DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Epitaxial integration of superconducting nitrides with cubic GaN

Journal Article · · APL Materials
DOI: https://doi.org/10.1063/5.0250514 · OSTI ID:2528118
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1];  [2]; ORCiD logo [1];  [1]; ORCiD logo [3]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]
  1. Idaho National Laboratory (INL), Idaho Falls, ID (United States)
  2. Idaho National Laboratory (INL), Idaho Falls, ID (United States); Boise State University, ID (United States)
  3. Tufts University, Medford, MA (United States)

Epitaxial combination of transition metal nitrides and group III-nitrides holds significant potential for novel device architectures, given their wide array of properties and similar lattice constants. However, the mixture of hexagonal and cubic crystals limits structural quality and has stymied development. This work will discuss the molecular beam epitaxy synthesis of metastable cubic GaN on 3C-SiC templates and its integration with cubic ZrN and NbN superconductors in single and multilayer heterostructures. The fully cubic nature of GaN and the epitaxial nature of all layers are confirmed via in situ and ex situ techniques. The electrical transport properties of transition metal nitrides on cubic GaN (001) are compared to those grown directly on 3C-SiC (001) and c-plane hexagonal GaN templates. The determination of a similar growth window for cubic wide-bandgap and superconducting metal nitrides creates a platform for new epitaxial device architectures and potential applications in metamaterials, quantum information science, and condensed matter physics.

Research Organization:
Idaho National Laboratory (INL), Idaho Falls, ID (United States)
Sponsoring Organization:
NSF Graduate Research Fellowship Program (GRFP); USDOE; USDOE Laboratory Directed Research and Development (LDRD) Program
Grant/Contract Number:
AC07-05ID14517
OSTI ID:
2528118
Report Number(s):
INL/JOU--25-84949-Rev000
Journal Information:
APL Materials, Journal Name: APL Materials Journal Issue: 3 Vol. 13; ISSN 2166-532X
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (39)

Molecular Beam Epitaxy of Transition Metal Nitrides for Superconducting Device Applications journal November 2019
Joint Raman spectroscopy and HRXRD investigation of cubic gallium nitride layers grown on 3C-SiC journal January 2016
Polarity Inversion of GaN via AlN Oxidation Interlayer Using Metal–Organic Vapor Phase Epitaxy journal March 2023
Optical and electrical properties of sputtered ZrN compounds journal March 2004
Microstructural and electrical characteristics of reactively sputtered ZrNx thin films journal June 2009
N concentration effects on structure and superconductivity of NbN thin films journal January 2021
Growth and characterization of ferromagnetic cubic GaCrN: Structural and magnetic properties journal April 2007
Free-standing zinc-blende (cubic) GaN layers and substrates journal August 2008
In situ measurements of the critical thickness for strain relaxation in β-GaN/MgO structures journal February 2009
GdN (111) heteroepitaxy on GaN (0001) by N2 plasma and NH3 molecular beam epitaxy journal February 2009
GaN growth on (0 0 1) and (1 1 0) MgO under different Ga/N ratios by MBE journal July 2022
Effects of Mg incorporation in cubic GaN films grown by PAMBE near Ga rich conditions journal April 2019
Growth and characterization of Mn-doped cubic-GaN journal April 2006
Pronounced Enhancement of Superconductivity in ZrN via Strain Engineering journal February 2021
GaN/NbN epitaxial semiconductor/superconductor heterostructures journal March 2018
Spin-filter Josephson junctions journal September 2011
π phase shifter based on NbN-based ferromagnetic Josephson junction on a silicon substrate journal August 2020
Cubic GaN epilayers grown by molecular beam epitaxy on thin β-SiC/Si (001) substrates journal March 2000
In situ growth regime characterization of cubic GaN using reflection high energy electron diffraction journal January 2007
Transient atomic behavior and surface kinetics of GaN journal July 2009
Superconducting qubits consisting of epitaxially grown NbN/AlN/NbN Josephson junctions journal November 2011
High-quality epitaxial NbN/AlN/NbN tunnel junctions with a wide range of current density journal April 2013
High-quality NbN nanofilms on a GaN/AlN heterostructure journal October 2014
Magnetic and structural properties of Fe-implanted cubic GaN journal September 2016
Survey of superconductive materials and critical evaluation of selected properties journal July 1976
Structural and electronic properties of NbN/GaN junctions grown by molecular beam epitaxy journal May 2022
NbN thin films grown on silicon by molecular beam epitaxy for superconducting detectors journal December 2023
Molecular beam epitaxy of superconducting zirconium nitride on GaN substrates journal December 2024
Recent progress in metal-organic chemical vapor deposition of $\left( 000\bar{1} \right)$ N-polar group-III nitrides journal August 2014
X-ray diffraction analysis of cubic zincblende III-nitrides journal September 2017
Tuning superconductivity in vanadium nitride films by adjusting strain journal June 2022
TiN/(Al,Sc)N metal/dielectric superlattices and multilayers as hyperbolic metamaterials in the visible spectral range journal September 2014
Unexplored MBE growth mode reveals new properties of superconducting NbN journal February 2021
Temperature dependence of resistivity and Hall coefficient in strongly disordered NbN thin films journal October 2009
Josephson Tunneling Behaviors in NbN/AlN/NbN Junctions with an Ultrathin NbN Film journal December 2018
Growth of epitaxial iron nitride ultrathin film on zinc-blende gallium nitride journal June 2010
Cubic GaN films grown below the congruent sublimation temperature of (0 0 1) GaAs substrates by plasma-assisted molecular beam epitaxy
  • Alanís, Arturo; Vilchis, Heber; López, Edgar
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 34, Issue 2 https://doi.org/10.1116/1.4943661
journal March 2016
Low-Temperature Growth of Highly Crystalline Superconducting ZrN Thin Film on c-GaN Layer by Pulsed Laser Deposition journal October 2007
NbN-Based Overdamped Josephson Junctions for Quantum Voltage Standards journal January 2012