Wafer-scale integration of freestanding photonic devices with color centers in silicon carbide

Majety, Sridhar; Norman, Victoria A.; Saha, Pranta; Rubin, Alex H.; Dhuey, Scott; Radulaski, Marina

doi:10.1038/s44310-024-00049-y

Title: Wafer-scale integration of freestanding photonic devices with color centers in silicon carbide

Journal Article · 24 January 2025 · npj Nanophotonics

DOI: https://doi.org/10.1038/s44310-024-00049-y · OSTI ID:2506769

Majety, Sridhar; Norman, Victoria A.; Saha, Pranta; Rubin, Alex H.; Dhuey, Scott; Radulaski, Marina

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 2506769

Journal Information:: npj Nanophotonics, Journal Name: npj Nanophotonics Journal Issue: 1 Vol. 2; ISSN 2948-216X

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: Country unknown/Code not available

Language:: English

References (34)

Novel color center platforms enabling fundamental scientific discovery Norman, Victoria A.; Majety, Sridhar; Wang, Zhipan InfoMat, Vol. 3, Issue 8 https://doi.org/10.1002/inf2.12128	journal	June 2020
Optimization of a buffer layer for cubic silicon carbide growth on silicon substrates Bosi, Matteo; Attolini, Giovanni; Negri, Marco Journal of Crystal Growth, Vol. 383 https://doi.org/10.1016/j.jcrysgro.2013.08.005	journal	November 2013
Wafer-scale 4H-silicon carbide-on-insulator (4H–SiCOI) platform for nonlinear integrated optical devices Yi, Ailun; Zheng, Yi; Huang, Hao Optical Materials, Vol. 107 https://doi.org/10.1016/j.optmat.2020.109990	journal	September 2020
Coherent Manipulation with Resonant Excitation and Single Emitter Creation of Nitrogen Vacancy Centers in 4H Silicon Carbide Mu, Zhao; Zargaleh, Soroush Abbasi; von Bardeleben, Hans Jürgen Nano Letters, Vol. 20, Issue 8 https://doi.org/10.1021/acs.nanolett.0c02342	journal	July 2020
Experimental Optical Properties of Single Nitrogen Vacancy Centers in Silicon Carbide at Room Temperature Wang, Jun-Feng; Liu, Zheng-Hao; Yan, Fei-Fei ACS Photonics, Vol. 7, Issue 7 https://doi.org/10.1021/acsphotonics.0c00218	journal	June 2020
Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond Burek, Michael J.; de Leon, Nathalie P.; Shields, Brendan J. Nano Letters, Vol. 12, Issue 12, p. 6084-6089 https://doi.org/10.1021/nl302541e	journal	February 2012
Polytype control of spin qubits in silicon carbide Falk, Abram L.; Buckley, Bob B.; Calusine, Greg Nature Communications, Vol. 4, Issue 1 https://doi.org/10.1038/ncomms2854	journal	May 2013
Ultra-narrow inhomogeneous spectral distribution of telecom-wavelength vanadium centres in isotopically-enriched silicon carbide Cilibrizzi, Pasquale; Arshad, Muhammad Junaid; Tissot, Benedikt Nature Communications, Vol. 14, Issue 1 https://doi.org/10.1038/s41467-023-43923-7	journal	December 2023
Entanglement and control of single nuclear spins in isotopically engineered silicon carbide Bourassa, Alexandre; Anderson, Christopher P.; Miao, Kevin C. Nature Materials, Vol. 19, Issue 12 https://doi.org/10.1038/s41563-020-00802-6	journal	September 2020
Fabrication and nanophotonic waveguide integration of silicon carbide colour centres with preserved spin-optical coherence Babin, Charles; Stöhr, Rainer; Morioka, Naoya Nature Materials, Vol. 21, Issue 1 https://doi.org/10.1038/s41563-021-01148-3	journal	November 2021
4H-silicon-carbide-on-insulator for integrated quantum and nonlinear photonics Lukin, Daniil M.; Dory, Constantin; Guidry, Melissa A. Nature Photonics, Vol. 14, Issue 5 https://doi.org/10.1038/s41566-019-0556-6	journal	December 2019
Experimental demonstration of memory-enhanced quantum communication Bhaskar, M. K.; Riedinger, R.; Machielse, B. Nature, Vol. 580, Issue 7801 https://doi.org/10.1038/s41586-020-2103-5	journal	March 2020
Utilizing photonic band gap in triangular silicon carbide structures for efficient quantum nanophotonic hardware Saha, Pranta; Majety, Sridhar; Radulaski, Marina Scientific Reports, Vol. 13, Issue 1 https://doi.org/10.1038/s41598-023-31362-9	journal	March 2023
High Q silicon carbide microdisk resonator Lu, Xiyuan; Lee, Jonathan Y.; Feng, Philip X. -L. Applied Physics Letters, Vol. 104, Issue 18 https://doi.org/10.1063/1.4875707	journal	May 2014
Silicon carbide photonic crystal cavities with integrated color centers Calusine, Greg; Politi, Alberto; Awschalom, David D. Applied Physics Letters, Vol. 105, Issue 1 https://doi.org/10.1063/1.4890083	journal	July 2014
Freestanding nanostructures via reactive ion beam angled etching Atikian, Haig A.; Latawiec, Pawel; Burek, Michael J. APL Photonics, Vol. 2, Issue 5 https://doi.org/10.1063/1.4982603	journal	May 2017
High-Q-factor nanobeam photonic crystal cavities in bulk silicon carbide Song, Bong-Shik; Jeon, Seungwoo; Kim, Heungjoon Applied Physics Letters, Vol. 113, Issue 23 https://doi.org/10.1063/1.5058194	journal	December 2018
Quantum information processing with integrated silicon carbide photonics Majety, Sridhar; Saha, Pranta; Norman, Victoria A. Journal of Applied Physics, Vol. 131, Issue 13 https://doi.org/10.1063/5.0077045	journal	April 2022
Cryogenic packaging of nanophotonic devices with a low coupling loss <1 dB Zeng, Beibei; De-Eknamkul, Chawina; Assumpcao, Daniel Applied Physics Letters, Vol. 123, Issue 16 https://doi.org/10.1063/5.0170324	journal	October 2023
Deterministic creation of strained color centers in nanostructures via high-stress thin films Assumpcao, D. R.; Jin, C.; Sutula, M. Applied Physics Letters, Vol. 123, Issue 24 https://doi.org/10.1063/5.0171558	journal	December 2023
Selective Purcell enhancement of two closely linked zero-phonon transitions of a silicon carbide color center Bracher, David O.; Zhang, Xingyu; Hu, Evelyn L. Proceedings of the National Academy of Sciences, Vol. 114, Issue 16 https://doi.org/10.1073/pnas.1704219114	journal	April 2017
Review of silicon photonics: history and recent advances Ye, Winnie N.; Xiong, Yule Journal of Modern Optics, Vol. 60, Issue 16 https://doi.org/10.1080/09500340.2013.839836	journal	September 2013
Triangular quantum photonic devices with integrated detectors in silicon carbide Majety, Sridhar; Strohauer, Stefan; Saha, Pranta Materials for Quantum Technology, Vol. 3, Issue 1 https://doi.org/10.1088/2633-4356/acc302	journal	March 2023
Telecom Networking with a Diamond Quantum Memory Bersin, Eric; Sutula, Madison; Huan, Yan Qi PRX Quantum, Vol. 5, Issue 1 https://doi.org/10.1103/PRXQuantum.5.010303	journal	January 2024
An integrated nanophotonic quantum register based on silicon-vacancy spins in diamond Nguyen, C. T.; Sukachev, D. D.; Bhaskar, M. K. Physical Review B, Vol. 100, Issue 16 https://doi.org/10.1103/PhysRevB.100.165428	journal	October 2019
Quantum Network Nodes Based on Diamond Qubits with an Efficient Nanophotonic Interface Nguyen, C. T.; Sukachev, D. D.; Bhaskar, M. K. Physical Review Letters, Vol. 123, Issue 18 https://doi.org/10.1103/PhysRevLett.123.183602	journal	October 2019
Coherent Control of Nitrogen-Vacancy Center Spins in Silicon Carbide at Room Temperature Wang, Jun-Feng; Yan, Fei-Fei; Li, Qiang Physical Review Letters, Vol. 124, Issue 22 https://doi.org/10.1103/PhysRevLett.124.223601	journal	June 2020
Efficient Source of Shaped Single Photons Based on an Integrated Diamond Nanophotonic System Knall, E. N.; Knaut, C. M.; Bekenstein, R. Physical Review Letters, Vol. 129, Issue 5 https://doi.org/10.1103/PhysRevLett.129.053603	journal	July 2022
Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application Anzalone, R.; D'Arrigo, G.; Camarda, M. Journal of Microelectromechanical Systems, Vol. 20, Issue 3 https://doi.org/10.1109/JMEMS.2011.2127451	journal	June 2011
Faraday cage angled-etching of nanostructures in bulk dielectrics Latawiec, Pawel; Burek, Michael J.; Sohn, Young-Ik Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 34, Issue 4 https://doi.org/10.1116/1.4944854	journal	July 2016
Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2 Dornberg, Gregor; Rohkamm, Erik; Birtel, Peter Journal of Vacuum Science & Technology A, Vol. 41, Issue 5 https://doi.org/10.1116/6.0002766	journal	July 2023
Five-second coherence of a single spin with single-shot readout in silicon carbide Anderson, Christopher P.; Glen, Elena O.; Zeledon, Cyrus Science Advances, Vol. 8, Issue 5 https://doi.org/10.1126/sciadv.abm5912	journal	February 2022
Robust multi-qubit quantum network node with integrated error detection Stas, P. -J.; Huan, Y. Q.; Machielse, B. Science, Vol. 378, Issue 6619 https://doi.org/10.1126/science.add9771	journal	November 2022
Triangular cross-section beam splitters in silicon carbide for quantum information processing Majety, Sridhar; Saha, Pranta; Kekula, Zbynka MRS Communications, Vol. 14, Issue 6 https://doi.org/10.1557/s43579-024-00557-0	journal	May 2024

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