Disentangling superconductor and dielectric microwave losses in submicrometer Nb / Si O 2 interconnects using a multimode microstrip resonator

Garcia, Cougar A. T.; Bailey, Nancyjane; Kirby, Chris; Strong, Joshua A.; Talanov, Vladimir V.; Herr, Anna Yu.; Anlage, Steven M.

doi:10.1103/PhysRevApplied.21.024056

Title: Disentangling superconductor and dielectric microwave losses in submicrometer $Nb$ / $Si O$ $_{2}$ interconnects using a multimode microstrip resonator

Journal Article · 27 February 2024 · Physical Review Applied

DOI: https://doi.org/10.1103/PhysRevApplied.21.024056 · OSTI ID:2474251

; Bailey, Nancyjane; Kirby, Chris;

; Talanov, Vladimir V.;

;

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Sponsoring Organization:: USDOE Office of Science (SC), High Energy Physics (HEP)

Grant/Contract Number:: SC0017931

OSTI ID:: 2474251

Journal Information:: Physical Review Applied, Journal Name: Physical Review Applied Journal Issue: 2 Vol. 21; ISSN 2331-7019; ISSN PRAHB2

Publisher:: American Physical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

References (100)

Magnetic penetration depth measurements in cuprate superconductors Anlage, Steven M.; Wu, Dong-Ho Journal of Superconductivity, Vol. 5, Issue 4 https://doi.org/10.1007/BF00618140	journal	August 1992
The surface impedance of superconductors and normal conductors: The Mattis-Bardeen theory Turneaure, J. P.; Halbritter, J.; Schwettman, H. A. Journal of Superconductivity, Vol. 4, Issue 5 https://doi.org/10.1007/BF00618215	journal	October 1991
Parallel-plate resonator of variable spacer thickness for accurate measurements of surface impedance of high-T c superconductive films Basovich, A. Ya.; Belov, R. K.; Markelov, V. A. Journal of Superconductivity, Vol. 5, Issue 6 https://doi.org/10.1007/BF00618239	journal	December 1992
High-temperature superconducting microwave devices: Fundamental issues in materials, physics, and engineering Newman, Nathan; Lyons, W. Gregory Journal of Superconductivity, Vol. 6, Issue 3 https://doi.org/10.1007/BF00625741	journal	June 1993
Superconductivity in the TiO and NbO systems Hulm, J. K.; Jones, C. K.; Hein, R. A. Journal of Low Temperature Physics, Vol. 7, Issue 3-4 https://doi.org/10.1007/BF00660068	journal	May 1972
Dielectric resonator as a possible standard for characterization of high temperature superconducting films for microwave applications Mazierska, Janina Journal of Superconductivity, Vol. 10, Issue 2 https://doi.org/10.1007/BF02763176	journal	April 1997
Impedance boundary conditions for imperfectly conducting surfaces Senior, T. B. A. Applied Scientific Research, Section B, Vol. 8, Issue 1 https://doi.org/10.1007/BF02920074	journal	December 1960
On the oxidation and on the superconductivity of niobium Halbritter, J. Applied Physics A Solids and Surfaces, Vol. 43, Issue 1 https://doi.org/10.1007/bf00615201	journal	May 1987
Superconducting Microstrip line Model Studies at Millimetre and Sub-Millimetre Waves Belitsky, V.; Risacher, C.; Pantaleev, M. International Journal of Infrared and Millimeter Waves, Vol. 27, Issue 6 https://doi.org/10.1007/s10762-006-9116-5	journal	June 2006
Equivalence of the Effects on the Complex Conductivity of Superconductor due to Temperature Change and External Pair Breaking Gao, J.; Zmuidzinas, J.; Vayonakis, A. Journal of Low Temperature Physics, Vol. 151, Issue 1-2 https://doi.org/10.1007/s10909-007-9688-z	journal	January 2008
Modeling of Superconducting Components in Full-Wave Simulators Amini, Mohammad Hossein; Mallahzadeh, Alireza Journal of Superconductivity and Novel Magnetism, Vol. 34, Issue 3 https://doi.org/10.1007/s10948-020-05795-6	journal	January 2021
Study of the surface resistance of superconducting niobium films at 1.5 GHz Benvenuti, C.; Calatroni, S.; Campisi, I. E. Physica C: Superconductivity, Vol. 316, Issue 3-4 https://doi.org/10.1016/S0921-4534(99)00207-5	journal	May 1999
Niobium and Aluminum Josephson Junctions Fabricated with a Damascene CMP Process Ramzi, Abelaziz; Charlebois, Serge A.; Krantz, Philip Physics Procedia, Vol. 36 https://doi.org/10.1016/j.phpro.2012.06.148	journal	January 2012
New Nb multi-layer fabrication process for large-scale SFQ circuits Nagasawa, S.; Satoh, T.; Hinode, K. Physica C: Superconductivity, Vol. 469, Issue 15-20 https://doi.org/10.1016/j.physc.2009.05.219	journal	October 2009
Chemical Mechanical Planarization: Slurry Chemistry, Materials, and Mechanisms Krishnan, Mahadevaiyer; Nalaskowski, Jakub W.; Cook, Lee M. Chemical Reviews, Vol. 110, Issue 1 https://doi.org/10.1021/cr900170z	journal	January 2010
The ‘universal’ dielectric response Jonscher, A. K. Nature, Vol. 267, Issue 5613 https://doi.org/10.1038/267673a0	journal	June 1977
Addressable superconductor integrated circuit memory from delay lines Volk, Jennifer; Wynn, Alex; Golden, Evan Scientific Reports, Vol. 13, Issue 1 https://doi.org/10.1038/s41598-023-43205-8	journal	October 2023
A resonant metamaterial clock distribution network for superconducting logic Strong, Joshua A.; Talanov, Vladimir V.; Nielsen, Max E. Nature Electronics, Vol. 5, Issue 3 https://doi.org/10.1038/s41928-022-00729-7	journal	March 2022
Millimeter wave surface resistance of epitaxially grown YBa2Cu3O7−x thin films Klein, N.; Müller, G.; Piel, H. Applied Physics Letters, Vol. 54, Issue 8 https://doi.org/10.1063/1.101472	journal	February 1989
Measurements of the magnetic penetration depth in YBa ₂ Cu ₃ O _7−δ thin films by the microstrip resonator technique Anlage, Steven M.; Sze, Hsuan; Snortland, Howard J. Applied Physics Letters, Vol. 54, Issue 26 https://doi.org/10.1063/1.101547	journal	June 1989
Confocal resonators for measuring the surface resistance of high‐temperature superconducting films Martens, J. S.; Hietala, V. M.; Ginley, D. S. Applied Physics Letters, Vol. 58, Issue 22 https://doi.org/10.1063/1.104821	journal	June 1991
A parallel plate resonator technique for microwave loss measurements on superconductors Taber, R. C. Review of Scientific Instruments, Vol. 61, Issue 8 https://doi.org/10.1063/1.1141389	journal	August 1990
Magnetic penetration depth measurements of superconducting thin films by a microstrip resonator technique Langley, B. W.; Anlage, S. M.; Pease, R. F. W. Review of Scientific Instruments, Vol. 62, Issue 7 https://doi.org/10.1063/1.1142425	journal	July 1991
Measurement of the absolute penetration depth and surface resistance of superconductors and normal metals with the variable spacing parallel plate resonator Talanov, Vladimir V.; Mercaldo, Lucia V.; Anlage, Steven M. Review of Scientific Instruments, Vol. 71, Issue 5 https://doi.org/10.1063/1.1150596	journal	May 2000
Self and Mutual Inductances of Superconducting Structures Sass, A. R.; Stewart, W. C. Journal of Applied Physics, Vol. 39, Issue 4 https://doi.org/10.1063/1.1656469	journal	March 1968
Slow‐Wave Structures Utilizing Superconducting Thin‐Film Transmission Lines Mason, P. V.; Gould, R. W. Journal of Applied Physics, Vol. 40, Issue 5 https://doi.org/10.1063/1.1657907	journal	April 1969
Measured frequency dependence of the surface resistance of superconducting niobium Bauer, W.; Giordano, S.; Hahn, H. Journal of Applied Physics, Vol. 45, Issue 11 https://doi.org/10.1063/1.1663177	journal	November 1974
Current Distribution in a Thin-Film Superconducting Strip Transmission Line Sass, A. R.; Skurnick, I. D. Journal of Applied Physics, Vol. 36, Issue 7 https://doi.org/10.1063/1.1714460	journal	July 1965
Field Solution for a Thin‐Film Superconducting Strip Transmission Line Swihart, James C. Journal of Applied Physics, Vol. 32, Issue 3 https://doi.org/10.1063/1.1736025	journal	March 1961
X-ray investigation of subsurface interstitial oxygen at Nb/oxide interfaces Delheusy, M.; Stierle, A.; Kasper, N. Applied Physics Letters, Vol. 92, Issue 10 https://doi.org/10.1063/1.2889474	journal	March 2008
Picosecond pulses on superconducting striplines Kautz, R. L. Journal of Applied Physics, Vol. 49, Issue 1 https://doi.org/10.1063/1.324387	journal	January 1978
The inductance of a superconducting strip transmission line Chang, W. H. Journal of Applied Physics, Vol. 50, Issue 12 https://doi.org/10.1063/1.325953	journal	December 1979
XPS and AES studies on oxide growth and oxide coatings on niobium Grundner, M.; Halbritter, J. Journal of Applied Physics, Vol. 51, Issue 1 https://doi.org/10.1063/1.327386	journal	January 1980
Low-loss superconducting resonant circuits using vacuum-gap-based microwave components Cicak, Katarina; Li, Dale; Strong, Joshua A. Applied Physics Letters, Vol. 96, Issue 9 https://doi.org/10.1063/1.3304168	journal	March 2010
The effective microwave surface impedance of high T _c thin films Klein, N.; Chaloupka, H.; Müller, G. Journal of Applied Physics, Vol. 67, Issue 11 https://doi.org/10.1063/1.345037	journal	June 1990
Ultra-low-power superconductor logic Herr, Quentin P.; Herr, Anna Y.; Oberg, Oliver T. Journal of Applied Physics, Vol. 109, Issue 10, Article No. 103903 https://doi.org/10.1063/1.3585849	journal	May 2011
Microwave absorption in single crystals of lanthanum aluminate Zuccaro, Claudio; Winter, Michael; Klein, Norbert Journal of Applied Physics, Vol. 82, Issue 11 https://doi.org/10.1063/1.366433	journal	December 1997
Measurement of resonant frequency and quality factor of microwave resonators: Comparison of methods Petersan, Paul J.; Anlage, Steven M. Journal of Applied Physics, Vol. 84, Issue 6 https://doi.org/10.1063/1.368498	journal	September 1998
An analysis method for asymmetric resonator transmission applied to superconducting devices Khalil, M. S.; Stoutimore, M. J. A.; Wellstood, F. C. Journal of Applied Physics, Vol. 111, Issue 5 https://doi.org/10.1063/1.3692073	journal	March 2012
Planar superconducting resonators with internal quality factors above one million Megrant, A.; Neill, C.; Barends, R. Applied Physics Letters, Vol. 100, Issue 11 https://doi.org/10.1063/1.3693409	journal	March 2012
The effect of vacancies on the microwave surface resistance of niobium revealed by positron annihilation spectroscopy Romanenko, A.; Edwardson, C. J.; Coleman, P. G. Applied Physics Letters, Vol. 102, Issue 23 https://doi.org/10.1063/1.4811090	journal	June 2013
Surface participation and dielectric loss in superconducting qubits Wang, C.; Axline, C.; Gao, Y. Y. Applied Physics Letters, Vol. 107, Issue 16 https://doi.org/10.1063/1.4934486	journal	October 2015
Superconductor digital electronics: Scalability and energy efficiency issues (Review Article) Tolpygo, Sergey K. Low Temperature Physics, Vol. 42, Issue 5 https://doi.org/10.1063/1.4948618	journal	May 2016
Materials loss measurements using superconducting microwave resonators McRae, C. R. H.; Wang, H.; Gao, J. Review of Scientific Instruments, Vol. 91, Issue 9 https://doi.org/10.1063/5.0017378	journal	September 2020
Comparison of dielectric loss in titanium nitride and aluminum superconducting resonators Melville, A.; Calusine, G.; Woods, W. Applied Physics Letters, Vol. 117, Issue 12 https://doi.org/10.1063/5.0021950	journal	September 2020
Electromagnetic models for superconducting millimetre-wave and sub-millimetre-wave microstrip transmission lines Yassin, G.; Withington, S. Journal of Physics D: Applied Physics, Vol. 28, Issue 9 https://doi.org/10.1088/0022-3727/28/9/028	journal	September 1995
Optimization of superconducting microstrip interconnects for rapid single-flux-quantum circuits Rafique, M. R.; Kataeva, I.; Engseth, H. Superconductor Science and Technology, Vol. 18, Issue 8 https://doi.org/10.1088/0953-2048/18/8/007	journal	June 2005
Implementation of energy efficient single flux quantum digital circuits with sub-aJ/bit operation Volkmann, M. H.; Sahu, A.; Fourie, C. J. Superconductor Science and Technology, Vol. 26, Issue 1 https://doi.org/10.1088/0953-2048/26/1/015002	journal	November 2012
An adiabatic quantum flux parametron as an ultra-low-power logic device Takeuchi, Naoki; Ozawa, Dan; Yamanashi, Yuki Superconductor Science and Technology, Vol. 26, Issue 3 https://doi.org/10.1088/0953-2048/26/3/035010	journal	January 2013
Flexible superconducting Nb transmission lines on thin film polyimide for quantum computing applications Tuckerman, David B.; Hamilton, Michael C.; Reilly, David J. Superconductor Science and Technology, Vol. 29, Issue 8 https://doi.org/10.1088/0953-2048/29/8/084007	journal	July 2016
Complex permittivity of some ultralow loss dielectric crystals at cryogenic temperatures Krupka, Jerzy; Derzakowski, Krzysztof; Tobar, Michael Measurement Science and Technology, Vol. 10, Issue 5 https://doi.org/10.1088/0957-0233/10/5/308	journal	January 1999
A dielectric resonator for measurements of complex permittivity of low loss dielectric materials as a function of temperature Krupka, Jerzy; Derzakowski, Krzysztof; Riddle, Bill Measurement Science and Technology, Vol. 9, Issue 10 https://doi.org/10.1088/0957-0233/9/10/015	journal	October 1998
Theory of RF superconductivity for resonant cavities Gurevich, Alex Superconductor Science and Technology, Vol. 30, Issue 3 https://doi.org/10.1088/1361-6668/30/3/034004	journal	January 2017
Inductance of superconductor integrated circuit features with sizes down to 120 nm Tolpygo, Sergey K.; Golden, Evan B.; Weir, Terence J. Superconductor Science and Technology, Vol. 34, Issue 8 https://doi.org/10.1088/1361-6668/ac04b9	journal	June 2021
Propagation of picosecond pulses on superconducting transmission line interconnects ^* Talanov, Vladimir V.; Knee, Derek; Harms, David Superconductor Science and Technology, Vol. 35, Issue 5 https://doi.org/10.1088/1361-6668/ac5783	journal	April 2022
Isochronous data link across a superconducting Nb flex cable with 5 femtojoules per bit^* Dai, Haitao; Kegerreis, Corey; Wehella Gamage, Deepal Superconductor Science and Technology, Vol. 35, Issue 4 https://doi.org/10.1088/1361-6668/ac5786	journal	March 2022
Synchronous chip-to-chip communication with a multi-chip resonator clock distribution network ^* Egan, Jonathan; Nielsen, Max; Strong, Joshua Superconductor Science and Technology, Vol. 35, Issue 10 https://doi.org/10.1088/1361-6668/ac8e38	journal	September 2022
Tuning microwave losses in superconducting resonators Gurevich, Alex Superconductor Science and Technology, Vol. 36, Issue 6 https://doi.org/10.1088/1361-6668/acc214	journal	April 2023
Measurements of the amplitude-dependent microwave surface resistance of an Au/Nb bilayer Oseroff, Thomas; Sun, Zeming; Liepe, Matthias U. Superconductor Science and Technology, Vol. 36, Issue 11 https://doi.org/10.1088/1361-6668/acf88d	journal	September 2023
Conductivity of Superconducting Films for Photon Energies between 0.3 and 4 0 k T c Glover, R. E.; Tinkham, M. Physical Review, Vol. 108, Issue 2 https://doi.org/10.1103/PhysRev.108.243	journal	October 1957
Theory of the Anomalous Skin Effect in Normal and Superconducting Metals Mattis, D. C.; Bardeen, J. Physical Review, Vol. 111, Issue 2 https://doi.org/10.1103/PhysRev.111.412	journal	July 1958
High Frequency Surface Resistivity of Tin in the Normal and Superconducting States Fairbank, William M. Physical Review, Vol. 76, Issue 8 https://doi.org/10.1103/PhysRev.76.1106	journal	October 1949
Surface Impedance of Normal and Superconductors at 24,000 Megacycles per Second Maxwell, E.; Marcus, P. M.; Slater, J. C. Physical Review, Vol. 76, Issue 9 https://doi.org/10.1103/PhysRev.76.1332	journal	November 1949
Predicted plasma oscillations in theBi2Sr2CaCu2O8high-temperature superconductor Mishonov, T. M. Physical Review B, Vol. 44, Issue 21 https://doi.org/10.1103/PhysRevB.44.12033	journal	December 1991
Nonlinear electrodynamics of superconducting NbN and Nb thin films at microwave frequencies Chin, C. C.; Oates, D. E.; Dresselhaus, G. Physical Review B, Vol. 45, Issue 9 https://doi.org/10.1103/PhysRevB.45.4788	journal	March 1992
Nonlinear microwave properties of superconducting Nb microstrip resonators Golosovsky, M. A.; Snortland, H. J.; Beasley, M. R. Physical Review B, Vol. 51, Issue 10 https://doi.org/10.1103/PhysRevB.51.6462	journal	March 1995
Microwave surface impedance of proximity-coupled Nb/Al bilayer films Pambianchi, Michael S.; Mao, S. N.; Anlage, Steven M. Physical Review B, Vol. 52, Issue 6 https://doi.org/10.1103/PhysRevB.52.4477	journal	August 1995
Surface impedance and optimum surface resistance of a superconductor with an imperfect surface Gurevich, Alex; Kubo, Takayuki Physical Review B, Vol. 96, Issue 18 https://doi.org/10.1103/PhysRevB.96.184515	journal	November 2017
Direct Measurement of Quasiparticle-Lifetime Broadening in a Strong-Coupled Superconductor Dynes, R. C.; Narayanamurti, V.; Garno, J. P. Physical Review Letters, Vol. 41, Issue 21 https://doi.org/10.1103/PhysRevLett.41.1509	journal	November 1978
Superconductivity in the Neighborhood of Metallic Contacts Cooper, Leon N. Physical Review Letters, Vol. 6, Issue 12 https://doi.org/10.1103/PhysRevLett.6.689	journal	June 1961
Determining Interface Dielectric Losses in Superconducting Coplanar-Waveguide Resonators Woods, W.; Calusine, G.; Melville, A. Physical Review Applied, Vol. 12, Issue 1 https://doi.org/10.1103/physrevapplied.12.014012	journal	July 2019
Electromagnetics of superconductors Mei, K. K.; Liang, G. -C. IEEE Transactions on Microwave Theory and Techniques, Vol. 39, Issue 9 https://doi.org/10.1109/22.83830	journal	January 1991
RSFQ logic/memory family: a new Josephson-junction technology for sub-terahertz-clock-frequency digital systems Likharev, K. K.; Semenov, V. K. IEEE Transactions on Appiled Superconductivity, Vol. 1, Issue 1 https://doi.org/10.1109/77.80745	journal	March 1991
Quantum flux parametron: a single quantum flux device for Josephson supercomputer Hosoya, M.; Hioe, W.; Casas, J. IEEE Transactions on Appiled Superconductivity, Vol. 1, Issue 2 https://doi.org/10.1109/77.84613	journal	June 1991
Current distribution, resistance, and inductance for superconducting strip transmission lines Sheen, D. M.; Ali, S. M.; Oates, D. E. IEEE Transactions on Appiled Superconductivity, Vol. 1, Issue 2 https://doi.org/10.1109/77.84617	journal	June 1991
Microwave Superconductivity Anlage, Steven M. IEEE Journal of Microwaves, Vol. 1, Issue 1 https://doi.org/10.1109/JMW.2020.3033156	journal	January 2021
Superconducting digital electronics Hayakawa, H.; Yoshikawa, N.; Yorozu, S. Proceedings of the IEEE, Vol. 92, Issue 10 https://doi.org/10.1109/JPROC.2004.833658	journal	October 2004
Practical Strategies for Power-Efficient Computing Technologies Chang, L.; Frank, D. J.; Montoye, R. K. Proceedings of the IEEE, Vol. 98, Issue 2 https://doi.org/10.1109/JPROC.2009.2035451	journal	February 2010
Microstrip-A New Transmission Technique for the Klilomegacycle Range Grieg, D.; Engelmann, H. Proceedings of the IRE, Vol. 40, Issue 12 https://doi.org/10.1109/JRPROC.1952.274144	journal	December 1952
Accurate microwave technique of surface resistance measurement of large-area HTS films using sapphire quasi-optical resonator Cherpak, N.; Barannik, A.; Filipov, Y. IEEE Transactions on Appiled Superconductivity, Vol. 13, Issue 2 https://doi.org/10.1109/TASC.2003.812400	journal	June 2003
Microwave and DC properties of niobium coplanar waveguides with 50-nm linewidth on silicon substrates Jutzi, W.; Wuensch, S.; Crocoll, E. IEEE Transactions on Appiled Superconductivity, Vol. 13, Issue 2 https://doi.org/10.1109/TASC.2003.813719	journal	June 2003
Critical Properties of Submicrometer-Patterned Nb Thin Film IEEE Transactions on Applied Superconductivity, Vol. 19, Issue 3 https://doi.org/10.1109/TASC.2009.2019099	journal	June 2009
Diffusion Stop-Layers for Superconducting Integrated Circuits and Qubits With Nb-Based Josephson Junctions Tolpygo, Sergey K.; Amparo, Denis; Hunt, Richard T. IEEE Transactions on Applied Superconductivity, Vol. 21, Issue 3 https://doi.org/10.1109/TASC.2010.2089665	journal	June 2011
Submicron Nb Microwave Transmission Lines and Components for Single-Flux-Quantum and Analog Large-Scale Superconducting Integrated Circuits Oates, Daniel E.; Tolpygo, Sergey K.; Bolkhovsky, Vladimir IEEE Transactions on Applied Superconductivity, Vol. 27, Issue 4 https://doi.org/10.1109/TASC.2017.2649842	journal	June 2017
Mutual and Self-Inductance in Planarized Multilayered Superconductor Integrated Circuits: Microstrips, Striplines, Bends, Meanders, Ground Plane Perforations Tolpygo, Sergey K.; Golden, Evan B.; Weir, Terence J. IEEE Transactions on Applied Superconductivity, Vol. 32, Issue 5 https://doi.org/10.1109/TASC.2022.3162758	journal	August 2022
Picosecond pulses from Josephson junctions: Phenomenological and microscopic analyses Peterson, R.; McDonald, D. IEEE Transactions on Magnetics, Vol. 13, Issue 1 https://doi.org/10.1109/TMAG.1977.1059257	journal	January 1977
Investigation of the gap edge density of states at oxidized Niobium surfaces by RF measurements Philipp, A.; Halbritter, J. IEEE Transactions on Magnetics, Vol. 19, Issue 3 https://doi.org/10.1109/TMAG.1983.1062359	journal	May 1983
Loss Considerations for Microstrip Resonators (Short Papers) Belohoubek, E.; Denlinger, E. IEEE Transactions on Microwave Theory and Techniques, Vol. 23, Issue 6 https://doi.org/10.1109/TMTT.1975.1128615	journal	June 1975
Determination of Loaded, Unloaded, and External Quality Factors of a Dielectric Resonator Coupled to a Microstrip Line Khanna, A.; Garault, Y. IEEE Transactions on Microwave Theory and Techniques, Vol. 31, Issue 3 https://doi.org/10.1109/TMTT.1983.1131473	journal	January 1983
Measurements of Permittivity, Dielectric Loss Tangent, and Resistivity of Float-Zone Silicon at Microwave Frequencies Krupka, J.; Breeze, J.; Centeno, A. IEEE Transactions on Microwave Theory and Techniques, Vol. 54, Issue 11 https://doi.org/10.1109/TMTT.2006.883655	journal	November 2006
Modeling Strategies for Superconducting Microstrip Transmission Line Structures U-Yen, Kongpop; Rostem, Karwan; Wollack, Edward J. IEEE Transactions on Applied Superconductivity, Vol. 28, Issue 6 https://doi.org/10.1109/tasc.2018.2827987	journal	September 2018
Molecular dynamics simulation of sputter trench-filling morphology in damascene process Ju, Shin-Pon; Weng, Cheng-I; Chang, Jee-Gong Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 20, Issue 3 https://doi.org/10.1116/1.1477423	journal	May 2002
Systems with Small Dissipation Braginsky, V. B.; Mitrofanov, V. P.; Panov, V. I. American Journal of Physics, Vol. 55, Issue 12 https://doi.org/10.1119/1.15272	journal	December 1987
Structure and transport properties of ultrathin YBa2Cu3O7−x films Varganov, A. V.; Vopilkin, E. A.; Vysheslavtsev, P. P. Journal of Experimental and Theoretical Physics Letters, Vol. 63, Issue 8 https://doi.org/10.1134/1.567081	journal	April 1996
Superconducting Microresonators: Physics and Applications Zmuidzinas, Jonas Annual Review of Condensed Matter Physics, Vol. 3, Issue 1 https://doi.org/10.1146/annurev-conmatphys-020911-125022	journal	March 2012
A four-level VLSI bipolar metallization design with chemical-mechanical planarization Guthrie, W. L.; Patrick, W. J.; Levine, E. IBM Journal of Research and Development, Vol. 36, Issue 5 https://doi.org/10.1147/rd.365.0845	journal	September 1992
Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBM Cote, D. R.; Nguyen, S. V.; Cote, W. J. IBM Journal of Research and Development, Vol. 39, Issue 4 https://doi.org/10.1147/rd.394.0437	journal	July 1995
Materials Characterization for Sub-Micron Superconducting Interconnects in Reciprocal Quantum Logic Circuits Garcia, Cougar Alessandro Tomas Digital Repository at the University of Maryland https://doi.org/10.13016/lzeu-4ecp	null	January 2022
100 GHz Demonstrations Based on the Single-Flux-Quantum Cell Library for the 10 kA/cm2 Nb Multi-Layer Process Yamanashi, Yuki; Kainuma, Toshiki; Yoshikawa, Nobuyuki IEICE Transactions on Electronics, Vol. E93-C, Issue 4 https://doi.org/10.1587/transele.E93.C.440	journal	January 2010
High quality Nb/Al-AlOx/Nb Josephson junctions : technological development and macroscopic quantum experiments Kaiser, Christoph KIT Scientific Publishing https://doi.org/10.5445/KSP/1000022422	text	January 2011