Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source

Yamazoe, Kenji; Mochi, Iacopo; Goldberg, Kenneth A.

doi:10.1364/JOSAA.31.000B34

Title: Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source

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Abstract

The wavefront retrieval by gradient descent algorithm that is typically applied to coherent or incoherent imaging is extended to retrieve a wavefront from a series of through-focus images by partially coherent illumination. For accurate retrieval, we modeled partial coherence as well as object transmittance into the gradient descent algorithm. However, this modeling increases the computation time due to the complexity of partially coherent imaging simulation that is repeatedly used in the optimization loop. To accelerate the computation, we incorporate not only the Fourier transform but also an eigenfunction decomposition of the image. As a demonstration, the extended algorithm is applied to retrieve a field-dependent wavefront of a microscope operated at extreme ultraviolet wavelength (13.4 nm). The retrieved wavefront qualitatively matches the expected characteristics of the lens design.

Authors:

Yamazoe, Kenji ^[1]; Mochi, Iacopo ^[2]; Goldberg, Kenneth A. ^[2]

Canon USA Inc., Cambridge, MA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Publication Date:: Mon Dec 01 00:00:00 EST 2014

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC)

OSTI Identifier:: 1170607

Alternate Identifier(s):: OSTI ID: 1222340

Report Number(s):: LBNL-6932E
Journal ID: ISSN 1084-7529; JOAOD6

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Accepted Manuscript

Journal Name:: Journal of the Optical Society of America. A, Optics, Image Science, and Vision

Additional Journal Information:: Journal Volume: 31; Journal Issue: 12; Journal ID: ISSN 1084-7529

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 97 MATHEMATICS AND COMPUTING

Citation Formats


                    Yamazoe, Kenji, Mochi, Iacopo, and Goldberg, Kenneth A. Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source.  United States: N. p., 2014. 
Web.  doi:10.1364/JOSAA.31.000B34.

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                    Yamazoe, Kenji, Mochi, Iacopo, & Goldberg, Kenneth A. Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source.  United States.  https://doi.org/10.1364/JOSAA.31.000B34

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                    Yamazoe, Kenji, Mochi, Iacopo, and Goldberg, Kenneth A. Mon .  
"Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source".  United States.  https://doi.org/10.1364/JOSAA.31.000B34.  https://www.osti.gov/servlets/purl/1170607.

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@article{osti_1170607,

  title        = {Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source},

  author       = {Yamazoe, Kenji and Mochi, Iacopo and Goldberg, Kenneth A.},

  abstractNote = {The wavefront retrieval by gradient descent algorithm that is typically applied to coherent or incoherent imaging is extended to retrieve a wavefront from a series of through-focus images by partially coherent illumination. For accurate retrieval, we modeled partial coherence as well as object transmittance into the gradient descent algorithm. However, this modeling increases the computation time due to the complexity of partially coherent imaging simulation that is repeatedly used in the optimization loop. To accelerate the computation, we incorporate not only the Fourier transform but also an eigenfunction decomposition of the image. As a demonstration, the extended algorithm is applied to retrieve a field-dependent wavefront of a microscope operated at extreme ultraviolet wavelength (13.4 nm). The retrieved wavefront qualitatively matches the expected characteristics of the lens design.},

  doi          = {10.1364/JOSAA.31.000B34},

  journal      = {Journal of the Optical Society of America. A, Optics, Image Science, and Vision},

  number       = 12,

  volume       = 31,

  place        = {United States},

  year         = {Mon Dec 01 00:00:00 EST 2014},

  month        = {Mon Dec 01 00:00:00 EST 2014}

}

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