Full-film dry transfer of MBE-grown van der Waals materials

Li, Ziling; Zhou, Wenyi; Swann, Matthew; Vorona, Vika; Scott, Haley; Kawakami, Roland K.

doi:10.1088/2053-1583/adc611

Title: Full-film dry transfer of MBE-grown van der Waals materials

Journal Article · 06 April 2025 · 2D Materials

DOI: https://doi.org/10.1088/2053-1583/adc611 · OSTI ID:2549523

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Abstract Molecular beam epitaxy (MBE) has been used to create high-quality, large-scale two-dimensional van der Waals (2D vdW) materials. However, due to the strong adhesion between the substrate and deposited materials, the peel-off and dry transfer of MBE-grown vdW films onto other substrates has been challenging. This limits the study and use of MBE films for heterogeneous integration including stacked and twisted heterostructures. In this work, we develop a polymer-assisted dry transfer method and successfully perform full-film transfer of various MBE-grown 2D vdW materials including transition metal dichalcogenides, topological insulators and 2D magnets. In particular, we transfer air-sensitive 2D magnets, characterize their magnetic properties, and compare them with as-grown materials. The results show that the transfer technique does not degrade the magnetic properties, with the Curie temperature and hysteresis loops exhibiting similar behaviors after the transfer. Our results enable further development of heterogeneous integration of 2D vdW materials based on MBE growth.

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Sponsoring Organization:: USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-76SF00515; SC0016379

OSTI ID:: 2549523

Journal Information:: 2D Materials, Journal Name: 2D Materials Journal Issue: 3 Vol. 12; ISSN 2053-1583

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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