Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters

Journal Article · 22 March 2024 · Nanophotonics (Online)

DOI: https://doi.org/10.1515/nanoph-2023-0877 · OSTI ID:2438916

Almutlaq, Jawaher  ^[1]; Kelley, Kyle P.  ^[2]; Choi, Hyeongrak ^[1]; Li, Linsen ^[1]; Lawrie, Benjamin  ^[2]; Dyck, Ondrej  ^[2]; Englund, Dirk ^[1]; Jesse, Stephen  ^[2]

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1. Massachusetts Institute of Technology (MIT), Cambridge, MA (United States)
2. Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Color centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch between diamond and air limits the optimal collection efficiency with conventional diamond device geometries. While different out-coupling methods with near-unity efficiency exist, many have yet to be realized due to current limitations in nanofabrication methods, especially for mechanically hard materials like diamond. Here, we leverage electron-beam-induced etching to modify Sn-implanted diamond quantum microchiplets containing integrated waveguides with a width and thickness of 280 nm and 200 nm, respectively. This approach allows for simultaneous high-resolution imaging and modification of the host matrix with an open geometry and direct writing. When coupled with the cathodoluminescence signal generated from the electron–emitter interactions, we can monitor the enhancement of the quantum emitters in real-time with nanoscale spatial resolution. The operando cathodoluminescence measurement and fabrication around single photon emitters demonstrated here provide a new foundation for the potential control of emitter–cavity interactions in integrated quantum photonics.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division (MSE); US Army Research Office (ARO); US Air Force Office of Scientific Research (AFOSR); National Science Foundation (NSF). Center for Quantum Networks
• Grant/Contract Number: AC05-00OR22725
• OSTI ID: 2438916
• Journal Information: Nanophotonics (Online), Journal Name: Nanophotonics (Online) Journal Issue: 12 Vol. 13; ISSN 2192-8614
• Publisher: de GruyterCopyright Statement
• Country of Publication: United States
• Language: English