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Title: Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts

Abstract

Vertically aligned, untangled planarized arrays of multiwall carbon nanotubes (MWNTs) with Ohmic back contacts were grown in nanopore templates on arbitrary substrates. The templates were prepared by sputter depositing Nd-doped Al films onto W-coated substrates, followed by anodization to form an aluminum oxide nanopore array. The W underlayer helps eliminate the aluminum oxide barrier that typically occurs at the nanopore bottoms by instead forming a thin WO3 layer. The WO3 can be selectively etched to enable electrodeposition of Co catalysts with control over the Co site density. This led to control of the site density of MWNTs grown by thermal chemical vapor deposition, with the W also serving as a back electrical contact. As a result, Ohmic contact to MWNTs was confirmed, even following ultrasonic cutting of the entire array to a uniform height.

Authors:
 [1];  [1];  [1];  [1];  [1]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1235254
Report Number(s):
SAND-2014-17681J
Journal ID: ISSN 0884-2914; applab; PII: S0884291414003598
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Materials Research
Additional Journal Information:
Journal Volume: 30; Journal Issue: 02; Journal ID: ISSN 0884-2914
Publisher:
Materials Research Society
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Rochford, C., Limmer, S. J., Howell, S. W., Beechem, T. E., and Siegal, M. P. Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts. United States: N. p., 2014. Web. doi:10.1557/jmr.2014.359.
Rochford, C., Limmer, S. J., Howell, S. W., Beechem, T. E., & Siegal, M. P. Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts. United States. https://doi.org/10.1557/jmr.2014.359
Rochford, C., Limmer, S. J., Howell, S. W., Beechem, T. E., and Siegal, M. P. Wed . "Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts". United States. https://doi.org/10.1557/jmr.2014.359. https://www.osti.gov/servlets/purl/1235254.
@article{osti_1235254,
title = {Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts},
author = {Rochford, C. and Limmer, S. J. and Howell, S. W. and Beechem, T. E. and Siegal, M. P.},
abstractNote = {Vertically aligned, untangled planarized arrays of multiwall carbon nanotubes (MWNTs) with Ohmic back contacts were grown in nanopore templates on arbitrary substrates. The templates were prepared by sputter depositing Nd-doped Al films onto W-coated substrates, followed by anodization to form an aluminum oxide nanopore array. The W underlayer helps eliminate the aluminum oxide barrier that typically occurs at the nanopore bottoms by instead forming a thin WO3 layer. The WO3 can be selectively etched to enable electrodeposition of Co catalysts with control over the Co site density. This led to control of the site density of MWNTs grown by thermal chemical vapor deposition, with the W also serving as a back electrical contact. As a result, Ohmic contact to MWNTs was confirmed, even following ultrasonic cutting of the entire array to a uniform height.},
doi = {10.1557/jmr.2014.359},
journal = {Journal of Materials Research},
number = 02,
volume = 30,
place = {United States},
year = {Wed Nov 26 00:00:00 EST 2014},
month = {Wed Nov 26 00:00:00 EST 2014}
}

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