Electrode Elastic Modulus as the Dominant Factor in the Capping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films

Lenox, Megan K.; Islam, Md Rafiqul; Hoque, Md Shafkat Bin; Skidmore, Chloe H.; Salanova, Alejandro; Fields, Shelby S.; Jaszewski, Samantha T.; Maria, Jon-Paul; Hopkins, Patrick E.; Ihlefeld, Jon F.

doi:10.1021/acsami.4c15934

Title: Electrode Elastic Modulus as the Dominant Factor in the Capping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films

Journal Article · 02 December 2024 · ACS Applied Materials and Interfaces

DOI: https://doi.org/10.1021/acsami.4c15934 · OSTI ID:2479811

^[1];

^[2]; Hoque, Md Shafkat Bin ^[2];

^[3]; Salanova, Alejandro ^[1];

^[1];

^[1]; Maria, Jon-Paul ^[3]; Hopkins, Patrick E. ^[4];

^[5]

Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States
Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States
Department of Materials Science and Engineering, Pennsylvania State University, University Park, Pennsylvania 16802, United States
Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States, Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States, Department of Physics, University of Virginia, Charlottesville, Virginia 22904, United States
Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States, Charles L. Brown Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, Virginia 22904, United States

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Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0021118; NA0003525

OSTI ID:: 2479811

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 50 Vol. 16; ISSN 1944-8244

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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