Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements

Schloz, Marcel; Pekin, Thomas C.; Brown, Hamish G.; Byrne, Dana O.; Esser, Bryan D.; Terzoudis-Lumsden, Emmanuel; Taniguchi, Takashi; Watanabe, Kenji; Findlay, Scott D.; Haas, Benedikt; Ciston, Jim; Koch, Christoph T.

doi:10.1093/mam/ozae110

Title: Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements

Journal Article · 17 November 2024 · Microscopy and Microanalysis

DOI: https://doi.org/10.1093/mam/ozae110 · OSTI ID:2507172

^[1]; Pekin, Thomas C. ^[1];

^[2]; Byrne, Dana O. ^[3]; Esser, Bryan D. ^[4]; Terzoudis-Lumsden, Emmanuel ^[4]; Taniguchi, Takashi ^[5];

^[5];

^[4]; Haas, Benedikt ^[1]; Ciston, Jim ^[6]; Koch, Christoph T. ^[1]

Helmholtz-Zentrum Berlin (HZB), (Germany)
Univ. of Melbourne, VIC (Australia)
University of California, Berkeley, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy, Molecular Foundry
Monash Univ., Melbourne, VIC (Australia)
National Institute for Materials Science (NIMS), Tsukuba (Japan)
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy, Molecular Foundry

A detailed analysis of ptychography for three-dimensional (3D) phase reconstructions of thick specimens is performed. Here, we introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix (S-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 2507172

Journal Information:: Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: 1 Vol. 31; ISSN 1431-9276

Publisher:: Microscopy Society of America (MSA)Copyright Statement

Country of Publication:: United States

Language:: English

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