Imaging interfacial topography with coherent x-ray reflectivity

Fenter, Paul; Almazán, Irene Calvo

doi:10.1103/physrevb.109.094112

Title: Imaging interfacial topography with coherent x-ray reflectivity

Journal Article · 18 March 2024 · Physical Review. B

DOI: https://doi.org/10.1103/physrevb.109.094112 · OSTI ID:2497274

^[1];

^[2]

Argonne National Laboratory (ANL), Argonne, IL (United States)
University of Zaragoza (Spain). Institute of Nanosciences and Materials of Aragon (INMA)

The use of coherent x-ray reflectivity to image interfaces is illustrated using model calculations for three cases: a thin film, a semi-infinite substrate, and a coherently strained epitaxial thin film. The intensities and phases of the coherent scattering signals are calculated based on a fully atomistic model (where the phases are assumed to have been recovered by a phasing algorithm). Here, we describe the characteristics of the effective density that are obtained by direct inverse Fourier transformation of the complex structure factors, using a window function to define the data range. These effective densities include significant artifacts like oscillations and negative values derived from the finite vertical momentum transfer of the window function. Two approaches are described to extract the surface topography from the effective densities for three-dimensional visualization: (i) multiplying the effective density by a phase factor and (ii) analyzing the data as a hybrid structure factor F(x, Q_z). The explicit surface sensitivity and specificity of measurements is illustrated when the film or substrate Bragg peaks are excluded. These considerations show that images of interfacial topography can be obtained using currently available experimental capabilities with parameters corresponding to epitaxial thin films.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences & Biosciences Division (CSGB)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 2497274

Journal Information:: Physical Review. B, Journal Name: Physical Review. B Journal Issue: 9 Vol. 109; ISSN 2469-9950

Publisher:: American Physical Society (APS)Copyright Statement

Country of Publication:: United States

Language:: English

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