Local step-flow dynamics in thin film growth with desorption

Zhang, Xiaozhi; Ulbrandt, Jeffrey G.; Myint, Peco; Fluerasu, Andrei; Wiegart, Lutz; Zhang, Yugang; Nelson, Christie; Ludwig, Karl F.; Headrick, Randall L.

doi:10.1103/physrevmaterials.8.033403

Title: Local step-flow dynamics in thin film growth with desorption

Journal Article · 20 March 2024 · Physical Review Materials

DOI: https://doi.org/10.1103/physrevmaterials.8.033403 · OSTI ID:2475345

^[1];

^[2]; Fluerasu, Andrei ^[3];

^[3]; Zhang, Yugang ^[3]; Nelson, Christie ^[3]; Ludwig, Karl F. ^[4];

^[1]

University of Vermont, Burlington, VT (United States)
Boston University, MA (United States); Argonne National Laboratory (ANL), Argonne, IL (United States)
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Boston University, MA (United States)

Desorption of deposited species plays a role in determining the evolution of surface morphology during crystal growth when the desorption time constant is short compared with the time to diffuse to a defect site, step edge, or kink. However, experiments to directly test the predictions of these effects are lacking. Novel techniques such as in situ coherent x-ray scattering can provide significant new information. Herein we present x-ray photon correlation spectroscopy (XPCS) measurements during diindenoperylene (DIP) vapor deposition on thermally oxidized silicon surfaces. DIP forms a nearly complete two-dimensional first layer over the range of temperatures studied (40–120 ⁢°C), followed by mounded growth during subsequent deposition. Local step flow within mounds was observed, and we find that there was a terrace-length-dependent behavior of the step edge dynamics. This led to unstable growth with rapid roughening (β>0.5) and deviation from a symmetric error-function-like height profile. At high temperatures, the grooves between the mounds tend to close up leading to nearly flat polycrystalline films. In conclusion, numerical analysis based on a (1+1)-dimensional model suggests that terrace-length dependent desorption of deposited ad-molecules is an essential cause of the step dynamics, and it influences the morphology evolution.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF); National Science Foundation (NSF)

Grant/Contract Number:: SC0012704

OSTI ID:: 2475345

Report Number(s):: BNL--226292-2024-JAAM

Journal Information:: Physical Review Materials, Journal Name: Physical Review Materials Journal Issue: 3 Vol. 8; ISSN 2475-9953

Publisher:: American Physical Society (APS)Copyright Statement

Country of Publication:: United States

Language:: English

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Title: Local step-flow dynamics in thin film growth with desorption

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