Deposition of Bi 2 (Te,Se) 3 Nanowire Arrays on Si
journal, January 2012
- Limmer, Steven J.; Yelton, W. Graham; Siegal, Michael P.
- Journal of The Electrochemical Society, Vol. 159, Issue 4
Preparation of Aligned Carbon Nanotubes with Prescribed Dimensions: Template Synthesis and Sonication Cutting Approach
journal, April 2002
- Jeong, Soo-Hwan; Lee, Ok-Joo; Lee, Kun-Hong
- Chemistry of Materials, Vol. 14, Issue 4
Carbon nanotubes for electronics manufacturing and packaging: from growth to integration
journal, March 2013
- Liu, Johan; Jiang, Di; Fu, Yifeng
- Advances in Manufacturing, Vol. 1, Issue 1
Effect of Graphitization on the Wettability and Electrical Conductivity of CVD-Carbon Nanotubes and Films
journal, May 2006
- Mattia, D.; Rossi, M. P.; Kim, B. M.
- The Journal of Physical Chemistry B, Vol. 110, Issue 20
Template-based carbon nanotubes and their application to a field emitter
journal, April 2001
- Jeong, Soo-Hwan; Hwang, Hee-Young; Lee, Kun-Hong
- Applied Physics Letters, Vol. 78, Issue 14
Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties
journal, January 1999
- Fan, Shoushan; Chapline, Michael G.; Franklin, Nathan R.
- Science, Vol. 283, Issue 5401, p. 512-514
Field emission from carbon nanotubes and its application to electron sources
journal, January 2000
- Saito, Yahachi; Uemura, Sashiro
- Carbon, Vol. 38, Issue 2
Linear Behavior of Carbon Nanotube Diameters with Growth Temperature
journal, August 2010
- Siegal, Michael P.; Overmyer, Donald L.; Provencio, Paula P.
- The Journal of Physical Chemistry C, Vol. 114, Issue 35
Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass
journal, November 1998
- Ren, Z. F.
- Science, Vol. 282, Issue 5391
Preparation of Free-Standing Nanowire Arrays on Conductive Substrates
journal, December 2004
- Liang, Yongqi; Zhen, Changgua; Zou, Dechun
- Journal of the American Chemical Society, Vol. 126, Issue 50
Highly-ordered carbon nanotube arrays for electronics applications
journal, July 1999
- Li, J.; Papadopoulos, C.; Xu, J. M.
- Applied Physics Letters, Vol. 75, Issue 3
Phonons in carbon nanotubes
journal, September 2000
- Dresselhaus, M. S.; Eklund, P. C.
- Advances in Physics, Vol. 49, Issue 6
Pulsed electrodeposition into AAO templates for CVD growth of carbon nanotube arrays
journal, June 2005
- Sklar, G. P.; Paramguru, K.; Misra, M.
- Nanotechnology, Vol. 16, Issue 8
99.9% purity multi-walled carbon nanotubes by vacuum high-temperature annealing
journal, January 2003
- Huang, Wei; Wang, Yao; Luo, Guohua
- Carbon, Vol. 41, Issue 13, p. 2585-2590
Precise control of multiwall carbon nanotube diameters using thermal chemical vapor deposition
journal, March 2002
- Siegal, M. P.; Overmyer, D. L.; Provencio, P. P.
- Applied Physics Letters, Vol. 80, Issue 12
WSXM : A software for scanning probe microscopy and a tool for nanotechnology
journal, January 2007
- Horcas, I.; Fernández, R.; Gómez-Rodríguez, J. M.
- Review of Scientific Instruments, Vol. 78, Issue 1
Highly ordered two-dimensional carbon nanotube arrays
journal, October 1999
- Suh, Jung Sang; Lee, Jin Seung
- Applied Physics Letters, Vol. 75, Issue 14
Recrystallized Arrays of Bismuth Nanowires with Trigonal Orientation
journal, March 2014
- Limmer, Steven J.; Yelton, W. Graham; Erickson, Kristopher J.
- Nano Letters, Vol. 14, Issue 4
Preparation of high yield multi-walled carbon nanotubes by microwave plasma chemical vapor deposition at low temperature
journal, January 2002
- Chen, Mi; Chen, Chieng-Ming; Chen, Chia-Fu
- Journal of Materials Science, Vol. 37, Issue 17, p. 3561-3567
Controlling the site density of multiwall carbon nanotubes via growth conditions
journal, June 2004
- Siegal, M. P.; Overmyer, D. L.; Kaatz, F. H.
- Applied Physics Letters, Vol. 84, Issue 25
Packing Density Control of Aligned Carbon Nanotubes
journal, October 2002
- Jeong, Soo-Hwan; Lee, Ok-Joo; Lee, Kun-Hong
- Chemistry of Materials, Vol. 14, Issue 10
Low temperature growth of multi-wall carbon nanotubes assisted by mesh potential using a modified plasma enhanced chemical vapor deposition system
journal, November 2001
- Kang, H. S.; Yoon, H. J.; Kim, C. O.
- Chemical Physics Letters, Vol. 349, Issue 3-4
Fabrication of the aligned and patterned carbon nanotube field emitters using the anodic aluminum oxide nano-template on a Si wafer
journal, September 2003
- Jeong, Soo-Hwan; Lee, Kun-Hong
- Synthetic Metals, Vol. 139, Issue 2
Growth of Carbon Nanotubes on Anodic Aluminum Oxide Templates: Fabrication of a Tube-in-Tube and Linearly Joined Tube
journal, July 2001
- Lee, Jin Seung; Gu, Geun Hoi; Kim, Hoseong
- Chemistry of Materials, Vol. 13, Issue 7
Growth control of single and multi-walled carbon nanotubes by thin film catalyst
journal, November 2002
- Joon Yoon, Young; Cheol Bae, Jun; Koo Baik, Hong
- Chemical Physics Letters, Vol. 366, Issue 1-2
Selective Barrier Perforation in Porous Alumina Anodized on Substrates
journal, April 2008
- Oh, Jihun; Thompson, Carl V.
- Advanced Materials, Vol. 20, Issue 7
Carbon nanotube array-based biosensor
journal, January 2003
- Sotiropoulou, Sofia; Chaniotakis, Nikolas A.
- Analytical and Bioanalytical Chemistry, Vol. 375, Issue 1
Field emission of carbon nanotubes on anodic aluminum oxide template with controlled tube density
journal, March 2005
- Chen, Po-Lin; Chang, Jun-Kai; Kuo, Cheng-Tzu
- Applied Physics Letters, Vol. 86, Issue 12
Low-temperature growth of multi-walled carbon nanotubes by thermal CVD: Low-temperature growth of multi-walled carbon nanotubes by thermal CVD
journal, August 2011
- Halonen, Niina; Sápi, András; Nagy, László
- physica status solidi (b), Vol. 248, Issue 11
Works referencing / citing this record:
Electrical and morphological behavior of carbon nanotubes synthesized within porous anodic alumina templates
journal, September 2018
- Sacco, Leandro; Florea, Ileana; Châtelet, Marc
- Journal of Physics: Materials, Vol. 1, Issue 1
Visible- and solar-blind photodetectors using AlGaN high electron mobility transistors with a nanodot-based floating gate
journal, January 2019
- Armstrong, Andrew M.; Klein, Brianna A.; Allerman, Andrew A.
- Photonics Research, Vol. 7, Issue 6