DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Strain-concentration for fast, compact photonic modulation and non-volatile memory

Journal Article · · Optica

A critical figure of merit (FoM) for electro-optic (EO) modulators is the transmission change per voltage, d T / d V . Conventional approaches in wave-guided modulators maximize d T / d V via a high EO coefficient or longer light-material interaction lengths but are ultimately limited by material losses and nonlinearities. Optical and RF resonances improve d T / d V at the cost of spectral non-uniformity, especially for high- Q optical cavity resonances. Here, we introduce an EO modulator based on piezo-strain-concentration of a photonic crystal cavity to address both trade-offs: (i) it eliminates the trade-off between d T / d V and waveguide loss—i.e., enhancement of the resonance tuning efficiency d v c / d V for the fixed EO coefficient, waveguide length, and cavity Q —and (ii) at high DC strains it exhibits a non-volatile (NV) cavity tuning Δ v c ,NV for passive memory and programming of multiple devices into resonance despite fabrication variations. The device is fabricated on a scalable silicon nitride-on-aluminum nitride platform. We measure d v c / d V =177±1MHz/V, corresponding to Δ v c =40±0.32GHz for a voltage spanning ±120V with an energy consumption of δ U /Δ v c =0.17nW/GHz. The modulation bandwidth is flat up to ω BW,3dB /2 π =3.2±0.07MHz for broadband DC-AC and 142±17MHz for resonant operation near a 2.8 GHz mechanical resonance. Optical extinction up to 25 dB is obtained via Fano-type interference. Strain-induced beam-buckling modes are programmable under a “read-write” protocol with a continuous, repeatable tuning range of 5±0.25GHz, allowing for storage and retrieval, which we quantify with mutual information of 2.4 bits and a maximum non-volatile excursion of 8 GHz. Using a full piezo-optical finite-element-model (FEM) we identify key design principles for optimizing strain-based modulators and chart a path towards achieving performance comparable to lithium niobate-based modulators and the study of high strain physics on-chip.

Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
SC0012704
OSTI ID:
2475533
Journal Information:
Optica, Journal Name: Optica Journal Issue: 11 Vol. 11; ISSN 2334-2536
Publisher:
Optical Society of AmericaCopyright Statement
Country of Publication:
United States
Language:
English

References (44)

Non‐Volatile Reconfigurable Integrated Photonics Enabled by Broadband Low‐Loss Phase Change Material journal March 2021
Integrated Silicon Fourier Transform Spectrometer with Broad Bandwidth and Ultra‐High Resolution journal March 2021
High-Performance Piezoelectric Energy Harvesters and Their Applications journal April 2018
Nanoelectromechanical Control of Spin–Photon Interfaces in a Hybrid Quantum System on Chip journal January 2024
Photonic Crystal Cavity IQ Modulators in Thin-Film Lithium Niobate journal August 2024
Generating Fano Resonances in a Single-Waveguide Silicon Nanobeam Cavity for Efficient Electro-Optical Modulation journal October 2018
Dynamic manipulation of nanomechanical resonators in the high-amplitude regime and non-volatile mechanical memory operation journal October 2011
Integrated all-photonic non-volatile multi-level memory journal September 2015
Broadband and fabrication-tolerant 3-dB couplers with topological valley edge modes journal July 2024
Controlling the coherence of a diamond spin qubit through its strain environment journal May 2018
U1 snRNP regulates cancer cell migration and invasion in vitro journal January 2020
Strain-stabilized superconductivity journal January 2021
Low-noise frequency-agile photonic integrated lasers for coherent ranging journal June 2022
High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture journal December 2021
A ferroelectric multilevel non-volatile photonic phase shifter journal May 2022
A full degree-of-freedom spatiotemporal light modulator journal November 2022
Integrated optical memristors journal May 2023
Monolithic piezoelectric control of soliton microcombs journal July 2020
Programmable photonic circuits journal October 2020
High-fidelity parallel entangling gates on a neutral-atom quantum computer journal October 2023
Ultrastructural Characterization of the Lower Motor System in a Mouse Model of Krabbe Disease journal December 2016
Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors journal April 2013
Electro-optic modulation in integrated photonics journal July 2021
Piezo-optomechanical cantilever modulators for VLSI visible photonics journal May 2022
Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies journal August 2023
Deterministic creation of strained color centers in nanostructures via high-stress thin films journal December 2023
A Michelson interferometer and reference mirrors integrated on glass journal September 1995
Bistable nanowire for micromechanical memory journal February 2008
Strain engineering of the silicon-vacancy center in diamond journal May 2018
Perturbation theory for Maxwell’s equations with shifting material boundaries journal June 2002
A BaTiO 3 -Based Electro-Optic Pockels Modulator Monolithically Integrated on an Advanced Silicon Photonics Platform journal March 2019
Predistortion for High-Speed Lumped Silicon Photonic Mach-Zehnder Modulators journal April 2022
Thin film bulk wave acoustic resonators (FBAR) for wireless applications conference January 2001
Bistable silicon photonic MEMS switches conference March 2019
Delocalized photonic deep learning on the internet’s edge journal October 2022
Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities journal January 2011
Phase tuning by length contraction journal January 2018
High modulation efficiency lithium niobate Michelson interferometer modulator journal January 2019
CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures journal January 2019
Improved switching using Fano resonances in photonic crystal structures journal July 2013
Integrated lithium niobate electro-optic modulators: when performance meets scalability journal January 2021
Scalable photonic integrated circuits for high-fidelity light control journal October 2023
Lithium niobate piezo-optomechanical crystals journal January 2019
Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$) preprint January 2024