Light-Mediated Contact Printing of Phosphorus Species onto Silicon Using Carbene-Based Molecular Layers

Raffaelle, Patrick R.; Wang, George T.; Shestopalov, Alexander A.

doi:10.1021/acs.langmuir.4c00763

Title: Light-Mediated Contact Printing of Phosphorus Species onto Silicon Using Carbene-Based Molecular Layers

Journal Article · 29 May 2024 · Langmuir

DOI: https://doi.org/10.1021/acs.langmuir.4c00763 · OSTI ID:2369098

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Department of Chemical Engineering, Hajim School of Engineering and Applied Sciences, University of Rochester, Rochester, New York 14627, United States
Sandia National Laboratories, Albuquerque, New Mexico 87185, United States

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Sponsoring Organization:: USDOE

Grant/Contract Number:: NA0003525

OSTI ID:: 2369098

Alternate ID(s):: OSTI ID: 2372603

Journal Information:: Langmuir, Journal Name: Langmuir; ISSN 0743-7463

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Title: Light-Mediated Contact Printing of Phosphorus Species onto Silicon Using Carbene-Based Molecular Layers

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