Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

Kondeti, V. S. Santosh K.; Yatom, Shurik; Romadanov, Ivan; Raitses, Yevgeny; Dorf, Leonid; Khomenko, Andrei

doi:10.1116/6.0004070

Title: Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

Journal Article · 12 November 2024 · Journal of Vacuum Science and Technology A

DOI: https://doi.org/10.1116/6.0004070 · OSTI ID:2482503

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Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)
Applied Materials, Santa Clara, CA (United States)

A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and sustainability applications. These plasmas often have a complex combination of reactive and nonreactive species which may have spatial and temporal variations in density, temperature, and energy. Accurate knowledge of these parameters and their variations is critically important for understanding and advancing these applications through validated and predictive modeling and the design of relevant devices. Laser-induced fluorescence (LIF) provides both spatial and temporally resolved information about the plasma-produced radicals, ions, and metastables. However, the use of this powerful diagnostic tool requires the knowledge of optical transitions including excitation and fluorescence wavelengths which may not be available or scattered through a huge literature domain. In this paper, we collected, analyzed, and compiled the available transitions for laser-induced fluorescence for more than 160 chemical species relevant to the microelectronics industry and the sustainability applications. A list of species with overlapping LIF excitations and fluorescence wavelengths have been identified. Finally, this summary is intended to serve as a data reference for LIF transitions and should be updated in the future.

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Research Organization:: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-09CH11466

OSTI ID:: 2482503

Journal Information:: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 6 Vol. 42; ISSN 0734-2101

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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Laser-induced Fluorescence Velocimetry of Xe II in the 30-cm NSTAR-type Ion Engine Plume Smith, Timothy; Herman, Daniel; Gallimore, Alec 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit https://doi.org/10.2514/6.2004-3963	conference	June 2004
Diode Laser-Induced Fluorescence of Xenon Ion Velocity Distributions Smith, Timothy; Ngom, Bailo; Linnell, Jesse 41st AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit https://doi.org/10.2514/6.2005-4406	conference	July 2005
Obtaining Velocity Distribution Using a Xenon Ion Line with Unknown Hyperfine Constants Huang, Wensheng; Smith, Timothy; Gallimore, Alec 40th AIAA Plasmadynamics and Lasers Conference https://doi.org/10.2514/6.2009-4226	conference	June 2009
A Preliminary Study of Krypton Laser-Induced Fluorescence Hargus, William 46th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit https://doi.org/10.2514/6.2010-6524	conference	July 2010
Krypton Tagging Velocimetry (KTV) Investigation of Shock-Wave/Turbulent Boundary-Layer Interaction Mustafa, Muhammad; Hunt, Matthew B.; Parziale, Nick J. 55th AIAA Aerospace Sciences Meeting https://doi.org/10.2514/6.2017-0025	conference	January 2017

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