DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Effects of alumina priming on the electrical properties of ZnO nanostructures derived from vapor-phase infiltration into self-assembled block copolymer thin films

Journal Article · · Materials Advances
DOI: https://doi.org/10.1039/D4MA00346B · OSTI ID:2370562
 [1];  [1];  [2]; ORCiD logo [2]; ORCiD logo [3]
  1. Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, New York 11794, USA
  2. Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA
  3. Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, New York 11794, USA, Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA

Alumina priming, typically used for vapor-phase infiltration (VPI) of weakly reactive precursors, increases both ZnO VPI fidelity and its electrical conductivity, as demonstrated in the ZnO nanostructures derived from self-assembled block copolymers.

Sponsoring Organization:
USDOE
Grant/Contract Number:
SC0012704
OSTI ID:
2370562
Alternate ID(s):
OSTI ID: 2376878
Journal Information:
Materials Advances, Journal Name: Materials Advances Journal Issue: 14 Vol. 5; ISSN MAADC9; ISSN 2633-5409
Publisher:
Royal Society of Chemistry (RSC)Copyright Statement
Country of Publication:
United Kingdom
Language:
English

References (59)

Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition journal September 2018
Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer journal May 2017
Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices journal September 2003
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures journal December 2012
Swelling-Assisted Sequential Infiltration Synthesis of Nanoporous ZnO Films with Highly Accessible Pores and Their Sensing Potential for Ethanol journal July 2021
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective journal November 2019
Optical and electrical properties of aluminum-doped zinc oxide nanoparticles journal August 2010
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy journal October 2014
Increased Chemical Stability of Vapor-Phase Infiltrated AlO x –Poly(methyl methacrylate) Hybrid Materials journal February 2020
Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development journal July 2015
Thermoelectric properties of Al-doped ZnO: experiment and simulation journal September 2016
Polymer self assembly in semiconductor microelectronics journal September 2007
Patterning with block copolymer thin films journal February 2005
Luminescence mechanism of ZnO thin film investigated by XPS measurement journal September 2007
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices journal January 2021
Photocurrent detection of chemically tuned hierarchical ZnO nanostructures grown on seed layers formed by atomic layer deposition journal January 2012
Sequential Infiltration Synthesis of Al2O3 in Biodegradable Polybutylene Succinate: Characterization of the Infiltration Mechanism journal October 2022
Influence of different ester side groups in polymers on the vapor phase infiltration with trimethyl aluminum journal January 2022
Review—Organic-Inorganic Hybrid Functional Materials: An Integrated Platform for Applied Technologies journal January 2018
Using Cylindrical Domains of Block Copolymers To Self-Assemble and Align Metallic Nanowires journal February 2008
Direct Immersion Annealing of Thin Block Copolymer Films journal September 2015
Extreme Carrier Depletion and Superlinear Photoconductivity in Ultrathin Parallel-Aligned ZnO Nanowire Array Photodetectors Fabricated by Infiltration Synthesis journal November 2017
Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition journal June 2023
Titanium infiltration into ultrathin PMMA brushes
  • Mani-Gonzalez, Pierre Giovanni; McFeely, Caitlin; Snelgrove, Matthew
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 39, Issue 4 https://doi.org/10.1116/6.0001061
journal June 2021
Advanced self-cleaning and antimicrobial organic-inorganic hybrid textiles achieved through vapor phase infiltration (VPI) conference May 2024
A highly efficient flexible dye-sensitized solar cell based on nickel sulfide/platinum/titanium counter electrode journal January 2015
Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates journal November 2015
Studies on optical, structural and electrical properties of atomic layer deposited Al-doped ZnO thin films with various Al concentrations and deposition temperatures journal October 2011
Large area dense nanoscale patterning of arbitrary surfaces journal July 2001
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers journal September 2010
Solvothermal Annealing of Block Copolymer Thin Films journal October 2013
Temperature and Exposure Dependence of Hybrid Organic–Inorganic Layer Formation by Sequential Vapor Infiltration into Polymer Fibers journal October 2012
Effect of Aluminum Doping Ratios on the Properties of Aluminum-Doped Zinc Oxide Films Deposited by Mist Chemical Vapor Deposition Method Applying for Photocatalysis journal January 2022
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates journal May 2011
Directing the self-assembly of block copolymers journal October 2007
Enhanced Hybridization and Nanopatterning via Heated Liquid-Phase Infiltration into Self-Assembled Block Copolymer Thin Films journal December 2019
Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid) journal May 2019
Gas Transport Selectivity of Ultrathin, Nanoporous, Inorganic Membranes Made from Block Copolymer Templates journal October 2017
Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis journal January 2014
Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells journal January 2015
Oxygen rich p -type ZnO thin films using wet chemical route with enhanced carrier concentration by temperature-dependent tuning of acceptor defects journal November 2011
Temperature-Dependent Infiltration of Polymers during Sequential Exposures to Trimethylaluminum journal July 2014
Robust Superhydrophobicity in Large-Area Nanostructured Surfaces Defined by Block-Copolymer Self Assembly journal October 2013
Infiltration Synthesis of Diverse Metal Oxide Nanostructures from Epoxidized Diene–Styrene Block Copolymer Templates journal February 2019
Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn–Al–O Interfaces Fabricated by Atomic Layer Deposition journal March 2017
Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films journal August 2010
Introducing a Robust Flexible Conductive Hybrid: Indium Oxide-ParyleneC Obtained by Vapor Phase Infiltration journal September 2023
Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials journal January 2017
Transparent conducting aluminum-doped zinc oxide thin films for organic light-emitting devices journal January 2000
Aluminum doped zinc oxide for organic photovoltaics journal May 2009
Laser induced photoconductivity in sol–gel derived Al doped ZnO thin films journal November 2015
Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study journal December 2016
Mechanisms and reactions during atomic layer deposition on polymers journal December 2013
Chipmakers look past Moore's law, and silicon journal July 2018
Three-dimensional electroactive ZnO nanomesh directly derived from hierarchically self-assembled block copolymer thin films journal January 2019
Mechanism of liquid-phase metal infiltration into pyridine-containing polymeric thin films journal April 2022
Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation journal February 2004
New Insights into Sequential Infiltration Synthesis journal September 2015
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997