Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

Gikunda, Millicent N.; Harerimana, Ferdinand; Mangum, James M.; Rahman, Sumaya; Thompson, Joshua P.; Harris, Charles Thomas; Churchill, Hugh O. H.; Thibado, Paul M.

doi:10.3390/membranes12050533

Title: Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

Journal Article · 18 May 2022 · Membranes

DOI: https://doi.org/10.3390/membranes12050533 · OSTI ID:2469900

Gikunda, Millicent N. ^[1]; Harerimana, Ferdinand ^[1]; Mangum, James M. ^[1]; Rahman, Sumaya ^[1]; Thompson, Joshua P. ^[1]; Harris, Charles Thomas ^[2]; Churchill, Hugh O. H. ^[1];

^[1]

University of Arkansas, Fayetteville, AR (United States)
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding graphene-based variable capacitors on 100 mm silicon wafers. The first mask forms long trenches terminated by square wells featuring cone-shaped tips at their centers. The second mask fabricates metal traces from each tip to its contact pad along the trench and a second contact pad opposite the square well. A graphene membrane is then suspended over the square well to form a variable capacitor. The same capacitor structures were also built on 5 mm by 5 mm bare dies containing an integrated circuit underneath. We used atomic force microscopy, optical microscopy, and capacitance measurements in time to characterize the samples.

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Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: National Science Foundation (NSF); USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF); Walton Family Charitable Support Foundation

Grant/Contract Number:: NA0003525

OSTI ID:: 2469900

Journal Information:: Membranes, Journal Name: Membranes Journal Issue: 5 Vol. 12; ISSN 2077-0375

Publisher:: MDPICopyright Statement

Country of Publication:: United States

Language:: English

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Title: Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

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