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Title: Laterally Modulating Carrier Concentration by Ion Irradiation in CdO Thin Films for Mid‐IR Plasmonics

Journal Article · · Advanced Optical Materials
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [1]; ORCiD logo [3]; ORCiD logo [4]; ORCiD logo [5]; ORCiD logo [6]; ORCiD logo [7];  [1]
  1. Department of Materials Science and Engineering The Pennsylvania State University University Park PA 16802 USA
  2. Mechanical Engineering Vanderbilt University Nashville TN 37212 USA, Photonics Initiative, Advanced Science Research Center City University of New York New York NY 10031 USA
  3. School of Physics and Astronomy University of Southampton Southampton SO17 1BJ UK, Sensorium Technological Laboratories Nashville TN USA
  4. Department of Nuclear Engineering University of New Mexico Albuquerque NM 87131 USA, Center for Integrated Nanotechnology Sandia National Laboratories Albuquerque NM 87185 USA
  5. Center for Integrated Nanotechnology Sandia National Laboratories Albuquerque NM 87185 USA, Department of Nuclear Engineering University of Tennessee Knoxville TN 37916 USA
  6. School of Physics and Astronomy University of Southampton Southampton SO17 1BJ UK, Sensorium Technological Laboratories Nashville TN USA, Istituto di Fotonica e Nanotecnologie – Consiglio Nazionale delle Ricerche (CNR) Milano 20133 Italy
  7. Mechanical Engineering Vanderbilt University Nashville TN 37212 USA, Sensorium Technological Laboratories Nashville TN USA

Abstract This report demonstrates tunable carrier densities in CdO thin films through local ion irradiation, providing lateral control of mid‐IR optical properties. Ion‐solid interactions produce donor‐like defects that boost electron concentrations from the practical minimum of 2.5 × 10 19 cm −3 to a maximum of 2.5 × 10 20 cm −3 by metered ion exposure. This range is achieved using He, N, Ar, or Au ions at 1–2.8 MeV; when normalized by displacements per atom, all ion species produce comparable results. Since CdO is well‐described by the Drude model, irradiation‐tuned carrier densities directly alter the infrared dielectric function, and in turn, mid‐infrared optical properties. Further, it is demonstrated that by combining irradiation with traditional lithography, CdO films expose to ions in the presence of 3‐µm thick, patterned photoresist exhibit lateral carrier density profiles with ≈400‐nm resolution. Scanning near‐field optical microscopy reveals sharp optical interfaces with almost no companion contrast in surface morphology, microstructure, or crystallinity. Finally, CdO lateral homostructures supporting surface plasmon polaritons (SPPs) are demonstrated whose dispersion relation can be tuned through periodic patterning in a monolithic platform by simple nanofabrication. Numerical simulations show these polaritons result from strong coupling between excitations at CdO plasma frequencies and SPPs supported by the platinum substrate.

Sponsoring Organization:
USDOE
Grant/Contract Number:
NONE; NA0003525
OSTI ID:
2474995
Journal Information:
Advanced Optical Materials, Journal Name: Advanced Optical Materials Journal Issue: 30 Vol. 12; ISSN 2195-1071
Publisher:
Wiley Blackwell (John Wiley & Sons)Copyright Statement
Country of Publication:
Germany
Language:
English

References (45)

Alternative Plasmonic Materials: Beyond Gold and Silver journal May 2013
Modern Scattering‐Type Scanning Near‐Field Optical Microscopy for Advanced Material Research journal April 2019
Flat Optical and Plasmonic Devices Using Area-Selective Ion-Beam Doping of Silicon journal January 2018
Tunable, Homoepitaxial Hyperbolic Metamaterials Enabled by High Mobility CdO journal November 2022
Plasmonics: Fundamentals and Applications book January 2007
Influence of RF power on the opto-electrical and structural properties of gallium-doped zinc oxide thin films journal February 2017
Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity journal May 2002
On the use of SRIM for computing radiation damage exposure journal September 2013
Engineering the Spectral and Spatial Dispersion of Thermal Emission via Polariton–Phonon Strong Coupling journal February 2021
Polaritonic Hybrid-Epsilon-near-Zero Modes: Beating the Plasmonic Confinement vs Propagation-Length Trade-Off with Doped Cadmium Oxide Bilayers journal December 2018
Electro-optically Tunable Multifunctional Metasurfaces journal April 2020
Narrowband Polaritonic Thermal Emitters Driven by Waste Heat journal May 2020
Epsilon-near-Zero Modes and Surface Plasmon Resonance in Fluorine-Doped Cadmium Oxide Thin Films journal July 2017
Multiple Epsilon-Near-Zero Resonances in Multilayered Cadmium Oxide: Designing Metamaterial-Like Optical Properties in Monolithic Materials journal April 2019
Defect Chemistry and Plasmon Physics of Colloidal Metal Oxide Nanocrystals journal April 2014
Nanoscale Free-Carrier Profiling of Individual Semiconductor Nanowires by Infrared Near-Field Nanoscopy journal April 2010
Coherent emission of light by thermal sources journal March 2002
Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits journal June 2015
Dysprosium-doped cadmium oxide as a gateway material for mid-infrared plasmonics journal February 2015
How to deal with the loss in plasmonics and metamaterials journal January 2015
Reconfigurable infrared hyperbolic metasurfaces using phase change materials journal October 2018
Material-specific mapping of metal/semiconductor/dielectric nanosystems at 10 nm resolution by backscattering near-field optical microscopy journal January 2002
Efforts to improve carrier mobility in radio frequency sputtered aluminum doped zinc oxide films journal February 2004
Fermi level stabilization energy in cadmium oxide journal June 2010
Ge doped GaN with controllable high carrier concentration for plasmonic applications journal December 2013
High mobility yttrium doped cadmium oxide thin films journal July 2017
Probing polaritons in the mid- to far-infrared journal May 2019
Multi-frequency coherent emission from superstructure thermal emitters journal April 2021
Clustered vacancies in ZnO: chemical aspects and consequences on physical properties journal February 2018
Depth resolved defect characterization of energetic ion irradiated ZnO by positron annihilation techniques and photoluminescence journal November 2019
Flat mid-infrared composite plasmonic materials using lateral doping-patterned semiconductors journal September 2014
Theory of the Contribution of Excitons to the Complex Dielectric Constant of Crystals journal December 1958
Unification of the electrical behavior of defects, impurities, and surface states in semiconductors: Virtual gap states in CdO journal January 2009
Electrical transport, electrothermal transport, and effective electron mass in single-crystalline In 2 O 3 films journal August 2013
Theory of epsilon-near-zero modes in ultrathin films journal March 2015
Ultraviolet to far-infrared dielectric function of n -doped cadmium oxide thin films journal February 2020
Mid-wave to near-IR optoelectronic properties and epsilon-near-zero behavior in indium-doped cadmium oxide journal March 2021
Review of mid-infrared plasmonic materials journal January 2015
Mott Transition in VO2 Revealed by Infrared Spectroscopy and Nano-Imaging journal December 2007
Low-Loss Plasmonic Metamaterials journal January 2011
Berreman mode and epsilon near zero mode journal January 2012
Characterization of semiconductor materials using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy journal January 2014
Transparent conducting oxides for electro-optical plasmonic modulators journal June 2015
Tuning carrier density and phase transitions in oxide semiconductors using focused ion beams journal June 2022
Reflecting upon the losses in plasmonics and metamaterials journal August 2012